公开(公告)号：US11243350B2

公开(公告)日：2022-02-08

申请号：US16817582

申请日：2020-03-12

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Yusheng Bian ,  Bo Peng ,  Michal Rakowski

IPC: G02B6/122 ,  G02B6/12

Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to semiconductor devices having a reflector and a photonic component and a method of forming the same. The present disclosure provides a semiconductor device having a substrate, a photonic component arranged above the substrate, a bottom reflector arranged above the substrate and positioned below the photonic component, in which the bottom reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component, and a top reflector arranged above the photonic component, in which the top reflector has a plurality of grating structures configured to reflect electromagnetic waves towards the photonic component.

公开(公告)号：US20210278611A1

公开(公告)日：2021-09-09

申请号：US16807811

申请日：2020-03-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Asli Sahin ,  Colleen Meagher ,  Thomas Houghton ,  Bo Peng ,  Karen Nummy ,  Javier Ayala ,  Yusheng Bian

IPC: G02B6/42 ,  H01L21/84 ,  H01L21/311

Abstract: One illustrative device disclosed herein includes a V-groove in a base semiconductor layer of a semiconductor-on-insulator (SOI) substrate, wherein the V-groove is adapted to have a fiber optics cable positioned therein, and an optical component positioned above the V-groove. The device also includes a first layer of silicon dioxide positioned above the optical component, a second layer of silicon dioxide positioned on and in contact with the first layer of silicon dioxide and a third layer of silicon dioxide positioned on and in contact with the second layer of silicon dioxide.

公开(公告)号：US11002916B1

公开(公告)日：2021-05-11

申请号：US16682502

申请日：2019-11-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Michal Rakowski ,  Bo Peng

IPC: G02B6/34

Abstract: Structures including a grating coupler and methods of fabricating such structures. The structure includes a waveguide core, a bend, and a grating coupler coupled to the waveguide core by the bend. The grating coupler includes grating structures that are positioned with a spaced relationship in a layer stack above the bend.

公开(公告)号：US10989876B1

公开(公告)日：2021-04-27

申请号：US16724507

申请日：2019-12-23

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/26

Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the second coupler structure.

公开(公告)号：US10955614B1

公开(公告)日：2021-03-23

申请号：US16742165

申请日：2020-01-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/12 ,  G02B6/30 ,  G02B6/122 ,  G02B6/124 ,  G02B6/14 ,  H01L21/66 ,  G03F7/20 ,  G02B6/36 ,  F21V8/00 ,  G02B6/34

Abstract: Optical coupler structures have an insulator layer on a substrate, a waveguide structure in the insulator layer, and a cladding layer on the waveguide structure and the insulator layer. Optical grating couplers are on the cladding layer and the waveguide structure is connected between the optical grating couplers. The waveguide structure is discontinuous between the optical grating couplers. The insulator layer includes an array at a transmission blocking region between discontinuous sections of the waveguide structure. This array can be a void opening array of openings or can be a blocking element array of disconnected elements in the insulator layer.

公开(公告)号：US11782214B2

公开(公告)日：2023-10-10

申请号：US17816804

申请日：2022-08-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/26

CPC classification number: G02B6/26

Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.

公开(公告)号：US11536900B2

公开(公告)日：2022-12-27

申请号：US17453533

申请日：2021-11-04

Applicant: GlobalFoundries U.S. Inc.

Inventor： Benjamin V. Fasano ,  Andreas D. Stricker ,  Hanyi Ding ,  Yusheng Bian ,  Bo Peng

IPC: G02B6/122 ,  G02B6/12

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure, including an absorber layer separated from an optical grating coupler by a cladding material. The absorber is positioned to receive light reoriented through the optical grating coupler.

公开(公告)号：US20220381988A1

公开(公告)日：2022-12-01

申请号：US17816804

申请日：2022-08-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/26

Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.

公开(公告)号：US20210318490A1

公开(公告)日：2021-10-14

申请号：US16842887

申请日：2020-04-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bo Peng ,  Yusheng Bian ,  Michal Rakowski ,  Tymon Barwicz

IPC: G02B6/122 ,  G02F1/225

Abstract: One illustrative backscattering generator disclosed herein includes a low-reflection waveguide structure, a slot waveguide structure comprising a first waveguide, a second waveguide and a slot located between the first waveguide and the second waveguide, and a variable direction coupler operatively coupled to the low-reflection waveguide structure and the slot waveguide structure.

公开(公告)号：US11320589B1

公开(公告)日：2022-05-03

申请号：US17084186

申请日：2020-10-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Siva P. Adusumilli ,  Bo Peng ,  Kenneth J. Giewont

IPC: G02B6/124 ,  G02B6/12 ,  G02B6/13

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to grating couplers integrated with one or more airgap and methods of manufacture. The structure includes: a substrate material comprising one or more airgaps; and a grating coupler disposed over the substrate material and the one or more airgaps.