-
11.
公开(公告)号:US20230417989A1
公开(公告)日:2023-12-28
申请号:US17808168
申请日:2022-06-22
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/1228 , G02B6/126
Abstract: Disclosed is a structure including a polarization device with first and second waveguides. The first waveguide includes a core (e.g., a silicon nitride (SiN) core) suitable for high-power applications. The second waveguide includes: a primary core (e.g., another SiN core), which is positioned laterally adjacent to the core of the first waveguide and suitable for high-power applications, and secondary core(s) stacked vertically with the primary core to steer the optical mode and ensure that mode matching occurs between adjacent first and second coupling sections of the first and second waveguides, respectively, in order to achieve high-power splitter and/or combiner functions. Optionally, the primary and secondary cores of the second waveguide can be tapered at least within the second coupling section to increase the likelihood of mode matching.
-
公开(公告)号:US20230400633A1
公开(公告)日:2023-12-14
申请号:US17835513
申请日:2022-06-08
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/1228 , G02B6/13 , G02B2006/12061
Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a photonics chip including a first chip region, a first waveguide core in the first chip region, a second chip region, and a second waveguide core in the second chip region. The first chip region adjoins the second chip region along a boundary, the first waveguide core includes a first tapered section and the second waveguide core includes a second tapered section adjacent to the first tapered section. The first tapered section has a first longitudinal axis aligned substantially parallel to the boundary, and the second tapered section has a second longitudinal axis aligned substantially parallel to the boundary.
-
公开(公告)号:US20230393341A1
公开(公告)日:2023-12-07
申请号:US17830432
申请日:2022-06-02
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/305 , G02B6/136 , G02B6/1228 , G02B6/12004 , G02B2006/12147 , G02B2006/12061
Abstract: Structures including a ring resonator and methods of fabricating a structure including a ring resonator. The structure comprises an optical component, a first ring resonator positioned adjacent to the optical component, and a second ring resonator spaced in a vertical direction from the first ring resonator. The first ring resonator and the second ring resonator have an overlapping relationship.
-
公开(公告)号:US11828984B2
公开(公告)日:2023-11-28
申请号:US17679431
申请日:2022-02-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Theodore Letavic , Yusheng Bian , Hemant Dixit
CPC classification number: G02B6/1228 , G02B2006/12135
Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes a substrate, an optical component including a waveguide core, and a back-end-of-line stack including a heat spreader layer. The optical component is positioned in a vertical direction between the substrate and the back-end-of-line stack. The waveguide core contains a first material having a first thermal conductivity, and the heat spreader layer contains a second material having a second thermal conductivity that is greater than the first thermal conductivity of the first material.
-
公开(公告)号:US11803012B2
公开(公告)日:2023-10-31
申请号:US18055576
申请日:2022-11-15
Applicant: GlobalFoundries U.S. Inc.
Inventor: Michal Rakowski , Petar I. Todorov , Yusheng Bian , Won Suk Lee , Asif J. Chowdhury , Kenneth J. Giewont
CPC classification number: G02B6/125 , G02F1/0147 , G02B6/136 , G02B2006/12061 , G02B2006/12147
Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).
-
公开(公告)号:US11803009B2
公开(公告)日:2023-10-31
申请号:US17680421
申请日:2022-02-25
Applicant: GlobalFoundries U.S. Inc.
Inventor: Shesh Mani Pandey , Yusheng Bian , Steven M. Shank , Judson Holt
Abstract: Photonics structures including an optical component and methods of fabricating a photonics structure including an optical component. The photonics structure includes an optical component, a substrate having a cavity and a dielectric material in the cavity, and a dielectric layer positioned in a vertical direction between the optical component and the cavity. The optical component is positioned in a lateral direction to overlap with the cavity in the substrate.
-
17.
公开(公告)号:US11782214B2
公开(公告)日:2023-10-10
申请号:US17816804
申请日:2022-08-02
Applicant: GlobalFoundries U.S. Inc.
Inventor: Bo Peng , Ajey Poovannummoottil Jacob , Yusheng Bian
IPC: G02B6/26
CPC classification number: G02B6/26
Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.
-
18.
公开(公告)号:US11774686B2
公开(公告)日:2023-10-03
申请号:US17313472
申请日:2021-05-06
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Brett Cucci , Yusheng Bian , Abdelsalam Aboketaf , Edward Kiewra , Robert K. Leidy
IPC: G02B6/42
CPC classification number: G02B6/4206
Abstract: Structures for an edge coupler of a photonics chip and methods of forming an edge coupler for a photonics chip. The structure includes a waveguide core on a dielectric layer, as well as an interconnect structure including a interlayer dielectric layer positioned over the dielectric layer and an opening penetrating through the interlayer dielectric layer to the waveguide core. A region of the interlayer dielectric layer is positioned to overlap with a portion of the waveguide core. The region of the interlayer dielectric layer has a surface that is rounded with a curvature.
-
公开(公告)号:US11747559B2
公开(公告)日:2023-09-05
申请号:US17411106
申请日:2021-08-25
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian
CPC classification number: G02B6/1228 , G02B2006/12061 , G02B2006/12097
Abstract: Disclosed is a photonic integrated circuit (PIC) structure including: a first primary waveguide, which has a first main body and a first end portion that is tapered; at least one supplemental waveguide positioned laterally adjacent to and extending beyond the first end portion of the first primary waveguide; and a second primary waveguide, which has a second main body and a second end portion that at least partially underlays/overlays the first end portion of the first primary waveguide and the supplemental waveguide(s). The arrangement the end portions of the primary waveguides and the supplemental waveguide(s) allows for mode matching conditions to be met at multiple locations at the interface between the primary waveguides, thereby creating multiple signal paths between the primary waveguides and effectively reducing the light signal power density in any one path to prevent or at least minimize any power-induced damage.
-
公开(公告)号:US20230266530A1
公开(公告)日:2023-08-24
申请号:US17679470
申请日:2022-02-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Hemant Dixit , Theodore Letavic
CPC classification number: G02B6/122 , G02B6/13 , G02B2006/12135
Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes an optical component having a waveguide core, and multiple features positioned adjacent to the waveguide core. The waveguide core contains a first material having a first thermal conductivity, and the features contain a second material having a second thermal conductivity that is greater than the first thermal conductivity.
-
-
-
-
-
-
-
-
-