公开(公告)号：US20080037004A1

公开(公告)日：2008-02-14

申请号：US10563662

申请日：2004-07-08

申请人： Joseph Shamir ,  Nir Karasikov

发明人： Joseph Shamir ,  Nir Karasikov

IPC分类号： G01N21/00 ,  G01N15/02 ,  G02B26/08

CPC分类号： G01N15/1459 ,  G01N2015/145 ,  G01N2015/1493

摘要： The present invention provides method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, non-Gaussian laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration. The particles are fluid borne, airborne, or on a surface and have a size ranging from sub-micron to thousands of microns. In a preferred embodiment of the invention, the focused, synthesized, non-Gaussian laser beam is a dark beam. The non-Gaussian beam can be generated by employing a mask over a Gaussian laser beam or by directly modifying the laser cavity or by combining the beams from several lasers. The measurements can be made using the duration of interaction with a scanning beam, including dark field. The invention further provides a system for particle size and concentration measurement.

摘要翻译： 本发明提供了粒度和浓度测量方法，其包括以下步骤：提供聚焦的，合成的非高斯激光束，使光束与颗粒相互作用，测量相互作用信号和每单位时间的相互作用次数 的粒子，并使用算法将交互信号映射到粒子大小和每单位时间到浓度的相互作用次数。 颗粒是流体载体，空气传播的或在表面上，并且具有从亚微米到数千微米的尺寸。 在本发明的优选实施例中，聚焦的，合成的非高斯激光束是暗光束。 可以通过在高斯激光束上采用掩模或通过直接修改激光腔或通过组合来自多个激光束的光束来产生非高斯光束。 可以使用包括暗场的扫描光束的相互作用持续时间进行测量。 本发明还提供了一种用于粒度和浓度测量的系统。

公开(公告)号：US06262432B1

公开(公告)日：2001-07-17

申请号：US07985630

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in reflective disks in a production environment. These reflective disks are of the type commonly used as disk platters in hard disk drives. This apparatus uses a laser which provides a light beam directed to a polygon scanner, which provides a linear scan of the beam along a radius on both sides of the disk by using two mirrors to direct the light beam. The disk to be inspected is rotated such that its entire surface passes the scan path of the light beam. The light beam is reflected off the reflective disk, and returns to the scanning optics and the polygon scanner in a path coincident with the transmitted light beam. The reflected light beam is distinguished from the transmitted light beam by using a beam splitter to direct the reflected light beam to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects in the surface of the reflective disk above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the disk. An automatic disk handler loads untested disks into the apparatus and unloads and sorts tested disks according to the results of the inspection.

摘要翻译： 光学检查装置以非常高的分辨率高速运行，用于检测生产环境中的反射盘中的缺陷。 这些反光盘通常用作硬盘驱动器中的磁盘盘片。 该装置使用提供指向多边形扫描仪的光束的激光器，其通过使用两个反射镜来引导光束来提供沿着盘的两侧的半径的光束的线性扫描。 要检查的盘旋转，使得其整个表面通过光束的扫描路径。 光束从反射盘反射，并且在与透射光束重合的路径中返回到扫描光学器件和多边形扫描器。 通过使用分束器将反射光束与透射光束区分开来，以将反射光束引导到并行检测器阵列，其检测对应于反射镜表面中的缺陷的光束的标称高斯分布的变化 磁盘高于可编程门限电平。 这种并行检测方法允许检查装置识别远远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由光盘中的缺陷引起的光束变化。 自动磁盘处理器将未测试的磁盘加载到设备中，并根据检查结果卸载和排序测试磁盘。