公开(公告)号：US06262432B1

公开(公告)日：2001-07-17

申请号：US07985630

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in reflective disks in a production environment. These reflective disks are of the type commonly used as disk platters in hard disk drives. This apparatus uses a laser which provides a light beam directed to a polygon scanner, which provides a linear scan of the beam along a radius on both sides of the disk by using two mirrors to direct the light beam. The disk to be inspected is rotated such that its entire surface passes the scan path of the light beam. The light beam is reflected off the reflective disk, and returns to the scanning optics and the polygon scanner in a path coincident with the transmitted light beam. The reflected light beam is distinguished from the transmitted light beam by using a beam splitter to direct the reflected light beam to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects in the surface of the reflective disk above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the disk. An automatic disk handler loads untested disks into the apparatus and unloads and sorts tested disks according to the results of the inspection.

摘要翻译： 光学检查装置以非常高的分辨率高速运行，用于检测生产环境中的反射盘中的缺陷。 这些反光盘通常用作硬盘驱动器中的磁盘盘片。 该装置使用提供指向多边形扫描仪的光束的激光器，其通过使用两个反射镜来引导光束来提供沿着盘的两侧的半径的光束的线性扫描。 要检查的盘旋转，使得其整个表面通过光束的扫描路径。 光束从反射盘反射，并且在与透射光束重合的路径中返回到扫描光学器件和多边形扫描器。 通过使用分束器将反射光束与透射光束区分开来，以将反射光束引导到并行检测器阵列，其检测对应于反射镜表面中的缺陷的光束的标称高斯分布的变化 磁盘高于可编程门限电平。 这种并行检测方法允许检查装置识别远远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由光盘中的缺陷引起的光束变化。 自动磁盘处理器将未测试的磁盘加载到设备中，并根据检查结果卸载和排序测试磁盘。

公开(公告)号：US5638175A

公开(公告)日：1997-06-10

申请号：US492857

申请日：1995-09-19

申请人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

发明人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

IPC分类号： G01N21/88 ,  G02B27/52 ,  G01B9/02

CPC分类号： G01N21/88 ,  G02B27/52

摘要： A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results. The systems makes use of a "black beam" at the optical axis of the system, and uses at least two detectors to determine the intensity of the light beam after passing through a work piece.

摘要翻译： 提供了高速度，高灵敏度的检测系统（10），其基本上不受诸如振动之类的外部因素的影响。 检查系统是采用相位干涉测量以获得期望结果的光学系统。 这些系统在系统的光轴处使用“黑光束”，并且使用至少两个检测器来确定通过工件之后的光束的强度。

公开(公告)号：US5459576A

公开(公告)日：1995-10-17

申请号：US185123

申请日：1994-01-24

申请人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

发明人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

IPC分类号： G01N21/88 ,  G02B27/52 ,  G01B9/02

CPC分类号： G02B27/52 ,  G01N21/88

摘要： A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results.

摘要翻译： 提供了高速度，高灵敏度的检测系统（10），其基本上不受诸如振动之类的外部因素的影响。 检查系统是采用相位干涉测量以获得期望结果的光学系统。

公开(公告)号：US20050157308A1

公开(公告)日：2005-07-21

申请号：US10861249

申请日：2004-06-04

申请人： Andrei Brunfeld ,  Ilan Laver

发明人： Andrei Brunfeld ,  Ilan Laver

IPC分类号： G01B11/06 ,  G01N21/95 ,  G01B11/02

CPC分类号： G01N21/9501 ,  G01B11/0675

摘要： An apparatus and a method for measuring the thickness of wax film layer, bonded to a semiconductor wafer, are disclosed. Furthermore, the invention disclosed allows the detection of particles, such as dust particles embedded in the surface of the wax film. The invention uses optical measurements based on coherent illumination, interference of the rays reflected by the two surfaces of the wax, and imaging means that produces an image where defected can easily be distinguished from and non-defected areas. The invention leads to higher yields and therefore lower costs generally during the fabrication of semiconductor components, and particularly during the polishing stage of the wafer.

摘要翻译： 公开了一种用于测量结合到半导体晶片的蜡膜层的厚度的装置和方法。 此外，所公开的发明允许检测颗粒，例如嵌入在蜡膜表面中的灰尘颗粒。 本发明使用基于相干照明的光学测量，由蜡的两个表面反射的射线的干涉以及产生可以容易地区分缺陷区域和非缺陷区域的图像的成像装置。 本发明导致更高的产量，因此在半导体部件的制造期间，特别是在晶片的抛光阶段期间，通常会降低成本。

公开(公告)号：US06294793B1

公开(公告)日：2001-09-25

申请号：US07985631

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506 ,  G01N21/8806

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in transparent disks in a production environment. These transparent disks are of the type commonly used as disk platters in hard disk drives. This apparatus uses a laser beam directed to a polygon scanner, which provides a linear scan of the beam along a radius of the disk. The disk to be inspected is rotated such that its entire surface passes the scan path of the laser beam. The laser beam, after passing through the unit to be inspected, is directed to a parallel detector array, which detects changes in the nominal Gaussian distribution of the laser beam that correspond to defects in the surface of the transparent disk above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes of the laser beam caused by defects in the disk. An automatic disk handler loads untested disks into the apparatus and unloads and sorts tested disks according to the results of the inspection.

摘要翻译： 光学检查装置以高分辨率高速运行，用于检测生产环境中的透明盘中的缺陷。 这些透明磁盘通常用作硬盘驱动器中的磁盘盘片。 该装置使用指向多边形扫描器的激光束，其提供沿着盘的半径的光束的线性扫描。 要检查的盘旋转，使得其整个表面通过激光​​束的扫描路径。 激光束在通过要检查的单元之后被引导到并行检测器阵列，其检测对应于透明盘表面上的缺陷的激光束的标称高斯分布的变化高于可编程阈值水平。 这种并行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由光盘中的缺陷引起的激光束的变化。 自动磁盘处理器将未测试的磁盘加载到设备中，并根据检查结果卸载和排序测试磁盘。

公开(公告)号：US06252242B1

公开(公告)日：2001-06-26

申请号：US07985632

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in flat, polished media in a production environment. The configuration of the first embodiment is used to inspect transparent disks such as those used as disk platters in hard disk drives. The configuration of the second embodiment is used to inspect reflective disks. The configuration of the third embodiment is used to inspect transparent flat panels such as those commonly used in Liquid Crystal Display (LCD) panels. All embodiments use a laser providing a light beam directed to a polygon scanner, which provides a linear scan of the beam. The unit to be inspected is moved such that its entire surface passes the scan path of the light beam. The light beam, after contacting the unit to be inspected, is directed to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the media. An automatic media handler loads untested units into the apparatus and unloads and sorts tested units according to the results of the inspection.

摘要翻译： 光学检测装置在高分辨率下运行，用于检测生产环境中的平面抛光介质中的缺陷。 第一实施例的配置用于检查诸如在硬盘驱动器中用作盘片的透明盘。 第二实施例的结构用于检查反射盘。 第三实施例的结构用于检查诸如液晶显示（LCD）面板中常用的透明平板。 所有实施例都使用提供指向多边形扫描器的光束的激光器，其提供光束的线性扫描。 要检查的单元被移动，使得其整个表面通过光束的扫描路径。 光束在接触待检查单元之后被引导到并行检测器阵列，其检测对应于高于可编程阈值电平的缺陷的光束的标称高斯分布的变化。 这种并行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由介质中的缺陷引起的光束变化。 自动介质处理器将未测试的单元装载到设备中，并根据检查结果卸载并分类测试单元。

公开(公告)号：US06255666B1

公开(公告)日：2001-07-03

申请号：US07985629

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/958 ,  G01N21/8806

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in transparent flat panels in a production environment. This apparatus uses a laser which provides a light beam directed to a polygon scanner, which provides a linear scan of the beam along the width of the flat panel. The flat panel to be inspected is moved such that its entire surface passes the scan path of the light beam. The light beam passes through the transparent flat panel, and is reflected off a spherical mirror, back through the transparent flat panel, and returns to the scanning optics and the polygon scanner in a path coincident with the transmitted light beam. The reflected light beam is distinguished from the transmitted light beam by using a beam splitter to direct the reflected light beam to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects in the surface of the transparent flat panel above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the flat panel. An automatic flat panel handler loads untested flat panels into the apparatus and unloads and sorts tested flat panels according to the results of the inspection.

摘要翻译： 光学检查装置在高分辨率下运行，用于检测生产环境中的透明平板中的缺陷。 该装置使用提供指向多边形扫描仪的光束的激光器，其提供沿着平板的宽度的光束的线性扫描。 待检查的平板被移动，使得其整个表面通过光束的扫描路径。 光束通过透明平板，并从球面镜反射回到透明平板上，并且在与透射光束一致的路径中返回到扫描光学器件和多边形扫描仪。 通过使用分束器将反射光束与透射光束区分开来，以将反射光束引导到并行检测器阵列，其检测对应于透明表面中的缺陷的光束的标称高斯分布的变化 平板以上可编程门限电平。 这种平行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由平板中的缺陷引起的光束变化。 自动平板处理器将未测试的平板加载到设备中，并根据检查结果卸载和分类测试的平板。