公开(公告)号：US06255666B1

公开(公告)日：2001-07-03

申请号：US07985629

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/958 ,  G01N21/8806

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in transparent flat panels in a production environment. This apparatus uses a laser which provides a light beam directed to a polygon scanner, which provides a linear scan of the beam along the width of the flat panel. The flat panel to be inspected is moved such that its entire surface passes the scan path of the light beam. The light beam passes through the transparent flat panel, and is reflected off a spherical mirror, back through the transparent flat panel, and returns to the scanning optics and the polygon scanner in a path coincident with the transmitted light beam. The reflected light beam is distinguished from the transmitted light beam by using a beam splitter to direct the reflected light beam to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects in the surface of the transparent flat panel above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the flat panel. An automatic flat panel handler loads untested flat panels into the apparatus and unloads and sorts tested flat panels according to the results of the inspection.

摘要翻译： 光学检查装置在高分辨率下运行，用于检测生产环境中的透明平板中的缺陷。 该装置使用提供指向多边形扫描仪的光束的激光器，其提供沿着平板的宽度的光束的线性扫描。 待检查的平板被移动，使得其整个表面通过光束的扫描路径。 光束通过透明平板，并从球面镜反射回到透明平板上，并且在与透射光束一致的路径中返回到扫描光学器件和多边形扫描仪。 通过使用分束器将反射光束与透射光束区分开来，以将反射光束引导到并行检测器阵列，其检测对应于透明表面中的缺陷的光束的标称高斯分布的变化 平板以上可编程门限电平。 这种平行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由平板中的缺陷引起的光束变化。 自动平板处理器将未测试的平板加载到设备中，并根据检查结果卸载和分类测试的平板。

公开(公告)号：US06294793B1

公开(公告)日：2001-09-25

申请号：US07985631

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506 ,  G01N21/8806

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in transparent disks in a production environment. These transparent disks are of the type commonly used as disk platters in hard disk drives. This apparatus uses a laser beam directed to a polygon scanner, which provides a linear scan of the beam along a radius of the disk. The disk to be inspected is rotated such that its entire surface passes the scan path of the laser beam. The laser beam, after passing through the unit to be inspected, is directed to a parallel detector array, which detects changes in the nominal Gaussian distribution of the laser beam that correspond to defects in the surface of the transparent disk above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes of the laser beam caused by defects in the disk. An automatic disk handler loads untested disks into the apparatus and unloads and sorts tested disks according to the results of the inspection.

摘要翻译： 光学检查装置以高分辨率高速运行，用于检测生产环境中的透明盘中的缺陷。 这些透明磁盘通常用作硬盘驱动器中的磁盘盘片。 该装置使用指向多边形扫描器的激光束，其提供沿着盘的半径的光束的线性扫描。 要检查的盘旋转，使得其整个表面通过激光​​束的扫描路径。 激光束在通过要检查的单元之后被引导到并行检测器阵列，其检测对应于透明盘表面上的缺陷的激光束的标称高斯分布的变化高于可编程阈值水平。 这种并行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由光盘中的缺陷引起的激光束的变化。 自动磁盘处理器将未测试的磁盘加载到设备中，并根据检查结果卸载和排序测试磁盘。

公开(公告)号：US06252242B1

公开(公告)日：2001-06-26

申请号：US07985632

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in flat, polished media in a production environment. The configuration of the first embodiment is used to inspect transparent disks such as those used as disk platters in hard disk drives. The configuration of the second embodiment is used to inspect reflective disks. The configuration of the third embodiment is used to inspect transparent flat panels such as those commonly used in Liquid Crystal Display (LCD) panels. All embodiments use a laser providing a light beam directed to a polygon scanner, which provides a linear scan of the beam. The unit to be inspected is moved such that its entire surface passes the scan path of the light beam. The light beam, after contacting the unit to be inspected, is directed to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the media. An automatic media handler loads untested units into the apparatus and unloads and sorts tested units according to the results of the inspection.

摘要翻译： 光学检测装置在高分辨率下运行，用于检测生产环境中的平面抛光介质中的缺陷。 第一实施例的配置用于检查诸如在硬盘驱动器中用作盘片的透明盘。 第二实施例的结构用于检查反射盘。 第三实施例的结构用于检查诸如液晶显示（LCD）面板中常用的透明平板。 所有实施例都使用提供指向多边形扫描器的光束的激光器，其提供光束的线性扫描。 要检查的单元被移动，使得其整个表面通过光束的扫描路径。 光束在接触待检查单元之后被引导到并行检测器阵列，其检测对应于高于可编程阈值电平的缺陷的光束的标称高斯分布的变化。 这种并行检测方法允许检查装置识别远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由介质中的缺陷引起的光束变化。 自动介质处理器将未测试的单元装载到设备中，并根据检查结果卸载并分类测试单元。

公开(公告)号：US06262432B1

公开(公告)日：2001-07-17

申请号：US07985630

申请日：1992-12-03

申请人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

发明人： Andrei Brunfeld ,  Joseph Shamir ,  Gregory Toker ,  Liviu Singher ,  Ilan Laver ,  Ely Pekel

IPC分类号： G01H2188

CPC分类号： G01N21/9506

摘要： An optical inspection apparatus operates at high speed at very high resolution for detecting defects in reflective disks in a production environment. These reflective disks are of the type commonly used as disk platters in hard disk drives. This apparatus uses a laser which provides a light beam directed to a polygon scanner, which provides a linear scan of the beam along a radius on both sides of the disk by using two mirrors to direct the light beam. The disk to be inspected is rotated such that its entire surface passes the scan path of the light beam. The light beam is reflected off the reflective disk, and returns to the scanning optics and the polygon scanner in a path coincident with the transmitted light beam. The reflected light beam is distinguished from the transmitted light beam by using a beam splitter to direct the reflected light beam to a parallel detector array, which detects changes in the nominal Gaussian distribution of the light beam that correspond to defects in the surface of the reflective disk above a programmable threshold level. This parallel detection method allows the inspection apparatus to identify defects much smaller than the diffraction limits of the optics used, and will accurately identify changes in the light beam caused by defects in the disk. An automatic disk handler loads untested disks into the apparatus and unloads and sorts tested disks according to the results of the inspection.

摘要翻译： 光学检查装置以非常高的分辨率高速运行，用于检测生产环境中的反射盘中的缺陷。 这些反光盘通常用作硬盘驱动器中的磁盘盘片。 该装置使用提供指向多边形扫描仪的光束的激光器，其通过使用两个反射镜来引导光束来提供沿着盘的两侧的半径的光束的线性扫描。 要检查的盘旋转，使得其整个表面通过光束的扫描路径。 光束从反射盘反射，并且在与透射光束重合的路径中返回到扫描光学器件和多边形扫描器。 通过使用分束器将反射光束与透射光束区分开来，以将反射光束引导到并行检测器阵列，其检测对应于反射镜表面中的缺陷的光束的标称高斯分布的变化 磁盘高于可编程门限电平。 这种并行检测方法允许检查装置识别远远小于所使用的光学器件的衍射极限的缺陷，并且将准确地识别由光盘中的缺陷引起的光束变化。 自动磁盘处理器将未测试的磁盘加载到设备中，并根据检查结果卸载和排序测试磁盘。

公开(公告)号：US5638175A

公开(公告)日：1997-06-10

申请号：US492857

申请日：1995-09-19

申请人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

发明人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

IPC分类号： G01N21/88 ,  G02B27/52 ,  G01B9/02

CPC分类号： G01N21/88 ,  G02B27/52

摘要： A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results. The systems makes use of a "black beam" at the optical axis of the system, and uses at least two detectors to determine the intensity of the light beam after passing through a work piece.

摘要翻译： 提供了高速度，高灵敏度的检测系统（10），其基本上不受诸如振动之类的外部因素的影响。 检查系统是采用相位干涉测量以获得期望结果的光学系统。 这些系统在系统的光轴处使用“黑光束”，并且使用至少两个检测器来确定通过工件之后的光束的强度。

公开(公告)号：US5459576A

公开(公告)日：1995-10-17

申请号：US185123

申请日：1994-01-24

申请人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

发明人： Andrei Brunfeld ,  Gregory Toker ,  Zvi Yaniv ,  Ilan Laver

IPC分类号： G01N21/88 ,  G02B27/52 ,  G01B9/02

CPC分类号： G02B27/52 ,  G01N21/88

摘要： A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results.

摘要翻译： 提供了高速度，高灵敏度的检测系统（10），其基本上不受诸如振动之类的外部因素的影响。 检查系统是采用相位干涉测量以获得期望结果的光学系统。

公开(公告)号：US07253891B2

公开(公告)日：2007-08-07

申请号：US10753391

申请日：2004-01-09

申请人： Gregory Toker ,  Andrei Brunfeld ,  Ilia Lutsker

发明人： Gregory Toker ,  Andrei Brunfeld ,  Ilia Lutsker

IPC分类号： G01B11/24 ,  G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/95684 ,  G01N2021/1772 ,  G01N2021/1785 ,  G01N2021/8887 ,  G01N2201/06113

摘要： Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.

摘要翻译： 用于感测关于包括布置成获取关于表面的二维信息的第一多个光学元件的表面的信息的设备，布置成获取关于表面的形貌信息的第二多个光学元件，其中第一多个和第二多个光学元件 布置成同时向单个传感器阵列的至少部分不重叠的部分提供二维信息和形貌信息。

公开(公告)号：US20120057154A1

公开(公告)日：2012-03-08

申请号：US12877480

申请日：2010-09-08

申请人： Andrei Brunfeld ,  Bryan Clark ,  Gregory Toker ,  Morey T. Roscrow

发明人： Andrei Brunfeld ,  Bryan Clark ,  Gregory Toker ,  Morey T. Roscrow

IPC分类号： G01N21/88

CPC分类号： G01N21/8806

摘要： An optical surface inspection system provides dark-field detection avoiding ghost images and without capturing, stray, reflected or re-scattered light. The system includes an illumination system that generates an illumination spot on a surface under inspection collecting lens that collects substantially all light scattered from the surface under inspection from the illumination spot. The system also includes a light guide with a first end having a numerical aperture matched to an exit aperture of the collecting lens and a field of view matched to the illumination spot, and a second end coupled to a detector.

摘要翻译： 光学表面检查系统提供暗场检测，避免重影，并且不捕获，杂散，反射或再散射光。 该系统包括照明系统，其在检查收集透镜的表面上产生基本上从照明点检测的表面散射的所有光的照明点。 该系统还包括光导，其具有与收集透镜的出射孔匹配的数值孔径的第一端和与照明点匹配的视场，以及耦合到检测器的第二端。

公开(公告)号：US07330277B2

公开(公告)日：2008-02-12

申请号：US11156309

申请日：2005-06-17

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01B9/02

CPC分类号： G01N21/211

摘要： A resonant ellipsometer and method for determining ellipsometric parameters of a surface provide an efficient and low-cost mechanism for performing ellipsometric measurements. A surface of interest is included as a reflection point of a resonance optical path within a resonator. The intersection of the resonance optical path with the surface of interest is at an angle away from normal so that the complex reflectivity of the surface alters the phase of the resonance optical path. Intensity measurements of light emitted from a partially reflective surface of the resonator for orthogonal polarizations and for at least two effective cavity lengths provide complete information for computing the ellipsoidal parameters on the surface of interest. The resonator may be a Fabry-Perot resonator or a ring resonator. The wavelength of the illumination can be swept, or the cavity length mechanically or electronically altered to change the cavity length.

摘要翻译： 用于确定表面的椭偏参数的共振椭偏仪和方法为执行椭圆测量提供了一种有效和低成本的机制。 感兴趣的表面被包括在谐振器内的谐振光路的反射点。 共振光路与感兴趣的表面的交点与正常的角度成一角度，使得表面的复反射率改变了共振光路的相位。 从谐振器的部分反射表面发射的用于正交偏振和至少两个有效腔长度的强度测量提供用于计算感兴趣的表面上的椭圆体参数的完整信息。 谐振器可以是法布里 - 珀罗谐振器或环形谐振器。 可以扫描照明的波长，或者机械地或电子地改变空腔长度以改变腔的长度。

公开(公告)号：US20050236589A1

公开(公告)日：2005-10-27

申请号：US11167807

申请日：2005-06-27

申请人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

发明人： Andrei Brunfeld ,  Gregory Toker ,  Bryan Clark

IPC分类号： G01N21/21 ,  G01N21/86 ,  G01N21/94 ,  G01N21/95 ,  G01V8/00

CPC分类号： G01N21/94 ,  G01N21/21 ,  G01N21/211 ,  G01N21/9501

摘要： A resonator method and system for distinguishing characteristics of surface features or contaminants provides improved inspection or surface feature detection capability in scanning optical systems. A resonator including a surface of interest in the resonant path is coupled to a detector that detects light leaving the resonator. Changes in the resonance peak positions and peak intensities are evaluated against known changes for standard scatters in order to determine the material characteristics of an artifact at the surface of interest that causes a resonance change. The lateral size of the artifact is determined by de-convolving a known illumination spot size with the changing resonance characteristics, and the standard scatterer data is selected in conformity with the determined artifact size. The differential analysis using resonance peak shifts corresponding to phase and amplitude information provides an identification algorithm that identifies at least one artifact/material type is identified from matching known behaviors of artifacts/materials.

摘要翻译： 用于区分表面特征或污染物的特性的谐振器方法和系统在扫描光学系统中提供了改进的检查或表面特征检测能力。 包括谐振路径中感兴趣的表面的谐振器耦合到检测离开谐振器的光的检测器。 对于标准散射的已知变化来评估共振峰位置和峰强度的变化，以便确定引起共振变化的感兴趣表面处的伪影的材料特性。 伪影的横向尺寸通过使具有改变的共振特性的已知照明光斑尺寸去卷积来确定，并且根据所确定的人造物尺寸选择标准散射体数据。 使用对应于相位和幅度信息的共振峰值偏移的差分分析提供了一种识别算法，其识别从匹配已知的人造物/材料行为识别出至少一个假象/材料类型。