公开(公告)号：US09704699B2

公开(公告)日：2017-07-11

申请号：US14911411

申请日：2014-07-09

Applicant: Hitachi High-Technologies Corporation

Inventor： Hiroyuki Satake ,  Hideki Hasegawa ,  Yukiko Hirabayashi ,  Yuichiro Hashimoto

IPC: H01J49/00 ,  H01J49/10 ,  H01J49/04 ,  H01J49/16

CPC classification number: H01J49/107 ,  H01J49/0468 ,  H01J49/165 ,  H01J49/168

Abstract: In order to provide an ion source that can be easily switched with high sensitivity and in a short time, the ion source includes an ionization probe for spraying a sample, a heating chamber for heating and vaporizing a sample; and driving portions and for changing the distance between an outlet end (i.e., an end on the spray side) of the ionization probe and an inlet end (i.e., an end on the ionization probe side) of the heating chamber. The positions of the ionization probe and the heating chamber are controlled by the driving portions so that an ionization region that uses the ionization probe or an ionization region that uses the heating chamber is positioned near the ion inlet port of the mass spectrometer.