公开(公告)号：US09159529B2

公开(公告)日：2015-10-13

申请号：US14379704

申请日：2013-02-18

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minoru Yamazaki ,  Hideyuki Kazumi ,  Yuko Sasaki ,  Makoto Suzuki

IPC: G01N23/00 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/147 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/063 ,  H01J2237/15 ,  H01J2237/1501 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/2814

Abstract: It is an object of the present invention to provide a scanning electron microscope for discriminating an angle of an electron ejected from a sample without providing an opening for restricting the angle at outside of an axis. In order to achieve the object described above, there is proposed a scanning electron microscope which includes a deflector to deflect an irradiating position of an electron beam, and a control unit to control the deflector, and further includes a detector to detecting an electron provided by irradiating a sample with the electron beam, an opening configuring member arranged between the detector and the deflector and having an opening for passing the electron beam, and a secondary signal deflector to deflect an electron ejected from the sample, in which the secondary signal deflector is controlled to deflect the electron ejected from the sample toward an opening of passing the electron beam in accordance with a deflection control of the deflector.

Abstract translation: 本发明的目的是提供一种扫描电子显微镜，用于鉴别从样品喷出的电子的角度，而不设置用于限制轴外的角度的开口。 为了实现上述目的，提出了一种扫描电子显微镜，其包括用于偏转电子束的照射位置的偏转器和用于控制偏转器的控制单元，并且还包括检测器，用于检测由 用电子束照射样品，布置在检测器和偏转器之间并具有用于使电子束通过的开口的开口构成部件和辅助信号偏转器，用于偏转从样品喷出的电子，其中次级信号偏转器是 被控制以根据偏转器的偏转控制将从样品喷出的电子偏转到通过电子束的开口。