Vacuum measuring device with interchangeable sensors
    11.
    发明申请
    Vacuum measuring device with interchangeable sensors 审中-公开
    具有可互换传感器的真空测量装置

    公开(公告)号:US20110167919A1

    公开(公告)日:2011-07-14

    申请号:US13005502

    申请日:2011-01-12

    CPC classification number: G01L19/0007 G01L21/14 G01L27/00

    Abstract: An interoperable vacuum measuring device is presented, which automatically adjusts to one of two or more vacuum sensors having different electrical characteristics. The interoperable vacuum measuring device in a first step detects which type of vacuum sensor it is connected to. In a second step it controls and evaluates the vacuum sensor, using control parameters determined in response to the detection of the first step.Detection of a vacuum sensor type is achieved by measuring the electrical resistance between any two pins of a vacuum sensor's connector and comparing the measured resistance values with stored resistance values of known vacuum sensors.Further, a vacuum measuring device is presented, which automatically identifies a vacuum sensor, and associates a vacuum pressure measurement with a vacuum sensor. The identification of a vacuum sensor is facilitated by an identification disk, which is placed onto and operatively connected to the male terminals of a vacuum sensor's connector.

    Abstract translation: 提供了可互操作的真空测量装置,其自动调节到具有不同电特性的两个或更多个真空传感器之一。 第一步中的可互操作的真空测量装置检测其连接的真空传感器的类型。 在第二步中,使用响应于第一步骤的检测确定的控制参数来控制和评估真空传感器。 通过测量真空传感器连接器的任何两个引脚之间的电阻并将测量的电阻值与已知真空传感器的存储的电阻值进行比较来实现真空传感器类型的检测。 此外,提出了一种真空测量装置,其自动识别真空传感器,并将真空压力测量与真空传感器相关联。 通过将识别盘放置在真空传感器的连接器的阳端上并可操作地连接到真空传感器的连接器的阳端子来促进真空传感器的识别。

    Pressure or force sensor structure and method for producing the same
    12.
    发明授权
    Pressure or force sensor structure and method for producing the same 失效
    压力或力传感器结构及其制造方法

    公开(公告)号:US06675656B1

    公开(公告)日:2004-01-13

    申请号:US09647958

    申请日:2000-11-29

    CPC classification number: G01L1/142 G01L1/144 G01L9/0072

    Abstract: A force or pressure sensor structure has a membrane and a counter-structure, both being provided with electrodes for determining capacitors. There are at least two capacitors connected in series or in parallel for determining a desired pressure/capacitance dependence or a desired force/capacitance dependence. The counter-structure preferably is fixed and has a multiplicity of electrode areas in the shape of segments of a circle in order to assemble electrode areas obtained by optimization in a series or parallel connection. The interconnection of the individual elementary capacitors are preferably realized by a multilayer construction. The same membrane and an identical evaluation circuit can be used for any pressure/capacitance or force/capacitance dependence desired, with only the multilayer construction requiring modification for a different dependence. The electrode structures can preferably be defined by a few specifications, such as e.g., length, width, spacing or angle, radius, respectively.

    Abstract translation: 力或压力传感器结构具有膜和对向结构,两者都设置有用于确定电容器的电极。 串联或并联连接有至少两个电容器用于确定所需的压力/电容依赖性或期望的力/电容依赖性。 相对结构优选地是固定的并且具有圆形形状的多个电极区域,以便组装通过串联或并联连接优化获得的电极区域。 各个基本电容器的互连优选通过多层结构实现。 可以使用相同的膜和相同的评估电路用于所需的任何压力/电容或力/电容依赖性,只需要对不同依赖性进行修改的多层结构。 电极结构可以优选地由几个规格限定,例如分别为长度,宽度,间距或角度半径。

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