Abstract:
An interoperable vacuum measuring device is presented, which automatically adjusts to one of two or more vacuum sensors having different electrical characteristics. The interoperable vacuum measuring device in a first step detects which type of vacuum sensor it is connected to. In a second step it controls and evaluates the vacuum sensor, using control parameters determined in response to the detection of the first step.Detection of a vacuum sensor type is achieved by measuring the electrical resistance between any two pins of a vacuum sensor's connector and comparing the measured resistance values with stored resistance values of known vacuum sensors.Further, a vacuum measuring device is presented, which automatically identifies a vacuum sensor, and associates a vacuum pressure measurement with a vacuum sensor. The identification of a vacuum sensor is facilitated by an identification disk, which is placed onto and operatively connected to the male terminals of a vacuum sensor's connector.
Abstract:
A force or pressure sensor structure has a membrane and a counter-structure, both being provided with electrodes for determining capacitors. There are at least two capacitors connected in series or in parallel for determining a desired pressure/capacitance dependence or a desired force/capacitance dependence. The counter-structure preferably is fixed and has a multiplicity of electrode areas in the shape of segments of a circle in order to assemble electrode areas obtained by optimization in a series or parallel connection. The interconnection of the individual elementary capacitors are preferably realized by a multilayer construction. The same membrane and an identical evaluation circuit can be used for any pressure/capacitance or force/capacitance dependence desired, with only the multilayer construction requiring modification for a different dependence. The electrode structures can preferably be defined by a few specifications, such as e.g., length, width, spacing or angle, radius, respectively.