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公开(公告)号：US20100083766A1
公开(公告)日：2010-04-08
申请号：US12574261
申请日：2009-10-06
申请人： Masayuki Yoneda , Tomohisa Tokuda
发明人： Masayuki Yoneda , Tomohisa Tokuda
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L9/0042 , G01L13/025 , G01L15/00
摘要： A pressure sensor according to the present invention comprises: a differential pressure diaphragm, which is provided to a center part of a sensor chip; a differential pressure gauge, which is provided to a perimeter edge part of the differential pressure diaphragm and is formed in radial directions; a differential pressure gauge, which is disposed at a position at which it opposes the differential pressure gauge and, together with the first differential pressure gauge, sandwiches the differential pressure diaphragm and is formed in perimeter directions, which are perpendicular to the radial directions; a differential pressure gauge, which is provided in the vicinity of the differential pressure gauge and is provided in the perimeter directions; a differential pressure gauge, which is disposed at a position at which it opposes the differential pressure gauge and, together with the differential pressure gauge, sandwiches the differential pressure diaphragm and is formed in the radial directions; a static pressure diaphragm, which is disposed at a position that lies in the perimeter directions between the differential pressure gauge and the differential pressure gauge; and a static pressure diaphragm, which is disposed at a position at which it opposes the static pressure diaphragm and, together with the static pressure diaphragm, sandwiches the differential pressure diaphragm.
摘要翻译： 根据本发明的压力传感器包括：差压膜，其设置在传感器芯片的中心部分; 差压表，其设置在压差隔膜的周缘部，并且沿径向方向形成; 差压计设置在与差压表相对的位置处，并与第一差压表一起夹紧差压隔膜，并且在垂直于径向方向的周向形成; 差压表，其设置在差压计附近并沿周向设置; 差压表设置在与差压表相对的位置处，并与差压表一起夹紧差压隔膜并沿径向形成; 静压膜，其设置在位于差压表和压差计之间的周边方向上的位置; 以及设置在与静压隔膜相对的位置并与静压隔膜一起夹紧差压隔膜的静压隔膜。
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公开(公告)号：US20100083765A1
公开(公告)日：2010-04-08
申请号：US12574075
申请日：2009-10-06
申请人： Masayuki Yoneda , Tomohisa Tokuda
发明人： Masayuki Yoneda , Tomohisa Tokuda
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L9/065
摘要： A pressure sensor according to the present invention comprises: a differential pressure diaphragm; a static pressure diaphragm, which is provided to an outer perimeter part of the differential pressure diaphragm; a first static pressure gauge pair that is formed in the end part of the static pressure diaphragm and comprises two static pressure gauges, which are disposed such that they sandwich the differential pressure diaphragm; and a second static pressure gauge pair that is formed in the center part of the static pressure diaphragm and comprises two static pressure gauges which are disposed such that they sandwich the differential pressure diaphragm.
摘要翻译： 根据本发明的压力传感器包括：差压隔膜; 静压膜，其设置在差压隔膜的外周部; 第一静压计对，其形成在静压隔膜的端部，并包括两个静压计，它们被设置成它们夹在压差隔膜上; 以及形成在静压隔膜的中心部分的第二静压计对，并且包括两个静压计，它们被设置成使得它们夹在差压隔膜上。
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公开(公告)号：US08042400B2
公开(公告)日：2011-10-25
申请号：US12574261
申请日：2009-10-06
申请人： Masayuki Yoneda , Tomohisa Tokuda
发明人： Masayuki Yoneda , Tomohisa Tokuda
IPC分类号： G01L13/02
CPC分类号： G01L9/0054 , G01L9/0042 , G01L13/025 , G01L15/00
摘要： A pressure sensor according to the present invention comprises: a differential pressure diaphragm, which is provided to a center part of a sensor chip; a differential pressure gauge, which is provided to a perimeter edge part of the differential pressure diaphragm and is formed in radial directions; a differential pressure gauge, which is disposed at a position at which it opposes the differential pressure gauge and, together with the first differential pressure gauge, sandwiches the differential pressure diaphragm and is formed in perimeter directions, which are perpendicular to the radial directions; a differential pressure gauge, which is provided in the vicinity of the differential pressure gauge and is provided in the perimeter directions; a differential pressure gauge, which is disposed at a position at which it opposes the differential pressure gauge and, together with the differential pressure gauge, sandwiches the differential pressure diaphragm and is formed in the radial directions; a static pressure diaphragm, which is disposed at a position that lies in the perimeter directions between the differential pressure gauge and the differential pressure gauge; and a static pressure diaphragm, which is disposed at a position at which it opposes the static pressure diaphragm and, together with the static pressure diaphragm, sandwiches the differential pressure diaphragm.
摘要翻译： 根据本发明的压力传感器包括：差压膜，其设置在传感器芯片的中心部分; 差压表，其设置在压差隔膜的周缘部，并且沿径向方向形成; 差压表设置在与差压表相对的位置处，并与第一差压表一起夹紧差压隔膜，并且在与径向方向垂直的周向形成; 差压表，其设置在差压计附近并沿周向设置; 差压表设置在与差压表相对的位置处，并与差压表一起夹紧差压隔膜并沿径向形成; 静压膜，其设置在位于差压表和压差计之间的周边方向上的位置; 以及设置在与静压隔膜相对的位置并与静压隔膜一起夹紧差压隔膜的静压隔膜。
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公开(公告)号：US20120006129A1
公开(公告)日：2012-01-12
申请号：US13176891
申请日：2011-07-06
IPC分类号： G01L1/22
CPC分类号： G01L19/147
摘要： Provision of a pressure measuring device having a flexible membrane that receives the pressure; a pedestal, provided with a raised portion having a bottom face that is circular that supports the flexible membrane; and a supporting member that is bonded to the circular bottom face of the raised portion. The flexible membrane is made out of, for example, silicon, and has the (100) face as the primary face. Moreover, the flexible membrane is provided held between a silicon substrate, which is provided with a recessed portion, and a silicon substrate, which is provided with a recessed portion. Because of this, the flexible membrane is held on the pedestal with the silicon substrate interposed therebetween.
摘要翻译： 提供具有接收压力的柔性膜的压力测量装置; 基座，设置有具有支撑柔性膜的圆形的底面的凸起部分; 以及支撑构件，其结合到所述凸起部分的圆形底面。 柔性膜由例如硅制成，并且具有（100）面作为主面。 此外，柔性膜保持在设置有凹部的硅衬底和设置有凹部的硅衬底之间。 因此，柔性膜保持在基座上，硅衬底插入其中。
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公开(公告)号：US20090193872A1
公开(公告)日：2009-08-06
申请号：US12365262
申请日：2009-02-04
摘要： To provide a gas sensor chip, and a gas sensor provided therewith, capable of producing stable output characteristics over an extended period of time even when installed in a harsh environment such as a boiler smokestack carrying exhaust gasses. There is a backside structure wherein a catalyst carrier that contacts a gas to be measured is disposed on one side of a thermal conductor, a temperature sensing portion is disposed in a location that does not contact the gas to be measured, on the other side of the thermal conductor, and the temperature sensing portion measures the temperature corresponding to the temperature of the catalyst carrier through the thermal conductor, to enable the sensing of the amount of flow over an extended period of time without the temperature sensing portion being negatively affected by the gas to be measured.
摘要翻译： 为了提供一种气体传感器芯片及其设置的气体传感器，即使安装在诸如携带废气的锅炉烟囱等恶劣环境下，也能够在长时间内产生稳定的输出特性。 存在背面结构，其中与待测气体接触的催化剂载体设置在热导体的一侧上，温度感测部分设置在不接触待测气体的位置，另一侧 热导体和温度感测部分测量对应于通过热导体的催化剂载体的温度的温度，以便能够在长时间段内感测流量，而不会受到温度感测部分的不利影响 要测量的气体
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公开(公告)号：US08156789B2
公开(公告)日：2012-04-17
申请号：US12365262
申请日：2009-02-04
IPC分类号： G01N25/00
摘要： To provide a gas sensor chip, and a gas sensor provided therewith, capable of producing stable output characteristics over an extended period of time even when installed in a harsh environment such as a boiler smokestack carrying exhaust gasses. There is a backside structure wherein a catalyst carrier that contacts a gas to be measured is disposed on one side of a thermal conductor, a temperature sensing portion is disposed in a location that does not contact the gas to be measured, on the other side of the thermal conductor, and the temperature sensing portion measures the temperature corresponding to the temperature of the catalyst carrier through the thermal conductor, to enable the sensing of the amount of flow over an extended period of time without the temperature sensing portion being negatively affected by the gas to be measured.
摘要翻译： 为了提供一种气体传感器芯片及其设置的气体传感器，即使安装在诸如携带废气的锅炉烟囱等恶劣环境下，也能够在长时间内产生稳定的输出特性。 存在背面结构，其中与待测气体接触的催化剂载体设置在热导体的一侧上，温度感测部分设置在不接触待测气体的位置，另一侧 热导体和温度感测部分测量对应于通过热导体的催化剂载体的温度的温度，以便能够在长时间段内感测流量，而不会受到温度感测部分的不利影响 要测量的气体
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