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公开(公告)号:US08094295B2
公开(公告)日:2012-01-10
申请号:US12555610
申请日:2009-09-08
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
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公开(公告)号:US07586593B2
公开(公告)日:2009-09-08
申请号:US11605239
申请日:2006-11-29
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
摘要翻译: 本发明提供一种检查装置和检查方法。 检查装置包括用于支撑被检查物体的台架机构。 在检测光学系统中设置空间滤波器来检查物体。 打印机用于打印空间滤镜的结果。 空间滤波器可以以傅里叶变换图像的形式提供。
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公开(公告)号:US07768634B2
公开(公告)日:2010-08-03
申请号:US12192578
申请日:2008-08-15
申请人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
发明人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
IPC分类号: G01N21/00
CPC分类号: G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要: An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
摘要翻译: 一种检查装置和方法,包括:第一和第二照明单元,用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元,其以不同的仰角方向布置在样本的表面上,用于检测样本的图像 由第一和第二照明单元照亮。
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公开(公告)号:US07248352B2
公开(公告)日:2007-07-24
申请号:US10724750
申请日:2003-12-02
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
摘要翻译: 本发明是用于检查异物的缺陷的装置,包括照明光学系统,检测光学系统,屏蔽单元,其设置在所述检测光学系统中,以选择性地屏蔽来自存在于检查对象上的电路图案的衍射光图案 以及算术处理系统,其中所述屏蔽单元包括微镜阵列器件或反射型液晶或透射型液晶,或将屏蔽图案转印到光学透明基板或基板或 蚀刻以留下屏蔽图案的薄膜,或通过加热,突然冷或光照射或电场或磁场的变化或透镜中的可变化的光学透明基板,或圆柱形的屏蔽板或 板形。
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公开(公告)号:US20060124874A1
公开(公告)日:2006-06-15
申请号:US10536715
申请日:2003-11-27
申请人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
发明人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
CPC分类号: G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要: A defects inspecting apparatus having: a scanning stage for running into a predetermined direction while mounting an inspection target substrate thereon; an illumination optic system for irradiating an illumination light beam upon a surface of the inspection target substrate at a predetermined angle inclined thereto; a detection optic system including, an upper-directed photo-detector for receiving upper-directed reflected/scattered lights emitting upwards from the inspection target substrate, thereby converting them into an upper-directed image signal, and a side-directed photo-detector for receiving side-directed reflected/scattered lights emitting for the inspection target substrate into an inclined direction, so as to flatly intersects the illumination light beam, and thereby converting into a side-directed image signal; and a signal processing system-for detecting defects upon basis of the upper-directed image signal and the side-directed image signal.
摘要翻译: 一种缺陷检查装置,具有:在其上安装检查对象基板的同时沿预定方向行进的扫描台; 照明光学系统,用于以与其倾斜的预定角度将照明光束照射在检查对象基板的表面上; 检测光学系统,包括:用于接收从检查对象基板向上发射的上方反射/散射光的上方光检测器,从而将其转换为高定向图像信号;以及侧向光检测器, 将检测对象基板发射的侧向反射/散射光倾斜到倾斜方向,以与照明光束平坦地相交,从而转换为侧向图像信号; 以及信号处理系统 - 用于基于上限图像信号和侧向图像信号来检测缺陷。
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公开(公告)号:US07903244B2
公开(公告)日:2011-03-08
申请号:US12555530
申请日:2009-09-08
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
摘要翻译: 本发明是用于检查异物的缺陷的装置,包括照明光学系统,检测光学系统,屏蔽单元,其设置在所述检测光学系统中,以选择性地屏蔽来自存在于检查对象上的电路图案的衍射光图案 以及算术处理系统,其中所述屏蔽单元包括微镜阵列器件或反射型液晶或透射型液晶,或将屏蔽图案转印到光学透明基板或基板或 蚀刻以留下屏蔽图案的薄膜,或通过加热,突然冷或光照射或电场或磁场的变化或透镜中的可变化的光学透明基板或圆柱形的屏蔽板或 板形。
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公开(公告)号:US20090033924A1
公开(公告)日:2009-02-05
申请号:US12192578
申请日:2008-08-15
申请人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
发明人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
IPC分类号: G01N21/88
CPC分类号: G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要: An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
摘要翻译: 一种检查装置和方法,包括:第一和第二照明单元,用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元,其以不同的仰角方向布置在样本的表面上,用于检测样本的图像 由第一和第二照明单元照亮。
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公开(公告)号:US07315363B2
公开(公告)日:2008-01-01
申请号:US10722531
申请日:2003-11-28
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention provides an inspection apparatus and inspection method. The inspection apparatus provided by the present invention comprises an illumination optical system which illuminates light to an object under inspection; a detection optical system which detects light reflected from said object and converts the detected light into an image signal; a spatial filter which is provided in said detection optical system to selectively shield diffracted light pattern coming from a circuit pattern existing on the object by combining light-shielding points of minute dots state; an arithmetic processing system which processes the image signal detected by said detection optical system; and a monitor which observes foreign matters/defects based on a signal processed by said arithmetic processing system.
摘要翻译: 本发明提供一种检查装置和检查方法。 本发明提供的检查装置包括照明光学系统,其将光照射到被检查物体; 检测光学系统,其检测从所述对象反射的光并将检测到的光转换为图像信号; 设置在所述检测光学系统中的空间滤波器,通过组合微点状态的遮光点来选择性地屏蔽来自存在于物体上的电路图案的衍射光图案; 算术处理系统,处理由所述检测光学系统检测到的图像信号; 以及基于由所述算术处理系统处理的信号来观察异物/缺陷的监视器。
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公开(公告)号:US08508727B2
公开(公告)日:2013-08-13
申请号:US13529363
申请日:2012-06-21
申请人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
发明人: Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
IPC分类号: G01N21/00
CPC分类号: G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要: An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
摘要翻译: 一种检查装置和方法,包括:第一和第二照明单元,用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元,其以不同的仰角方向布置在样本的表面上,用于检测样本的图像 由第一和第二照明单元照亮。
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公开(公告)号:US08269959B2
公开(公告)日:2012-09-18
申请号:US13347245
申请日:2012-01-10
申请人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
发明人: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
IPC分类号: G01N21/00
CPC分类号: G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要: The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
摘要翻译: 本发明提供一种检查装置和检查方法。 检查装置包括用于支撑被检查物体的台架机构。 在检测光学系统中设置空间滤波器来检查物体。 打印机用于打印空间滤镜的结果。 空间滤波器可以以傅里叶变换图像的形式提供。
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