公开(公告)号：US20240222100A1

公开(公告)日：2024-07-04

申请号：US18605526

申请日：2024-03-14

Applicant: Tokyo Electron Limited

Inventor： Shan HU ,  Peter DELIA ,  Scott LEFEVRE

IPC: H01J37/32 ,  H01L21/66 ,  H01L21/67 ,  G01N21/00

CPC classification number: H01J37/32972 ,  H01J37/32449 ,  H01J37/32963 ,  H01L21/67253 ,  H01L22/26 ,  G01N21/00 ,  H01J37/32458 ,  H01J2237/3345

Abstract: An apparatus for in-situ etching monitoring in a plasma processing chamber includes a continuous wave broadband light source, an illumination system configured to illuminate an area on a substrate with an incident light beam being directed from the continuous wave broadband light source at normal incidence to the substrate, a collection system configured to collect a reflected light beam being reflected from the illuminated area on the substrate, and to direct the reflected light beam to a first light detector, and a controller. The controller is configured to determine a property of the substrate or structures formed thereupon based on a reference light beam and the reflected light beam, and control an etch process based on the determined property. The reference light beam is generated by the illumination system by splitting a portion of the incident light beam and directed to a second light detector.

公开(公告)号：US11933931B2

公开(公告)日：2024-03-19

申请号：US16870198

申请日：2020-05-08

Applicant: Halliburton Energy Services, Inc.

Inventor： Dingding Chen ,  Bin Dai ,  Christopher M. Jones ,  Darren Gascooke ,  Tian He

IPC: G01V13/00 ,  E21B7/00 ,  E21B47/06 ,  E21B47/07 ,  E21B47/135 ,  E21B49/08 ,  G01D18/00 ,  G01N21/00 ,  G01V8/10

CPC classification number: G01V13/00 ,  E21B7/00 ,  E21B47/06 ,  E21B47/07 ,  E21B47/135 ,  E21B49/08 ,  G01D18/00 ,  G01N21/00 ,  G01V8/10

Abstract: A method includes obtaining a plurality of master sensor responses with a master sensor in a set of training fluids and obtaining node sensor responses in the set of training fluids. A linear correlation between a compensated master data set and a node data set is then found for a set of training fluids and generating node sensor responses in a tool parameter space from the compensated master data set on a set of application fluids. A reverse transformation is obtained based on the node sensor responses in a complete set of calibration fluids. The reverse transformation converts each node sensor response from a tool parameter space to the synthetic parameter space and uses transformed data as inputs of various fluid predictive models to obtain fluid characteristics. The method includes modifying operation parameters of a drilling or a well testing and sampling system according to the fluid characteristics.

公开(公告)号：US11681778B2

公开(公告)日：2023-06-20

申请号：US16322338

申请日：2016-08-03

Applicant: SHIMADZU CORPORATION

Inventor： Akira Noda

IPC: G06F17/18 ,  G06N99/00 ,  G01N30/78 ,  G01N21/00 ,  G16B40/00 ,  G16B40/30 ,  G01N21/35 ,  G01N23/223 ,  G01N27/62 ,  G01N30/86 ,  G01N33/44 ,  G01N33/48 ,  G06N3/08

CPC classification number: G06F17/18 ,  G01N21/00 ,  G01N21/35 ,  G01N23/223 ,  G01N27/62 ,  G01N30/78 ,  G01N30/8675 ,  G01N33/442 ,  G01N33/48 ,  G06N3/08 ,  G06N99/00 ,  G16B40/00 ,  G16B40/30

Abstract: An analysis data processing method for processing analysis data collected with an analyzing device for each of a plurality of samples, by applying an analytical technique using statistical machine learning to multidimensional analysis data formed by output values obtained from a plurality of channels of a multichannel detector provided in the analyzing device, the method including: acquiring a non-linear regression or non-linear discrimination function expressing analysis data obtained for known samples; calculating a contribution value of each of the output values obtained from the plurality of channels forming the analysis data of the known samples, to the acquired non-linear regression or non-linear discrimination function, based on a differential value of the non-linear regression function or non-linear discrimination function; and identifying one or more of the plurality of channels of the detector, which are to be used for processing analysis data obtained for an unknown sample, based on the contribution value.

公开(公告)号：US20190250504A1

公开(公告)日：2019-08-15

申请号：US15776588

申请日：2018-04-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Yoel Feler ,  Vladimir Levinski ,  Roel Gronheid ,  Sharon Aharon ,  Evgeni Gurevich ,  Anna Golotsvan ,  Mark Ghinovker

IPC: G03F1/84 ,  G03F7/20 ,  G06F17/50 ,  G03F1/26

CPC classification number: G03F1/84 ,  G01N21/00 ,  G03F1/26 ,  G03F1/44 ,  G03F7/70283 ,  G03F7/70633 ,  G03F7/70683 ,  G06F17/5068

Abstract: Metrology methods and targets are provided for reducing or eliminating a difference between a device pattern position and a target pattern position while maintaining target printability, process compatibility and optical contrast—in both imaging and scatterometry metrology. Pattern placement discrepancies may be reduced by using sub-resolved assist features in the mask design which have a same periodicity (fine pitch) as the periodic structure and/or by calibrating the measurement results using PPE (pattern placement error) correction factors derived by applying learning procedures to specific calibration terms, in measurements and/or simulations. Metrology targets are disclosed with multiple periodic structures at the same layer (in addition to regular target structures), e.g., in one or two layers, which are used to calibrate and remove PPE, especially when related to asymmetric effects such as scanner aberrations, off-axis illumination and other error sources.

公开(公告)号：US20190237835A1

公开(公告)日：2019-08-01

申请号：US16312218

申请日：2016-08-19

Applicant: TOYOTA MOTOR EUROPE

Inventor： Fanny BARDE ,  Keita KOMIYAMA

IPC: H01M12/08 ,  H01M12/02 ,  G01N33/00

CPC classification number: H01M12/08 ,  B60K6/28 ,  B60L50/64 ,  B60L53/60 ,  B60Y2200/91 ,  B60Y2200/92 ,  B60Y2300/91 ,  B60Y2400/112 ,  G01N21/00 ,  G01N33/004 ,  H01M4/382 ,  H01M10/441 ,  H01M10/482 ,  H01M12/02 ,  H01M2220/20 ,  Y02E60/128

Abstract: A control device for controlling charging of a non-aqueous metal air battery, the control device being configured to: determine a CO2 concentration (Cx) and an increase rate (RCO2) of CO2 concentration in the battery, charge the battery in case both the CO2 concentration (Cx) before starting charging exceeds a predetermined CO2 threshold (CT) and the increase rate of the CO2 concentration (RCO2) during charging is below a predetermined threshold value (ΔCT/ΔAhT, ΔCT/Δt), and stop charging when the increase rate (RCO2) exceeds the predetermined threshold value (ΔCT/ΔAhT, ΔCT/Δt). Also, a corresponding method of controlling charging of a rechargeable battery.

公开(公告)号：US20190212321A1

公开(公告)日：2019-07-11

申请号：US16304849

申请日：2016-05-27

Applicant: Chin-Hsing Chuo ,  Chih-Meng Wang ,  Chin-Yen Wang

Inventor： Chin-Hsing Chuo ,  Chih-Meng Wang ,  Chin-Yen Wang

IPC: G01N33/487 ,  B01L3/00 ,  G01N21/01

CPC classification number: G01N33/48735 ,  B01L3/502761 ,  C12M1/34 ,  G01N21/00 ,  G01N21/01 ,  G01N33/50 ,  G01N2021/0112 ,  G01N2021/0131 ,  G01N2021/0181 ,  G01N2021/0187 ,  G01N2021/0193

Abstract: A microorganism detection system is provided for being disposed on a device to be detected which is closed, including a flow channel and a detection module. A fluid to be detected in the device to be detected flows in the flow channel. The detection module is disposed within the flow channel, including two slides, a microscopic module and at least one telescopic mechanism, each of the at least one telescopic mechanism is connected to one of the two slides and the flow channel. When the two slides approach each other, the fluid to be detected in a gap between the two slides is observable through the microscopic module.

公开(公告)号：US20190212252A1

公开(公告)日：2019-07-11

申请号：US16336238

申请日：2017-07-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA

IPC: G01N21/17 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01N21/1717 ,  G01N21/00 ,  G01N21/17 ,  G01R31/302 ,  G01R31/311 ,  H01L22/10

Abstract: A semiconductor device inspection method of inspecting a semiconductor device which is an inspection object includes: a step of inputting a stimulation signal to the semiconductor device; a step of acquiring a detection signal based on a reaction of the semiconductor device to which the stimulation signal has been input; a step of generating a first in-phase image and a first quadrature image including amplitude information and phase information in the detection signal based on the detection signal and a reference signal generated based on the stimulation signal; and a step of performing, a filtering process of reducing noise on at least one of the first in-phase image and the first quadrature image and then generating a first amplitude image based on the first in-phase image and the first quadrature image.

公开(公告)号：US20190082961A1

公开(公告)日：2019-03-21

申请号：US16136983

申请日：2018-09-20

Applicant: Elucid Labs, Inc.

Inventor： Iman Khodadad ,  Alexander Wong ,  Farnoud Kazemzadeh

IPC: A61B5/00 ,  G06F19/22 ,  A61B5/053 ,  A61B8/00

CPC classification number: A61B5/0035 ,  A61B5/0075 ,  A61B5/053 ,  A61B8/4416 ,  A61B2562/0238 ,  A61B2562/066 ,  G01N21/00 ,  G01N33/483 ,  G16B30/00

Abstract: A system may include emitters configured to emit radiation at a first wavelength of electromagnetic (EM) radiation and a second wavelength of EM radiation towards a biological tissue, and receivers configured to receive responses to the first and second wavelengths of EM radiation after the wavelengths of EM radiation interact with the biological tissue. The system may also include a signal mixer unit configured to perform operations that include replicate and mix first signals representative of the responses to the first wavelength of EM radiation received by the receivers and second signals representative of the responses to the second wavelength of EM radiation received by the receivers to generate a set of spectro-spatial responses, replicate and mix the spectro-spatial responses to generate markers, and replicate and mix the markers and user-selected markers to output a sequence associated with characterization of the biological tissue.

公开(公告)号：US20190022848A1

公开(公告)日：2019-01-24

申请号：US15652730

申请日：2017-07-18

Applicant: General Electric Company

Inventor： Selim Akin ,  Thomas James Batzinger ,  Airton Rosa da Silva ,  Selami Haydar Icli ,  Christopher Paul Markman ,  Paulo Cesar Debenest ,  Michele Guarnieri ,  Shigeo Hirose

IPC: B25J5/00 ,  B25J9/08

CPC classification number: B25J5/00 ,  B25J5/005 ,  B25J9/08 ,  B62D57/02 ,  B62D57/024 ,  G01M5/0075 ,  G01N21/00 ,  G01R31/346 ,  Y10S901/44

Abstract: This disclosure provides systems and methods for in situ gap inspection in a machine, such as a generator, an electric motor, or a turbomachine. A robotic crawler includes an expandable body, multidirectional traction modules, and sensor modules. The expandable body is movable between a collapsed state and an expanded state. The multidirectional traction modules are removably connected to and positioned by the expandable body and configured to engage opposed surfaces within an annular gap of the machine. The sensor modules are removably connected to and supported by the expandable body and include a plurality of sensor types to inspect the annular gap of the machine.

公开(公告)号：US20180331237A1

公开(公告)日：2018-11-15

申请号：US16030883

申请日：2018-07-10

Applicant: The Government of the United States of America, as represented by the Secretary of the Navy

Inventor： Jerry R. Meyer ,  Igor Vurgaftman ,  Chadwick Lawrence Canedy ,  William W. Bewley ,  Chul Soo Kim ,  Charles D. Merritt ,  Michael V. Warren ,  Mijin Kim ,  Eric Stanton

IPC: H01L31/0232 ,  H01L31/0304 ,  H01L31/105 ,  H01L31/109 ,  G02B6/124 ,  G02B6/12

CPC classification number: H01L31/02327 ,  G01N21/00 ,  G01N21/3504 ,  G01N21/552 ,  G01N21/7746 ,  G02B6/12004 ,  G02B6/124 ,  G02B2006/12061 ,  G02B2006/12078 ,  G02B2006/12123 ,  G02B2006/12138 ,  H01L31/03046 ,  H01L31/105 ,  H01L31/109

Abstract: Resonant-cavity infrared photodetector (RCID) devices that include a thin absorber layer contained entirely within the resonant cavity. In some embodiments, the absorber is a single type-II InAs—GaSb interface situated between an AlSb/InAs superlattice n-type region and a p-type AlSb/GaSb region. In other embodiments, the absorber region comprises quantum wells formed on an upper surface of the n-type region. In other embodiments, the absorber region comprises a “W”-structured quantum well situated between two barrier layers, the “W”-structured quantum well comprising a hole quantum well sandwiched between two electron quantum wells. In other embodiments, the RCID includes a thin absorber region and an nBn or pBp active core within a resonant cavity. In some embodiments, the RCID is configured to absorb incident light propagating in the direction of the epitaxial growth of the RCID structure, while in other embodiments, it absorbs light propagating in the epitaxial plane of the structure.