公开(公告)号：US10441975B2

公开(公告)日：2019-10-15

申请号：US15419835

申请日：2017-01-30

Applicant: InvenSense, Inc.

Inventor： Nikhil Apte ,  Renata Melamud Berger ,  Michael Daneman

IPC: B06B1/06 ,  B06B1/02

Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.

公开(公告)号：US10123131B2

公开(公告)日：2018-11-06

申请号：US14733560

申请日：2015-06-08

Applicant: INVENSENSE, INC.

Inventor： Fang Liu ,  Michael Daneman ,  Thomas Chen

IPC: H04R31/00 ,  H04R19/04 ,  H04R19/00

Abstract: Microelectromechanical microphones include structures that permit differential capacitive sensing. In certain structures, a movable plate is disposed between a rigid plate and a substrate. A first capacitor is formed between the movable plate and the substrate and a second capacitor is formed between the movable plate and the rigid plate. Respective bias voltages can be applied to the rigid plate and the substrate, and a differential capacitive signal can be probed in response to displacement of the movable plate caused by a pressure wave. The movable plate and the rigid plate are mechanically coupled to first and second portions of the substrate, respectively. A dielectric member mechanically couples the movable plate and the rigid plate, thus providing mechanical stability.