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公开(公告)号:US10474862B2
公开(公告)日:2019-11-12
申请号:US15611704
申请日:2017-06-01
Applicant: InvenSense, Inc.
Inventor: Bruno W. Garlepp , Michael H. Perrott , Michael Daneman , James Christian Salvia , Nikhil Apte
IPC: G06K9/00
Abstract: A method for generating an image is provided. The method comprises capturing a first set of image pixels by an ultrasonic sensor comprising an array of ultrasonic transducers using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of transmit signals routed to a plurality of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of image pixels at the ultrasonic sensor using a second beamforming pattern, wherein the second beamforming pattern comprises a second pattern of transmit signals routed to the plurality of ultrasonic transducers. The second beamforming pattern is different than the first beamforming pattern. The second set of image pixels corresponds to an edge region of the ultrasonic sensor. The method additionally comprises combining the first set of image pixels and the second set of image pixels to form the image. An electronic device and a method of generating an image of a fingerprint with a fingerprint sensor are also provided.
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公开(公告)号:US10408797B2
公开(公告)日:2019-09-10
申请号:US15424720
申请日:2017-02-03
Applicant: InvenSense, Inc.
Inventor: Nikhil Apte , Renata Melamud Berger , Michael Daneman , James Christian Salvia
IPC: G01N29/32 , G01N29/44 , G01N29/38 , G01N29/04 , G01N29/30 , B06B1/02 , B06B1/06 , G01S7/52 , G01S7/521
Abstract: An electronic device including an array of ultrasonic transducers, a temperature sensor for determining a temperature of the array of ultrasonic transducers, and a control module communicatively coupled to the array of ultrasonic devices and the temperature sensor. The control module is for receiving the temperature and for controlling operation of the array of ultrasonic transducers based at least in part on the temperature.
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公开(公告)号:US11471912B2
公开(公告)日:2022-10-18
申请号:US16592618
申请日:2019-10-03
Applicant: InvenSense, Inc.
Inventor: Nikhil Apte , Renata Melamud Berger , Michael Daneman
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.
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公开(公告)号:US10441975B2
公开(公告)日:2019-10-15
申请号:US15419835
申请日:2017-01-30
Applicant: InvenSense, Inc.
Inventor: Nikhil Apte , Renata Melamud Berger , Michael Daneman
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.
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公开(公告)号:US20190262865A1
公开(公告)日:2019-08-29
申请号:US16269892
申请日:2019-02-07
Applicant: INVENSENSE, INC.
Inventor: Emad Mehdizadeh , Bongsang Kim , Chienliu Chang , Leonardo Baldasarre , Nikhil Apte , Xiaoyue Jiang , Mei-Lin Chan
IPC: B06B1/06 , H01L41/04 , H01L41/047 , H01L41/08 , H01L41/187 , H01L41/29 , H01L41/332 , H01L41/313 , B06B1/02
Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.
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公开(公告)号:US10315222B2
公开(公告)日:2019-06-11
申请号:US15294130
申请日:2016-10-14
Applicant: InvenSense, Inc.
Inventor: James Christian Salvia , Michael H. Perrott , Marian Voros , Eldwin Ng , Julius Ming-Lin Tsai , Nikhil Apte
IPC: B60B1/00 , B06B1/06 , G06K9/00 , G06F3/0354 , H01L27/092
Abstract: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array, where each CMOS control element of the plurality of CMOS control elements includes two semiconductor devices. The plurality of CMOS control elements include a first subset of CMOS control elements, each CMOS control element of the first subset of CMOS control elements including a semiconductor device of a first class and a semiconductor device of a second class, and a second subset of CMOS control elements, each CMOS control element of the second subset of CMOS control elements including a semiconductor device of the first class and a semiconductor device of a third class. The plurality of CMOS control elements are arranged in the two-dimensional array such that CMOS semiconductor devices of the first class are only adjacent to other CMOS semiconductor devices of the first class, CMOS semiconductor devices of the second class are only adjacent to other CMOS semiconductor devices of the second class, and CMOS semiconductor devices of the third class are only adjacent to other CMOS semiconductor devices of the third class.
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公开(公告)号:US11440052B2
公开(公告)日:2022-09-13
申请号:US16395045
申请日:2019-04-25
Applicant: InvenSense, Inc.
Inventor: James Christian Salvia , Michael H. Perrott , Marian Voros , Eldwin Ng , Julius Ming-Lin Tsai , Nikhil Apte
IPC: B06B1/00 , B06B1/06 , G06F3/0354 , G06V40/13 , G06V40/12 , H01L27/092
Abstract: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array and a plurality of MEMS devices. Each CMOS control element of the plurality of CMOS control elements includes at least one of a low voltage semiconductor device, a high voltage PMOS semiconductor device, and a high voltage NMOS semiconductor device. Each MEMS device of the plurality of MEMS devices is associated with a CMOS control element of the plurality of CMOS control elements. The plurality of CMOS control elements are arranged in the two-dimensional array such that low voltage semiconductor devices are only adjacent to other low voltage semiconductor devices, high voltage PMOS semiconductor devices are only adjacent to other high voltage PMOS semiconductor devices, and high voltage NMOS semiconductor devices are only adjacent to other high voltage NMOS semiconductor devices.
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公开(公告)号:US11188735B2
公开(公告)日:2021-11-30
申请号:US16909917
申请日:2020-06-23
Applicant: InvenSense, Inc.
Inventor: Sina Akhbari , Lingtao Wang , Mei-Lin Chan , Nikhil Apte
IPC: G06K9/00
Abstract: In a method for determining whether a finger is a real finger at an ultrasonic fingerprint sensor, a first image of a fingerprint pattern is captured at an ultrasonic fingerprint sensor, wherein the first image is based on ultrasonic signals corresponding to a first time of flight range. A second image of the fingerprint pattern is captured at the ultrasonic fingerprint sensor, wherein the second image is based on ultrasonic signals corresponding to a second time of flight range, the second time of flight range being delayed compared to the first time of flight range. A difference in a width of ridges of the fingerprint pattern in the first image compared to the width of ridges of the fingerprint pattern in the second image is quantified. Based on the quantification of the difference, a probability whether the finger is a real finger is determined.
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公开(公告)号:US10670716B2
公开(公告)日:2020-06-02
申请号:US15266673
申请日:2016-09-15
Applicant: InvenSense, Inc.
Inventor: Nikhil Apte , Julius Ming-Lin Tsai , Michael Julian Daneman , Renata Melamud Berger
Abstract: In a method of operating a two-dimensional array of ultrasonic transducers, a plurality of array positions comprising pluralities of ultrasonic transducers of the two-dimensional array of ultrasonic transducers is defined, the plurality of array positions each comprising a portion of ultrasonic transducers of the two dimensional array of ultrasonic transducers. For each array position of the plurality of array positions, a plurality of ultrasonic transducers associated with the respective array position are activated. The activation includes transmitting ultrasonic signals from a first group of ultrasonic transducers of the plurality of ultrasonic transducers, wherein at least some ultrasonic transducers of the first group of ultrasonic transducers are phase delayed with respect to other ultrasonic transducers of the first group of ultrasonic transducers, the first group of ultrasonic transducers for forming a focused ultrasonic beam. The activation also includes receiving reflected ultrasonic signals at a second group of ultrasonic transducers of the plurality of ultrasonic transducers.
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10.
公开(公告)号:US11623246B2
公开(公告)日:2023-04-11
申请号:US16269892
申请日:2019-02-07
Applicant: INVENSENSE, INC.
Inventor: Emad Mehdizadeh , Bongsang Kim , Chienliu Chang , Leonardo Baldasarre , Nikhil Apte , Xiaoyue Jiang , Mei-Lin Chan
IPC: B06B1/06 , B06B1/02 , H01L41/04 , H01L41/047 , H01L41/08 , H01L41/187 , H01L41/29 , H01L41/332 , H01L41/313 , G06V40/13
Abstract: A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.
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