公开(公告)号：US09933357B1

公开(公告)日：2018-04-03

申请号：US15530584

申请日：2017-02-03

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Ping He ,  Gregory K. Pribil ,  Martin M. Liphardt

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01J3/0286 ,  G01J4/04 ,  G01N2201/0227 ,  G01N2201/023 ,  G01N2201/084

Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.

公开(公告)号：US09921395B1

公开(公告)日：2018-03-20

申请号：US15530014

申请日：2016-11-18

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G02B17/06 ,  G02B27/00 ,  G01N21/21

CPC classification number: G02B17/0663 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G01N2201/0636 ,  G02B17/0621 ,  G02B19/0023 ,  G02B27/0012 ,  G02B27/0983

Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.