摘要:
An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.
摘要:
An ink-jet print head and a method of making the same comprising the steps of sequentially laminating a heating layer and an electric conductive layer on a substrate, patterning the electric conductive layer to expose a predetermined area of the top surface of the heating layer, forming a protective layer on the top surfaces of the electric conductive layer and exposed heating layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer, thereby forming an ink chamber. The protective layer is provided by forming a cavitation layer by alternately laminating at least two types of thin film layers of different materials over the exposed heating layer and the electric conductive layer to resist fractures and oxidization resulting from use.
摘要:
A method of manufacturing an inkjet printhead, including forming a nozzle layer by radiating actinic radiation to a cross-linked polymer resist composition including a precursor polymer, a cationic photoinitiator, and a solvent, in which a concentration of the cationic photoinitiator is varied to control a tapered angle of a nozzle included in the nozzle layer.
摘要:
A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional groups on repeating monomer units.
摘要:
A method of fabricating a high efficiency inkjet print head includes forming an oxide film on a surface of a substrate, sequentially forming and patterning a heater layer and a wiring layer on the oxide film, forming a passivation layer on the heater layer and the wiring layer and patterning the passivation layer so that a heater is exposed, etching the substrate to form restrictors at both sides of the heater, forming a chamber layer on the passivation layer, forming a sacrificial layer on the chamber layer and polishing the sacrificial layer, forming a nozzle layer on the chamber layer, forming an ink-feed hole at a bottom surface of the substrate, and removing the sacrificial layer. The inkjet print head is capable of reducing energy consumption by fabricating a heater having high efficiency, and capable of maintaining good heating characteristics since an original temperature of the inkjet print head is rapidly recovered after the heater is instantly heated and electric current is not supplied. In addition, since the heater is mounted on the substrate, the inkjet print head can maintain structural integrity, and since the heater is formed in a planar shape without bent portions, the heater can be formed to a uniform thickness.
摘要:
A method of manufacturing an inkjet printhead, including forming a nozzle layer by radiating actinic radiation to a cross-linked polymer resist composition including a precursor polymer, a cationic photoinitiator, and a solvent, in which a concentration of the cationic photoinitiator is varied to control a tapered angle of a nozzle included in the nozzle layer.
摘要:
A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber to prevent defects such as “pin-holes” from being generated during the formation of the first protective layer.
摘要:
An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.
摘要:
An ink-jet print head and a method of making the same comprising the steps of sequentially laminating a heating layer and an electric conductive layer on a substrate, patterning the electric conductive layer to expose a predetermined area of the top surface of the heating layer, forming a protective layer on the top surfaces of the electric conductive layer and exposed heating layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer, thereby forming an ink chamber. The protective layer is provided by forming a cavitation layer by alternately laminating at least two types of thin film layers of different materials over the exposed heating layer and the electric conductive layer to resist fractures and oxidization resulting from use.
摘要:
A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber to prevent defects such as “pin-holes” from being generated during the formation of the first protective layer.