公开(公告)号：US20240284772A1

公开(公告)日：2024-08-22

申请号：US18427817

申请日：2024-01-31

Applicant: Japan Display Inc.

Inventor： Masaru TAKAYAMA

IPC: H10K71/12 ,  H10K59/12 ,  H10K59/122

CPC classification number: H10K71/12 ,  H10K59/1201 ,  H10K59/122

Abstract: According to one embodiment, a manufacturing method of a display device includes preparing a processing substrate, forming an organic layer, forming an upper electrode, forming a first transparent layer, and forming a second transparent layer. In a deposition process, an evaporation source emits a material to the processing substrate and a film thickness measurement device, and the film thickness measurement device applies an acoustic impedance correction value which differs depending on a frequency of a crystal oscillator, and measures an evaporation rate based on an amount of change in the frequency of the crystal oscillator, and a controller controls the evaporation source such that the evaporation rate becomes constant.

公开(公告)号：US20240180016A1

公开(公告)日：2024-05-30

申请号：US18498051

申请日：2023-10-31

Applicant: Japan Display Inc.

Inventor： Masaru TAKAYAMA ,  Takanobu TAKENAKA ,  Hirofumi MIZUKOSHI ,  Yuki HAMADA

IPC: H10K71/60 ,  H10K71/20

CPC classification number: H10K71/60 ,  H10K71/233 ,  H10K59/871

Abstract: According to one embodiment, a method of manufacturing a display device, includes forming a lower electrode on a base including a first main surface and a side surface, the lower electrode being on the first main surface of the base, forming a rib including a pixel aperture, forming a partition on the rib, forming a first deposition film which includes a first organic layer which covers the lower electrode via the pixel aperture and a first upper electrode which covers the first organic layer and forming a first sealing layer which covers the first deposition film. The first sealing layer includes a first upper end portion which covers the first deposition film and a first side end portion which covers the side surface.

公开(公告)号：US20230309340A1

公开(公告)日：2023-09-28

申请号：US18186986

申请日：2023-03-21

Applicant: Japan Display Inc.

Inventor： Masaru TAKAYAMA

IPC: H10K59/12 ,  H10K59/122 ,  H10K59/80

CPC classification number: H10K59/1201 ,  H10K59/122 ,  H10K59/873

Abstract: According to one embodiment, a display device includes a lower electrode, a rib formed of an inorganic insulating material, a partition provided on the rib, an organic layer provided on the lower electrode, overlapping the rib, spaced apart from the partition and including a light emitting layer, a sealing layer formed of an inorganic insulating material, provided above the organic layer and being in contact with the partition, and an etching stopper layer provided between the rib and the sealing layer, and covering the rib between the organic layer and the partition. The etching stopper layer is formed of a material different from the sealing layer. An etching rate of the etching stopper layer is less than an etching rate of the sealing layer.

公开(公告)号：US20220223669A1

公开(公告)日：2022-07-14

申请号：US17645584

申请日：2021-12-22

Applicant: Japan Display Inc.

Inventor： Masaru TAKAYAMA

IPC: H01L27/32

Abstract: According to one embodiment, a display device includes a second insulating layer having a first opening and a second opening, a partition disposed on the second insulating layer, a first organic layer, a first upper electrode. The partition includes a first layer formed of a metal material and including a first side surface and a second side, and a second layer including a bottom surface. The first upper electrode is in contact with the first side surface, the bottom surface extends from the first side surface toward the first opening and extends from the second side surface toward the second opening. A lower portion of the second layer has an inverted tapered shape whose width increases as it is closer to top from the bottom surface.

公开(公告)号：US20240414999A1

公开(公告)日：2024-12-12

申请号：US18677944

申请日：2024-05-30

Applicant: Japan Display Inc.

Inventor： Masaru TAKAYAMA ,  Kaichi FUKUDA ,  Takanobu TAKENAKA ,  Hirofumi MIZUKOSHI ,  Yuki HAMADA

IPC: H10K71/16 ,  H10K71/60

Abstract: According to one embodiment, a manufacturing method includes preparing a substrate with a lower electrode, a rib and a partition, and forming an organic layer and an upper electrode. A first evaporation source used to form a first thin film of the organic layer includes a first nozzle emitting a material toward the substrate relatively moving. A second evaporation source used to form the upper electrode includes a second nozzle emitting a material toward the substrate relatively moving. An axis of at least one of the nozzles inclines to a direction orthogonal to a moving direction of the substrate with respect to a normal direction.

公开(公告)号：US20240292728A1

公开(公告)日：2024-08-29

申请号：US18424968

申请日：2024-01-29

Applicant: Japan Display Inc.

Inventor： Yuki HAMADA ,  Takanobu TAKENAKA ,  Hirofumi MIZUKOSHI ,  Masaru TAKAYAMA

IPC: H10K71/16

CPC classification number: H10K71/164

Abstract: According to one embodiment, a manufacturing device includes a first evaporation chamber including first and second evaporation sources located between a first conveyance path and a second conveyance path for conveying a processing substrate. The first evaporation source is configured to emit a material to the first conveyance path. The second evaporation source is configured to emit a material to the second conveyance path. The manufacturing device further includes a first rotation chamber including a rotation mechanism which rotates while holding the processing substrate carried out of the first conveyance path of the first evaporation chamber, and configured to carry out the processing substrate to the second conveyance path of the first evaporation chamber.

公开(公告)号：US20240206307A1

公开(公告)日：2024-06-20

申请号：US18522255

申请日：2023-11-29

Applicant: Japan Display Inc.

Inventor： Takanobu TAKENAKA ,  Masaru TAKAYAMA ,  Yuki HAMADA

IPC: H10K71/16 ,  C23C14/02 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C14/56 ,  H01L21/677 ,  H10K71/60

CPC classification number: H10K71/164 ,  C23C14/028 ,  C23C14/12 ,  C23C14/24 ,  C23C14/505 ,  C23C14/566 ,  H01L21/67706 ,  H01L21/67718 ,  H10K71/60

Abstract: According to one embodiment, a manufacturing device of a display device includes first, second, third and fourth evaporation portions. A conveyance mechanism includes a first rail provided along the first evaporation portion, a second rail provided along the second evaporation portion, a third rail provided along the third evaporation portion, a fourth rail provided along the fourth evaporation portion, a first rotation chamber provided between the first rail and the second rail and between the third rail and the fourth rail and rotating the processing substrate which passed through the first rail and conveying the processing substrate to the fourth rail, and a gate valve provided between the first rotation chamber and the third and fourth rails.

公开(公告)号：US20240112932A1

公开(公告)日：2024-04-04

申请号：US18476341

申请日：2023-09-28

Applicant: Japan Display Inc.

Inventor： Takanobu TAKENAKA ,  Hirofumi MIZUKOSHI ,  Masaru TAKAYAMA ,  Yuki HAMADA

IPC: H01L21/67 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  C23C14/58 ,  H01L21/677 ,  H10K59/12 ,  H10K71/16

CPC classification number: H01L21/67173 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  C23C14/5806 ,  C23C14/5873 ,  H01L21/67748 ,  H10K59/1201 ,  H10K71/16

Abstract: According to one embodiment, a manufacturing device of a display device includes a conveyance mechanism for conveying a processing substrate in a first direction, and first, second, third and fourth evaporation portions arranged in order in the first direction. The first evaporation portion includes a plurality of evaporation chambers for forming an organic layer. The second evaporation portion includes an evaporation chamber for forming an upper electrode. The third evaporation portion includes an evaporation chamber for forming a first transparent layer. The fourth evaporation portion includes an evaporation chamber for forming a second transparent layer having a refractive index less than a refractive index of the first transparent layer on the first transparent layer.

公开(公告)号：US20230345806A1

公开(公告)日：2023-10-26

申请号：US18299085

申请日：2023-04-12

Applicant: Japan Display Inc.

Inventor： Hirofumi MIZUKOSHI ,  Kaichi FUKUDA ,  Takanobu TAKENAKA ,  Masaru TAKAYAMA

IPC: H10K71/60 ,  H10K71/10 ,  C23C14/50

CPC classification number: H10K71/60 ,  H10K71/10 ,  C23C14/50

Abstract: According to one embodiment, a processing substrate is prepared. An organic layer is formed. An etching stopper layer is formed. The forming the etching stopper layer includes, in a first mode, inclining an evaporation source, and depositing a material emitted from the evaporation source while relative positions of the evaporation source and the processing substrate are changed, and in a second mode, inclining the evaporation source in a manner different from the first mode, and depositing the material emitted from the evaporation source while the relative positions of the evaporation source and the processing substrate are changed in an opposite manner of the first mode.