公开(公告)号：US20100027579A1

公开(公告)日：2010-02-04

申请号：US12184712

申请日：2008-08-01

Applicant: John Hoose

Inventor： John Hoose

IPC: H01S3/225

CPC classification number: H01S3/08036 ,  H01S3/08004 ,  H01S3/1055 ,  H01S3/225

Abstract: An excimer laser cavity is disclosed which includes at least one grating-prism (grism) and a wavelength-selective diffraction grating arranged in sequence. The grism grating surface faces the gain medium and produces an expanded beam which is diffracted on the same side of the prism grating surface normal as the incident beam. The expanded diffracted beam is transmitted through a second surface of the grism either to another grating surface of an additional grism or to a wavelength-selective diffraction grating operating in Littrow configuration. The laser produces a laser output beam with a narrow spectral linewidth which is suitable, in particular, for lithography applications.

Abstract translation: 公开了一种准分子激光器腔，其包括依次布置的至少一个光栅 - 棱镜（棱镜）和波长选择性衍射光栅。 棱镜光栅表面面向增益介质并产生扩散光束，其在与入射光束垂直的棱镜光栅表面的相同侧上衍射。 扩展的衍射光束通过棱镜的第二表面传输到附加棱镜的另一个光栅表面或者以Littrow配置工作的波长选择性衍射光栅。 激光产生具有窄光谱线宽的激光输出光束，其特别适用于光刻应用。

公开(公告)号：US20090034576A1

公开(公告)日：2009-02-05

申请号：US11833708

申请日：2007-08-03

Applicant: John Hoose

Inventor： John Hoose

IPC: H01S3/08

CPC classification number: H01S3/0812 ,  G02B5/1838 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/225

Abstract: A double-grating excimer laser cavity is disclosed which includes a first multilayer dielectric diffraction grating comprised of a dielectric stack having a plurality of continuous layers with alternating high and low refractive indices, and a nonmetallic diffraction grating disposed on the top layer of the plurality of layers. The nonmetallic diffraction grating is a single pair of layers made of a low refractive index dielectric material and a high refractive index dielectric material. Grooves extend through the pair of layers. The diffraction grating has a diffraction efficiency of greater than 85% at the laser emission wavelength. The laser produces a laser output beam with a narrow spectral linewidth which is suitable, in particular, for lithography applications.

Abstract translation: 公开了一种双光栅准分子激光器腔，其包括第一多层电介质衍射光栅，其包括具有交替的高折射率和低折射率的多个连续层的电介质叠层，以及设置在多个层中的顶层上的非金属衍射光栅 层。 非金属衍射光栅是由低折射率介电材料和高折射率介电材料制成的单层对。 沟槽穿过一对层。 衍射光栅在激光发射波长处具有大于85％的衍射效率。 激光产生具有窄光谱线宽的激光输出光束，其特别适用于光刻应用。

公开(公告)号：US20090290217A1

公开(公告)日：2009-11-26

申请号：US12469904

申请日：2009-05-21

Applicant: John Hoose

Inventor： John Hoose

IPC: G02B27/44

CPC classification number: G02B6/2931 ,  G02B5/1823 ,  G02B27/4261

Abstract: Three-dimensional grating device includes two (crossed) diffraction gratings, exhibits diffraction efficiency substantially independent of the incident polarization inside an optical communication spectral window from 1.5-1.6 μm. The gratings are characterized by different periods in two directions, chosen to support only one dispersive diffraction order in addition to the zero- (specular) order. Gratings may be orthogonal. Exemplary grating profiles include but are not limited to sinusoidal and truncated pyramidal (trapezoidal) profiles. A method for diffracting polarization independent light with 90% or higher efficiency. Applications include various wavelength control devices particularly useful in telecommunications.

Abstract translation: 三维光栅装置包括两个（交叉）衍射光栅，其衍射效率基本上与1.5-1.6μm光通信光谱窗内的入射极化无关。 光栅的特征在于在两个方向上的不同周期，除了零（镜面）顺序之外，选择仅支持一个色散衍射级。 光栅可以是正交的。 示例性光栅轮廓包括但不限于正弦和截锥形（梯形）轮廓。 用于衍射具有90％或更高效率的偏振独立光的方法。 应用包括在电信中特别有用的各种波长控制装置。

公开(公告)号：US20090059375A1

公开(公告)日：2009-03-05

申请号：US12199582

申请日：2008-08-27

Applicant: John Hoose

Inventor： John Hoose

IPC: G02B5/18

CPC classification number: G02B5/1861

Abstract: A reflection grating device with a continuous non-reflecting dielectric adjusting layer disposed between a grating structure and one or more continuous reflecting layers is disclosed that operates in an order of interest, such as the 1st order or 3rd order of diffraction, with high efficiency and near-exclusion of unwanted orders. Such devices can be employed, for example, in telecommunication and laser applications.

Abstract translation: 公开了一种设置在光栅结构和一个或多个连续反射层之间的连续的非反射介质调节层的反射光栅装置，其以高效率按照感兴趣的顺序例如1级或3级衍射工作， 近乎排除不需要的订单。 这样的装置可以用于例如电信和激光应用中。

公开(公告)号：US20060092995A1

公开(公告)日：2006-05-04

申请号：US11036600

申请日：2005-01-14

Applicant: Robert Frankel ,  John Hoose

Inventor： Robert Frankel ,  John Hoose

IPC: H01S3/098 ,  H01S3/10 ,  H01S3/08

CPC classification number: H01S3/105 ,  H01S3/08009 ,  H01S3/1065 ,  H01S3/1112 ,  H01S3/1118 ,  H01S3/136 ,  H01S3/1618 ,  H01S3/2383 ,  H01S5/028 ,  H01S5/0609 ,  H01S5/141 ,  H01S5/143 ,  H01S5/4062

Abstract: A multi-wavelength, commonly mode-locked external cavity laser system includes a solid state gain element generating a collinearly propagating multi-wavelength optical beam, a diffracting element that diffracts the multi-wavelength optical beam into a plurality of diffracted optical beams, a wavelength-selective device receiving the plurality of diffracted optical beams and controllably transmitting or reflecting the diffracted optical beams depending on their wavelengths, and at least one mode-locking device that mode-locks the optical beams from the gain elements in common and thus forms a mode-locked optical output beam of picosecond or femtosecond duration and high peak power.

Abstract translation: 多波长通常的锁模外腔激光器系统包括产生共线传播的多波长光束的固态增益元件，将多波长光束衍射成多个衍射光束的衍射元件，波长 - 选择性装置，其接收所述多个衍射光束，并且根据其波长可控制地发射或反射衍射光束;以及至少一个锁模装置，其将来自增益元件的光束共同锁定，从而形成模式 皮秒或飞秒持续时间的锁定光输出光束和高峰值功率。

公开(公告)号：US06958859B2

公开(公告)日：2005-10-25

申请号：US10211072

申请日：2002-08-02

Applicant: John Hoose ,  Robert Frankel ,  Evgeny Popov ,  Michel Nevière

Inventor： John Hoose ,  Robert Frankel ,  Evgeny Popov ,  Michel Nevière

IPC: G02B5/18 ,  G02B27/44

CPC classification number: G02B5/1809 ,  G02B5/1861

Abstract: A grating structure with a dielectric coating is disclosed that operates efficiently away from the blaze angle in low order with a high diffraction efficiency and high wavelength dispersion. Such grating structure can be employed in Littrow configuration to provide, for example, cavity feedback in excimer lasers.

Abstract translation: 公开了一种具有介电涂层的光栅结构，其具有高衍射效率和高波长色散的低阶高效运行。 这种光栅结构可以采用Littrow结构来提供例如准分子激光器中的空腔反馈。