公开(公告)号：US5248371A

公开(公告)日：1993-09-28

申请号：US929099

申请日：1992-08-13

申请人： Joseph A. Maher ,  Martin A. Kent

发明人： Joseph A. Maher ,  Martin A. Kent

IPC分类号： C23C16/50 ,  C23C16/511 ,  C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065

CPC分类号： H01J37/32541 ,  H01J37/32587 ,  H01J2237/3341

摘要： Hollow-anode glow discharge apparatus in the form of two-electrode and three-electrode reactors provide, in various embodiments, improved uniformity, efficiency and low-pressure substrate surface processing. In one improved uniformity embodiment for ion-dominated processes, the apparatus of the invention includes a high-energy-density uniformizing grid having multiple, multi-sized and evenly-spaced holes. In one improved uniformity embodiment for chemically-dominated processes, the apparatus of the invention includes a high-energy-density uniformizing grid having multiple, evenly-spaced holes and a stepped or continuously-variable non-planar profile. In one improved low pressure embodiment for ion-dominated and/or chemically-dominated processes, the apparatus of the invention includes a high-energy-density grid having multiple, evenly-sized and spaced holes of widths large enough to overcome dark space effects. In one improved efficiency selected ion energy embodiment for ion-dominated and/or chemically-dominated processes, the apparatus of the invention includes a high-energy-density source that synergistically cooperates with an apertured grid to provide selected-energy ions at higher densities than heretofore possible. In any embodiment, both build-up on and removal from the substrate are possible.

摘要翻译： 双电极和三电极电抗器形式的空心 - 阳极辉光放电装置在各种实施例中提供改进的均匀性，效率和低压衬底表面处理。 在用于离子主导的工艺的一个改进的均匀性实施例中，本发明的装置包括具有多个多尺寸和均匀间隔的孔的高能量密度均匀化栅格。 在用于化学主导的方法的一个改进的均匀性实施方案中，本发明的装置包括具有多个均匀间隔的孔和高阶能量密度均匀化网格以及阶梯式或连续可变的非平面轮廓。 在用于离子主导和/或化学主导的方法的一个改进的低压实施例中，本发明的装置包括具有多个均匀尺寸和间隔开的宽度足够大以克服暗空间效应的孔的高能量密度栅格。 在用于离子主导和/或化学主导的方法的一种改进的效率选择的离子能量实施方案中，本发明的装置包括高能密度源，其与有孔网格协同地配合以提供更高密度的选择能量离子 以前可能的。 在任何实施例中，可以在基板上积聚和从基板移除两者。