公开(公告)号：US06917204B2

公开(公告)日：2005-07-12

申请号：US10612824

申请日：2003-07-03

Applicant: Andrej S. Mitrovic ,  Jovan Jevtic ,  Richard Parsons ,  Murray D. Sirkis

Inventor： Andrej S. Mitrovic ,  Jovan Jevtic ,  Richard Parsons ,  Murray D. Sirkis

IPC: H01J37/32 ,  H05H1/46 ,  G01N27/62 ,  G01R23/20 ,  H01L21/00 ,  H05H1/24

CPC classification number: H01J37/32091 ,  H01J37/32082 ,  H01J37/32165 ,  H01J37/32174 ,  H05H1/46

Abstract: A method for controlling the non-uniformities of plasma-processed semiconductor wafers by supplying the plasma with two electrical signals: a primary electrical signal that is used to excite the plasma, and a supplemental electrical signal. The supplemental signal may be composed of a plurality of electrical signals, each with a frequency harmonic to that of the primary signal. The phase of the supplemental signal is controlled with respect to the phase of the primary signal. By adjusting the parameters of the supplemental signal with respect to the primary signal, the user can control the parameters of the resultant plasma and, therefore, control the non-uniformities induced in the semiconductor wafer.

Abstract translation: 通过向等离子体提供两个电信号来控制等离子体处理的半导体晶片的不均匀性的方法：用于激发等离子体的初级电信号和补充电信号。 补充信号可以由多个电信号组成，每个电信号具有与主信号的频率谐波。 补充信号的相位相对于主信号的相位被控制。 通过调整相对于主信号的补充信号的参数，用户可以控制所得到的等离子体的参数，因此控制在半导体晶片中感应的非均匀性。

公开(公告)号：US06867593B2

公开(公告)日：2005-03-15

申请号：US10722010

申请日：2003-11-25

Applicant: Ashok Menon ,  Derek Seeber ,  Jovan Jevtic

Inventor： Ashok Menon ,  Derek Seeber ,  Jovan Jevtic

IPC: G01R33/34 ,  G01R33/3415 ,  G01V3/00

CPC classification number: G01R33/34046 ,  G01R33/3415

Abstract: A modular lower coil provides for a head, a vascular and, a thoracic/lumbar element that may interfit or be separated to provide individual imaging of these areas or a combined imaging region stretching from the head to the lower spine. A switch box allows individual ones of these elements to be connected to the MRI machine if necessary because of a limitation of inputs to the machine and provides for decoupling currents to minimize interference between the coil elements when one element is being used.

Abstract translation: 模块化下部线圈提供头部，血管和胸部/腰部元件，其可以相互配合或分离以提供这些区域的单独成像或从头部到下部脊柱延伸的组合成像区域。 如果需要，开关盒允许将这些元件中的各个元件连接到MRI机器，这是因为对机器的输入的限制，并且当使用一个元件时提供去耦电流以最小化线圈元件之间的干扰。

公开(公告)号：US06727701B1

公开(公告)日：2004-04-27

申请号：US10382613

申请日：2003-03-05

Applicant: Jovan Jevtic ,  Derek Seeber ,  Ashok Menon

Inventor： Jovan Jevtic ,  Derek Seeber ,  Ashok Menon

IPC: G01V300

CPC classification number: G01R33/341 ,  G01R33/3415

Abstract: A local coil for magnetic resonance imaging employs a loop divided by a shunting conductor which reduces sensitivity and field strength at one end of the loop to provide improved homogeneity for different coil configurations.

Abstract translation: 用于磁共振成像的局部线圈采用由分流导体分开的环路，其降低环路一端的灵敏度和场强，以提供不同线圈配置的改进的均匀性。

公开(公告)号：US06605775B1

公开(公告)日：2003-08-12

申请号：US10145229

申请日：2002-05-13

Applicant: Derek Seeber ,  Ashok Menon ,  Jovan Jevtic

Inventor： Derek Seeber ,  Ashok Menon ,  Jovan Jevtic

IPC: H05K900

CPC classification number: H05K9/0066

Abstract: A floating shield current trap provides first and second concentric tubular conductors electrically connected to provide a resonance-induced high impedance of current flow in a path consisting of the inner and outer conductors and their junctions thereby suppressing coupled current flow on a shield of a conductor contained within the first inner tubular conductor.

Abstract translation: 浮动屏蔽电流阱提供电连接的第一和第二同心管状导体，以在由内外导体及其接头组成的路径中提供谐振感应的高阻抗电流，从而抑制所包含的导体的屏蔽上的耦合电流 在第一内管状导体内。