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    Inductively coupled high-density plasma source
    3.
    发明授权
    Inductively coupled high-density plasma source 失效
    电感耦合高密度等离子体源

    公开(公告)号：US07482757B2

    公开(公告)日：2009-01-27

    申请号：US10472553

    申请日：2002-03-25

    Applicant: Bill H. Quon ,  Jovan Jevtic ,  Sam Antley ,  Eric J. Strang

    Inventor： Bill H. Quon ,  Jovan Jevtic ,  Sam Antley ,  Eric J. Strang

    IPC: H01J7/24

    CPC classification number: H01J37/321 ,  H01J37/32357 ,  H01J37/3266

    Abstract: A high-density plasma source (100) is disclosed. The source includes an annular insulating body (300) with an annular cavity (316) formed within. An inductor coil (340) serving as an antenna is arranged within the annular cavity and is operable to generate a first magnetic field within a plasma duct (60) interior region (72) and inductively couple to the plasma when the annular body is arranged to surround a portion of the plasma duct. A grounded conductive housing (400) surrounds the annular insulating body. An electrostatic shield (360) is arranged adjacent the inner surface of the insulating body and is grounded to the conductive housing. Upper and lower magnet rings (422 and 424) are preferably arranged adjacent the upper and lower surfaces of the annular insulating body outside of the conductive housing. A T-match network is in electrical communication with said inductor coil and is adapted to provide for efficient transfer of RF power from an RF power source to the plasma. At least one plasma source can be used to form a high-density plasma suitable for plasma processing of a workpiece residing in a plasma chamber in communication with the at least one source.

    Abstract translation: 公开了一种高密度等离子体源（100）。 源包括环形绝缘体（300），其内部形成有环形空腔（316）。 用作天线的电感线圈（340）布置在环形空腔内，并且可操作以在等离子体管道（60）内部区域（72）内产生第一磁场，并且当环形体布置成 围绕等离子体管道的一部分。 接地导电壳体（400）围绕环形绝缘体。 静电屏蔽（360）被布置成邻近绝缘体的内表面并且被接地到导电壳体。 上，下磁环（422和424）优选地布置成邻近导电外壳外的环形绝缘体的上表面和下表面。 T匹配网络与所述电感器线圈电连通，并且适于提供从RF功率源到等离子体的RF功率的有效传输。 可以使用至少一个等离子体源来形成适于等离子体处理高密度等离子体处理的工件，该工件位于与至少一个源连通的等离子体室中。

    Inductively coupled high-density plasma source
    4.
    发明申请
    Inductively coupled high-density plasma source 失效
    电感耦合高密度等离子体源

    公开(公告)号：US20050099133A1

    公开(公告)日：2005-05-12

    申请号：US10472553

    申请日：2002-03-25

    Applicant: Bill Quon ,  Jovan Jevtic ,  Sam Antley ,  Eric Strang

    Inventor： Bill Quon ,  Jovan Jevtic ,  Sam Antley ,  Eric Strang

    IPC: H05H1/46 ,  B01D53/70 ,  B01J19/08 ,  H01J7/24 ,  H01J37/32

    CPC classification number: H01J37/321 ,  H01J37/32357 ,  H01J37/3266

    Abstract: A high-density plasma source (100) is disclosed. The source includes an annular insulating body (300) with an annular cavity (316) formed within. An inductor coil (340) serving as an antenna is arranged within the annular cavity and is operable to generate a first magnetic field within a plasma duct (60) interior region (72) and inductively couple to the plasma when the annular body is arranged to surround a portion of the plasma duct. A grounded conductive housing (400) surrounds the annular insulating body. An electrostatic shield (360) is arranged adjacent the inner surface of the insulating body and is grounded to the conductive housing. Upper and lower magnet rings (422 and 424) are preferably arranged adjacent the upper and lower surfaces of the annular insulating body outside of the conductive housing. A T-match network is in electrical communication with said inductor coil and is adapted to provide for efficient transfer of RF power from an RF power source to the plasma. At least one plasma source can be used to form a high-density plasma suitable for plasma processing of a workpiece residing in a plasma chamber in communication with the at least one source.

    Abstract translation: 公开了一种高密度等离子体源（100）。 源包括环形绝缘体（300），其内部形成有环形空腔（316）。 用作天线的电感线圈（340）布置在环形空腔内，并且可操作以在等离子体管道（60）内部区域（72）内产生第一磁场，并且当环形体布置成 围绕等离子体管道的一部分。 接地导电壳体（400）围绕环形绝缘体。 静电屏蔽（360）被布置成邻近绝缘体的内表面并且被接地到导电壳体。 上，下磁环（422和424）优选地布置成邻近导电外壳外的环形绝缘体的上表面和下表面。 T匹配网络与所述电感器线圈电连通，并且适于提供从RF功率源到等离子体的RF功率的有效传输。 可以使用至少一个等离子体源来形成适于等离子体处理高密度等离子体处理的工件，该工件位于与至少一个源连通的等离子体室中。

    Phased array MRI coil with controllable coupled ring resonator
    5.
    发明授权
    Phased array MRI coil with controllable coupled ring resonator 失效
    具有可控耦合环谐振器的相控阵MRI线圈

    公开(公告)号：US07227360B2

    公开(公告)日：2007-06-05

    申请号：US11036640

    申请日：2005-01-14

    Applicant: Jovan Jevtic ,  Velibor Pikelja

    Inventor： Jovan Jevtic ,  Velibor Pikelja

    IPC: G01V3/00

    CPC classification number: G01R33/3607 ,  G01R33/34046 ,  G01R33/3415

    Abstract: A coil for magnetic resonance imaging operates in a transmit mode with multiple loops locked together in a phase relationship like a birdcage coil to provide a uniform transmission field, but in a receive mode like a phased array coil, each coil operating independently to produce a separate signal for reception by the MRI machine. Phasing of the coil during transmit mode is provided by a ring resonator controllably coupled to the loops. Controllable coupling is provided by a series of current limiting elements interposed between the resonant ring and the loops of the coil.

    Abstract translation: 用于磁共振成像的线圈以发射模式操作，其中多个环路以类似鸟笼线圈的相位关系锁定在一起以提供均匀的发射场，但是在类似相控阵线圈的接收模式中，每个线圈独立地工作以产生单独的 信号由MRI机接收。 在发射模式期间线圈的相位由可控地耦合到环路的环形谐振器提供。 可控耦合由插入在谐振环和线圈的环之间的一系列限流元件提供。

    Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode
    6.
    发明授权
    Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode 有权
    改善RF信号与多段电极之间的阻抗匹配的装置和方法

    公开(公告)号：US07109788B2

    公开(公告)日：2006-09-19

    申请号：US10469593

    申请日：2002-02-27

    Applicant: Jovan Jevtic ,  Andrej Mitrovic

    Inventor： Jovan Jevtic ,  Andrej Mitrovic

    IPC: H03D3/02

    CPC classification number: H01J37/32082 ,  H01J37/32183

    Abstract: An apparatus and method of improving impedance matching between a RF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RF signal, and matches an impedance of the RF signal with an impedance of the electrode segment, where the RF signal is modulated prior to matching of the impedance of the RF signal. The apparatus and method directionally couples an output of the matching of the impedance of the RF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.

    Abstract translation: 一种改善由RF信号供电的等离子体反应器中的RF信号和多段电极之间的阻抗匹配的装置和方法。 该装置和方法相位移动驱动多分段电极的一个或多个电极段的RF信号，放大RF信号，并将RF信号的阻抗与电极段的阻抗匹配，其中RF信号先前被调制 以匹配RF信号的阻抗。 该装置和方法定向耦合RF信号和电极段的阻抗匹配的输出，并且调整RF信号的阻抗匹配的输出，使得定向耦合的输出信号和表示 在主RF振荡器的输出处的RF信号产生最小振幅的解调信号。

    Phased array MRI coil with controllable coupled ring resonator
    7.
    发明申请
    Phased array MRI coil with controllable coupled ring resonator 失效
    具有可控耦合环谐振器的相控阵MRI线圈

    公开(公告)号：US20060158187A1

    公开(公告)日：2006-07-20

    申请号：US11036640

    申请日：2005-01-14

    Applicant: Jovan Jevtic ,  Velibor Pikelja

    Inventor： Jovan Jevtic ,  Velibor Pikelja

    IPC: G01V3/00

    CPC classification number: G01R33/3607 ,  G01R33/34046 ,  G01R33/3415

    Abstract: A coil for magnetic resonance imaging operates in a transmit mode with multiple loops locked together in a phase relationship like a birdcage coil to provide a uniform transmission field, but in a receive mode like a phased array coil, each coil operating independently to produce a separate signal for reception by the MRI machine. Phasing of the coil during transmit mode is provided by a ring resonator controllably coupled to the loops. Controllable coupling is provided by a series of current limiting elements interposed between the resonant ring and the loops of the coil.

    Abstract translation: 用于磁共振成像的线圈以发射模式操作，其中多个环路以类似鸟笼线圈的相位关系锁定在一起以提供均匀的发射场，但是在类似相控阵线圈的接收模式中，每个线圈独立地工作以产生单独的 信号由MRI机接收。 在发射模式期间线圈的相位由可控地耦合到环路的环形谐振器提供。 可控耦合由插入在谐振环和线圈的环之间的一系列限流元件提供。

    Optical interface for local MRI coils
    9.
    发明授权
    Optical interface for local MRI coils 失效
    局部MRI线圈的光学接口

    公开(公告)号：US07345485B2

    公开(公告)日：2008-03-18

    申请号：US11334264

    申请日：2006-01-18

    Applicant: Jovan Jevtic ,  Nunez Tatum

    Inventor： Jovan Jevtic ,  Nunez Tatum

    IPC: G01V3/00

    CPC classification number: G01R33/3692

    Abstract: An implementation of an optical transmission path for NMR signals from local coils in magnetic resonance imaging employs a photomodulator that may be incorporated into a connecting optical cable to be shared among multiple local coils and to provide for connection and disconnection at an electrical interface eliminating the need for optical connectors.

    Abstract translation: 在磁共振成像中来自本地线圈的NMR信号的光传输路径的实现采用光调制器，该光调制器可并入到连接光缆中，以在多个本地线圈之间共享并且在电接口处提供连接和断开，从而消除了需要 用于光连接器。

    Optical interface for local MRI coils
    10.
    发明申请
    Optical interface for local MRI coils 失效
    局部MRI线圈的光学接口

    公开(公告)号：US20070164746A1

    公开(公告)日：2007-07-19

    申请号：US11334264

    申请日：2006-01-18

    Applicant: Jovan Jevtic ,  Nunez Tatum

    Inventor： Jovan Jevtic ,  Nunez Tatum

    IPC: G01V3/00

    CPC classification number: G01R33/3692

    Abstract: An implementation of an optical transmission path for NMR signals from local coils in magnetic resonance imaging employs a photomodulator that may be incorporated into a connecting optical cable to be shared among multiple local coils and to provide for connection and disconnection at an electrical interface eliminating the need for optical connectors.

    Abstract translation: 在磁共振成像中来自本地线圈的NMR信号的光传输路径的实现采用光调制器，该光调制器可并入到连接光缆中，以在多个本地线圈之间共享并且在电接口处提供连接和断开，从而消除了需要 用于光连接器。

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