公开(公告)号：US20150200116A1

公开(公告)日：2015-07-16

申请号：US14466391

申请日：2014-08-22

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroaki YAMADA ,  Yoshihiro OGAWA ,  Takeshi HIZAWA

IPC: H01L21/67

CPC classification number: H01L21/67086 ,  B08B3/14 ,  B81C2201/0138 ,  C23F1/26 ,  H01L21/31111 ,  H01L22/10 ,  Y10T137/0318

Abstract: A chemical liquid treatment apparatus includes processing chambers; a chemical liquid feeding unit configured to cyclically feed a chemical liquid into the processing chambers; and a modifying unit. The modifying unit, when using a chemical liquid in which an effect thereof varies with a chemical liquid discharge time, is configured to calculate a variation of the effect of the chemical liquid based on the chemical liquid discharge time and is configured to modify the chemical liquid discharge time for each of the processing chambers based on the calculated variation of the effect of the chemical liquid and a cumulative time of the chemical liquid discharge time.

Abstract translation: 药液处理装置包括处理室; 化学液体供给单元，其构造成将化学液体循环进料到所述处理室中; 和修改单元。 修改单元当使用其效果随化学液体排出时间而变化的化学液体被配置为基于化学液体排出时间计算化学液体的影响的变化，并且被配置为改变化学液体 基于计算出的化学液体的影响的变化和化学液体排放时间的累积时间，每个处理室的排出时间。