公开(公告)号：US12229935B2

公开(公告)日：2025-02-18

申请号：US17711043

申请日：2022-04-01

Applicant: KLA Corporation

Inventor： Bjorn Brauer ,  Richard Wallingford

IPC: G06T7/00 ,  G06N3/08 ,  G06T7/10 ,  G06V10/774 ,  G06V20/70

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a semantic segmentation model configured for assigning labels to each of multiple pixels in an image responsive to what is represented in each of the multiple pixels. The image is an image of a specimen generated by an imaging subsystem. The computer subsystem is configured for determining information for the specimen from the assigned labels and without a reference image for the specimen.

公开(公告)号：US20230204934A1

公开(公告)日：2023-06-29

申请号：US18114859

申请日：2023-02-27

Applicant: KLA Corporation

Inventor： Xiumei Liu ,  Kai Cao ,  Richard Wallingford ,  Matthew Giusti ,  Brooke Bruguier

IPC: G02B21/00 ,  G02B21/36

CPC classification number: G02B21/006 ,  G02B21/364 ,  G02B21/0032

Abstract: An auto-focusing system is disclosed. The system includes an illumination source. The system includes an aperture. The system includes a projection mask. The system includes a detector assembly. The system includes a relay system, the relay system being configured to optically couple illumination transmitted through the projection mask to an imaging system. The relay system also being configured to project one or more patterns from the projection mask onto a specimen and transmit an image of the projection mask from the specimen to the detector assembly. The system includes a controller including one or more processors configured to execute a set of program instructions. The program instructions being configured to cause the one or more processors to: receive one or more images of the projection mask from the detector assembly and determine quality of the one or more images of the projection mask.

公开(公告)号：US11592653B2

公开(公告)日：2023-02-28

申请号：US16836787

申请日：2020-03-31

Applicant: KLA Corporation

Inventor： Xiumei Liu ,  Kai Cao ,  Richard Wallingford ,  Matthew Giusti ,  Brooke Bruguier

IPC: G02B21/00 ,  G02B21/36

Abstract: An auto-focusing system is disclosed. The system includes an illumination source. The system includes an aperture. The system includes a projection mask. The system includes a detector assembly. The system includes a relay system, the relay system being configured to optically couple illumination transmitted through the projection mask to an imaging system. The relay system also being configured to project one or more patterns from the projection mask onto a specimen and transmit an image of the projection mask from the specimen to the detector assembly. The system includes a controller including one or more processors configured to execute a set of program instructions. The program instructions being configured to cause the one or more processors to: receive one or more images of the projection mask from the detector assembly and determine quality of the one or more images of the projection mask.

公开(公告)号：US20220375051A1

公开(公告)日：2022-11-24

申请号：US17308878

申请日：2021-05-05

Applicant: KLA Corporation

Inventor： Bjorn Brauer ,  Richard Wallingford

IPC: G06T7/00 ,  G06T7/33

Abstract: Methods and systems for deep learning alignment for semiconductor applications are provided. One method includes transforming first actual information for an alignment target on a specimen from either design data to a specimen image or a specimen image to design data by inputting the first actual information into a deep generative model such as a GAN. The method also includes aligning the transformed first actual information to second actual information for the alignment target, which has the same information type as the transformed first actual information. The method further includes determining an offset between the transformed first actual information and the second actual information based on results of the aligning and storing the determined offset as an align-to-design offset for use in a process performed on the specimen.

公开(公告)号：US11431976B2

公开(公告)日：2022-08-30

申请号：US16744301

申请日：2020-01-16

Applicant: KLA Corporation

Inventor： Nurmohammed Patwary ,  Richard Wallingford ,  James A. Smith ,  Xiaochun Li ,  Vladimir Tumakov ,  Bjorn Brauer

IPC: G06K9/00 ,  H04N19/126 ,  H04N19/60 ,  G01N21/95

Abstract: A sample characterization system is disclosed. In embodiments, the sample characterization system includes a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to: acquire one or more target image frames of a sample; generate a target tensor with the one or more acquired target image frames; perform a first set of one or more decomposition processes on the target tensor to generate one or more reference tensors including one or more reference image frames; identify one or more differences between the one or more target image frames and the one or more reference image frames; and determine one or more characteristics of the sample based on the one or more identified differences.

公开(公告)号：US20200244963A1

公开(公告)日：2020-07-30

申请号：US16744301

申请日：2020-01-16

Applicant: KLA Corporation

Inventor： Nurmohammed Patwary ,  Richard Wallingford ,  James A. Smith ,  Xiaochun Li ,  Vladimir Tumakov ,  Bjorn Brauer

IPC: H04N19/126 ,  G01N21/95 ,  H04N19/60

Abstract: A sample characterization system is disclosed. In embodiments, the sample characterization system includes a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to: acquire one or more target image frames of a sample; generate a target tensor with the one or more acquired target image frames; perform a first set of one or more decomposition processes on the target tensor to form generate one or more reference tensors including one or more reference image frames; identify one or more differences between the one or more target image frames and the one or more reference image frames; and determine one or more characteristics of the sample based on the one or more identified differences.