公开(公告)号：US5751426A

公开(公告)日：1998-05-12

申请号：US460708

申请日：1995-06-02

申请人： Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh ,  Hiroshi Osawa ,  Koichi Sentoku ,  Toshihiko Tsuji ,  Takahiro Matsumoto

发明人： Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh ,  Hiroshi Osawa ,  Koichi Sentoku ,  Toshihiko Tsuji ,  Takahiro Matsumoto

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01B9/02

CPC分类号： G03F7/70633 ,  G03F9/7049

摘要： A device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object include an illumination optical system for illuminating the plurality of diffraction gratings with a light beam, the illumination by the optical system generating a plurality of diffracted light beams from the plurality of diffraction gratings, an interference optical system for forming at least one interference light beam from the plurality of diffracted light beams, a detector for detecting the at least one interference light beam, the result of the detection serving as the basis for measuring the positional deviation between the plurality of diffraction gratings, and a measuring portion for measuring the relative positional relation between the illumination optical system and the plurality of diffraction gratings.

摘要翻译： 用于测量形成在同一物体上的多个衍射光栅之间的位置偏差的装置和方法包括用光束照射多个衍射光栅的照明光学系统，光学系统的照明产生多个衍射光束 来自多个衍射光栅的干涉光学系统，用于形成来自多个衍射光束的至少一个干涉光束，用于检测至少一个干涉光束的检测器，检测结果作为测量的基础 多个衍射光栅之间的位置偏差，以及用于测量照明光学系统和多个衍射光栅之间的相对位置关系的测量部分。

公开(公告)号：US5610718A

公开(公告)日：1997-03-11

申请号：US297511

申请日：1994-08-29

申请人： Koichi Sentoku ,  Takahiro Matsumoto ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh

发明人： Koichi Sentoku ,  Takahiro Matsumoto ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B9/02

CPC分类号： G03F7/70633 ,  G03F9/7049

摘要： A method and device for measuring the relative displacement between first and second diffraction gratings includes an interference optical system forming first and second interference rays of light from light diffracted from the first and second diffraction gratings and separating the first and second interference rays of light on the basis of the difference in their direction of polarization, a first detector for detecting the first interference ray of light to generate a first detection signal, a second detector for detecting the second interference ray of light to generate a second detection signal, and signal processing section for detecting the phase difference between the first and second detection signals and for determining the relative displacement between the first and second diffraction gratings on the basis of the phase difference.

摘要翻译： 用于测量第一和第二衍射光栅之间的相对位移的方法和装置包括干涉光学系统，其形成从第一和第二衍射光栅衍射的光的第一和第二干涉光线，并且将第一和第二干涉光线分离在 其偏振方向的差异的基础，用于检测第一干涉光线以产生第一检测信号的第一检测器，用于检测第二干涉光线以产生第二检测信号的第二检测器，以及信号处理部分 用于检测第一和第二检测信号之间的相位差，并且用于基于相位差确定第一和第二衍射光栅之间的相对位移。

公开(公告)号：US5369486A

公开(公告)日：1994-11-29

申请号：US947383

申请日：1992-09-21

申请人： Takahiro Matsumoto ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh ,  Masanobu Hasegawa ,  Koichi Sentoku

发明人： Takahiro Matsumoto ,  Noriyuki Nose ,  Minoru Yoshii ,  Kenji Saitoh ,  Masanobu Hasegawa ,  Koichi Sentoku

IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B9/02

CPC分类号： G03F7/70633 ,  G03F9/7049

摘要： A position detector includes a diffraction grating provided on the surface of an object, an illumination system for illuminating the diffraction grating, a detection system for detecting diffracted light diffracted from the diffraction grating, and a processing system for detecting positional information relating to the object. The illumination system emits a first pair of beams which are diffracted by the diffraction grating and interfere with each other, and emits a second pair of beams which are diffracted by the diffraction grating and also interfere with each other. The first pair of beams are incident upon the diffraction grating along a plane extending in a first direction in which the diffraction grating extends. The second pair of beams are incident upon the diffraction grating along a plane extending in a second direction in which the diffraction grating extends. The first and second directions are different from a grating line direction. The detection system detects the interfering light and generates first and second beat signals therefrom. The processing system detects positional information with respect to the first direction from the phase state of the first beat signal and with respect to the second direction from the phase state of the second beat signal.

摘要翻译： 位置检测器包括设置在物体表面上的衍射光栅，用于照射衍射光栅的照明系统，用于检测衍射光栅衍射的衍射光的检测系统，以及用于检测与物体有关的位置信息的处理系统。 照明系统发射由衍射光栅衍射并彼此干涉的第一对光束，并且发射由衍射光栅衍射并且彼此干涉的第二对光束。 第一对光束沿着沿衍射光栅延伸的第一方向延伸的平面入射在衍射光栅上。 第二对光束沿着沿衍射光栅延伸的第二方向延伸的平面入射在衍射光栅上。 第一和第二方向与光栅线方向不同。 检测系统检测干扰光并从其产生第一和第二拍拍信号。 处理系统从第一拍子信号的相位状态和相对于第二拍摄信号的相位状态相对于第二方向检测关于第一方向的位置信息。

公开(公告)号：US5333050A

公开(公告)日：1994-07-26

申请号：US675277

申请日：1991-03-26

申请人： Noriyuki Nose ,  Kenji Saitoh ,  Koichi Sentoku ,  Minoru Yoshii

发明人： Noriyuki Nose ,  Kenji Saitoh ,  Koichi Sentoku ,  Minoru Yoshii

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/02

CPC分类号： G03F7/70633 ,  G03F9/7049

摘要： Disclosed is a method and apparatus for measuring a relative positional deviation between a first pattern and a second pattern, printed on an article such as a semiconductor wafer at different moments, the measurement being based on detection of interference of diffraction lights from at least one of the first and second printed patterns.

摘要翻译： 公开了一种用于测量在不同时刻印刷在诸如半导体晶片的物品上的第一图案和第二图案之间的相对位置偏差的方法和装置，该测量是基于检测衍射光从至少一个 第一和第二印刷图案。

公开(公告)号：US5450503A

公开(公告)日：1995-09-12

申请号：US231783

申请日：1994-04-25

申请人： Yasuo Ogino ,  Mitsutoshi Ohwada ,  Minoru Yoshii ,  Yukichi Niwa

发明人： Yasuo Ogino ,  Mitsutoshi Ohwada ,  Minoru Yoshii ,  Yukichi Niwa

IPC分类号： G01S3/78 ,  G01S3/782 ,  G06K9/00 ,  G06K9/50 ,  G06T7/60 ,  H04N7/18 ,  G06K9/46

CPC分类号： G06K9/50

摘要： An image recognition method is conducted by extracting characteristic points of the pattern of an image formed by video signals from an image pickup device, within the whole or a limited area of a frame of a display, and measuring the distribution of the characteristic points of the image pattern. With this method, images can be recognized with minimal image processing time and with reduced influence of noises.

摘要翻译： 通过在显示器的整个或有限的区域内从图像拾取装置中提取由图像信号形成的图像的图案的特征点，并且测量图像的特征点的分布来进行图像识别方法 图像模式。 利用这种方法，可以以最小的图像处理时间和噪声的影响减小来识别图像。

公开(公告)号：US5396336A

公开(公告)日：1995-03-07

申请号：US418576

申请日：1989-10-06

申请人： Minoru Yoshii ,  Takeshi Baba ,  Yukichi Niwa

发明人： Minoru Yoshii ,  Takeshi Baba ,  Yukichi Niwa

IPC分类号： H04N5/232 ,  G02B7/28 ,  G02B7/36 ,  G03B3/00 ,  G03B13/36

CPC分类号： G02B7/36 ,  H04N5/23212

摘要： An in-focus detecting device comprising a photo-electric converter element for converting an object image formed on the image receiving surface thereof through an image forming lens, a drive mechanism for controlling the focusing position of the lens, a focus degree detecting circuit for detecting the degree of focus in a prescribed distance measuring frame of the image receiving surface and the degree of focus outside the frame on the basis of the output signal of the photo-electric converter element, and a control circuit, responsive to the output of the focus degree detecting circuit representing that the degree of focus in the distance measuring frame is below a prescribed level, for comparing the degree of focus in the distance measuring frame with the degree of focus outside the frame to determine the direction of the image forming lens to be driven.

摘要翻译： 一种对焦检测装置，包括用于通过图像形成透镜转换形成在其图像接收表面上的物体图像的光电转换元件，用于控制透镜的聚焦位置的驱动机构，用于检测透镜的聚焦度检测电路 基于光电转换元件的输出信号的图像接收表面的规定距离测量框架中的焦点的程度和帧外的焦点，以及响应于焦点的输出的控制电路 表示距离测量框架的焦点程度低于规定水平的度数检测电路，用于将距离测量框架中的焦点与框架外的焦度进行比较，以确定图像形成透镜的方向为 驱动。

公开(公告)号：US5055665A

公开(公告)日：1991-10-08

申请号：US497075

申请日：1990-03-21

申请人： Takashi Baba ,  Yukichi Niwa ,  Minoru Yoshii ,  Takako Watanabe

发明人： Takashi Baba ,  Yukichi Niwa ,  Minoru Yoshii ,  Takako Watanabe

IPC分类号： G02B7/36 ,  H04N5/232

CPC分类号： G02B7/36 ,  H04N5/23212

摘要： In an automatic focusing apparatus, a focus detecting device having detecting means for detecting the width of the edge part of the image of an object to be photographed and discriminating means for discriminating a focused state on the basis of the size of the detected width is arranged to determine by the discriminating means the apparatus to be out of focus when the width of the edge part of the object image is wide and to be in focus when the width of the edge part is narrow, so that the focus detecting device can operate without being affected by difference in the kind and the contrast of the object to be photographed.

摘要翻译： 在自动对焦装置中，具有检测装置，用于检测被拍摄对象的图像的边缘部分的宽度的检测装置和用于基于检测到的宽度的大小来鉴别聚焦状态的鉴别装置 通过鉴别装置确定当物体图像的边缘部分的宽度较宽时设备不对焦并且当边缘部分的宽度窄时聚焦，使得焦点检测装置可以在没有 受到被拍摄物体的种类和对比度的差异的影响。

公开(公告)号：US4804831A

公开(公告)日：1989-02-14

申请号：US922740

申请日：1986-10-24

申请人： Takashi Baba ,  Yukichi Niwa ,  Minoru Yoshii ,  Takako Watanabe

发明人： Takashi Baba ,  Yukichi Niwa ,  Minoru Yoshii ,  Takako Watanabe

IPC分类号： G02B7/36 ,  H04N5/232 ,  G02B7/00

CPC分类号： H04N5/23212 ,  G02B7/36

摘要： In an automatic focusing apparatus, a focus detecting device having detecting means for detecting the width of the edge part of the image of an object to be photographed and discriminating means for discriminating a focused state on the basis of the size of the detected width is arranged to determine by the discriminating means the apparatus to be out of focus when the width of the edge part of the object image is wide and to be in focus when the width of the edge part is narrow, so that the focus detecting device can operate without being affected by difference in the kind and the contrast of the object to be photographed.

摘要翻译： 在自动对焦装置中，具有检测装置，用于检测被拍摄对象的图像的边缘部分的宽度的检测装置和用于基于检测到的宽度的大小来鉴别聚焦状态的鉴别装置 通过鉴别装置确定当物体图像的边缘部分的宽度较宽时设备不对焦并且当边缘部分的宽度窄时聚焦，使得焦点检测装置可以在没有 受到被拍摄物体的种类和对比度的差异的影响。

公开(公告)号：US5340992A

公开(公告)日：1994-08-23

申请号：US978524

申请日：1992-11-18

申请人： Masakazu Matsugu ,  Minoru Yoshii ,  Naoto Abe

发明人： Masakazu Matsugu ,  Minoru Yoshii ,  Naoto Abe

IPC分类号： G03F9/00 ,  G01N21/86 ,  G01V9/04

CPC分类号： G03F9/7076

摘要： A device for detecting a relative positional relationship between first and second objects is disclosed. The device includes light source for projecting light to the first and second objects; photodetecting system for detecting light from one of the first and second objects illuminated by the light source system, the photodetecting system having a light receiving surface and producing a signal corresponding to the light intensity at each point on the light receiving surface; and position detecting system for detecting the relative position of the first and second objects, on the basis of signals from the photodetecting system, wherein the position detecting system is arranged to adjust signals corresponding to different points on the light receiving surface of the photodetecting system, by using different weight coefficients and to detect the relative position of the first and second objects on the basis of the adjusted signals.

摘要翻译： 公开了一种用于检测第一和第二物体之间的相对位置关系的装置。 该装置包括用于将光投射到第一和第二物体的光源; 用于检测来自由光源系统照射的第一和第二物体之一的光的光电检测系统，所述光电检测系统具有光接收表面，并且产生与所述光接收表面上的每个点处的光强度相对应的信号; 以及位置检测系统，用于基于来自光电检测系统的信号检测第一和第二物体的相对位置，其中位置检测系统被布置成调节与光检测系统的光接收表面上的不同点对应的信号， 通过使用不同的权重系数，并且基于经调整的信号来检测第一和第二对象的相对位置。

公开(公告)号：US5729290A

公开(公告)日：1998-03-17

申请号：US473333

申请日：1995-06-07

申请人： Jun Tokumitsu ,  Masayoshi Sekine ,  Toshiaki Kondo ,  Koji Takahashi ,  Isao Harigaya ,  Minoru Yoshii ,  Shigeyuki Suda

发明人： Jun Tokumitsu ,  Masayoshi Sekine ,  Toshiaki Kondo ,  Koji Takahashi ,  Isao Harigaya ,  Minoru Yoshii ,  Shigeyuki Suda

IPC分类号： G02B27/64 ,  H04N5/232

CPC分类号： H04N5/23254 ,  G02B27/646 ,  H04N5/23212 ,  H04N5/23248 ,  H04N5/23267 ,  H04N5/23287

摘要： A movement detection device for detecting movement of an image incident on an image sensing device and for compensating for that movement includes movement detection circuitry for detecting the movement of the image from image signals output from the image sensing device. Correction circuitry is provided for electrically correcting the movement of the image based on an output of the movement detection circuitry. A filter is provided for receiving the corrected image signals output from the correction circuitry, and for performing a filter processing operation on the corrected image signals to compensate for degradation of image resolution due to the movement of the image.