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11.发明授权Metal halide lamp light source device having conducting wire positioned to prevent it from casting a shadow 失效金属卤化物灯光源装置具有导线，以防止其投射阴影
公开(公告)号：US6002197A
公开(公告)日：1999-12-14
申请号：US840067
申请日：1997-04-24
CPC分类号： H01J61/36 , H01J61/025 , H01J61/34
摘要： A light source device for a liquid crystal projector in which it is possible to prevent distinct appearance of a shadow of the conducting wiring of a lamp on a screen, even if an integrator lens is used, is achieved according to the invention by the fact that, in a light source device which has a metal halide lamp with bilateral sealed terminations in which seal areas are joined in one piece to two ends of an arc tube, and a concave reflector, in which one of the seal areas of the lamp is installed and held in a base opening of the concave reflector, and in which the other seal area extends in toward the front opening of the concave reflector, by conducting wiring connected to the outer lead pin which projects from the seal area toward the front opening of the concave reflector being positioned running toward the arc tube in a manner resting directly on this seal area, and then being drawn out in the vicinity of the arc tube with to behind the concave reflector.
摘要翻译： 即使使用积分透镜也可以实现液晶投影仪的光源装置，即使在使用积分透镜的情况下也可以防止在屏幕上的灯的导线的阴影的不同外观， 在具有双边密封端子的金属卤化物灯的光源装置中，其中密封区域一体地连接到电弧管的两端，并且其中安装有灯的一个密封区域的凹面反射器 并且保持在凹面反射器的基部开口中，并且其中另一个密封区域朝向凹面反射器的前部开口延伸，通过连接到从引线销引出的布线，该外部引线销从密封区域向着前述开口突出 凹形反射器以直接搁置在该密封区域上的方式定位成朝着电弧管行进，然后在凹面反射器的后方被引出到电弧管附近。
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12.发明授权公开(公告)号：US07649186B2
公开(公告)日：2010-01-19
申请号：US11736866
申请日：2007-04-18
申请人： Kiyoyuki Kabuki , Hiroto Sato
发明人： Kiyoyuki Kabuki , Hiroto Sato
CPC分类号： G21K1/06 , B82Y10/00 , G03F7/70166 , G21K2201/067
摘要： In an EUV focusing mirror in which there are several thin concave nested high precision mirrors in the form of an ellipsoid of revolution, a paraboloid of revolution, a Wolter type or the like, the sides which do not constitute the reflection surfaces are made in the shape of a knife edge at the radiation incident ends of the respective mirrors in order not to be shielded by the thickness of the radiation incidence sides of the respective mirrors. Likewise, the radiation exit ends of the respective mirrors are made in the form of a knife edge. This yields an advantageous far-field distribution use of the mirrors for an EUV radiation source device and the degree of reduction of the light intensity can be made smaller than in the conventional case.
摘要翻译： 在EUV聚焦反射镜中，有几个呈旋转椭圆形的薄凹嵌套高精度反射镜，旋转抛物面，Wolter型等，不构成反射面的侧面在 在相应反射镜的辐射入射端处的刀刃的形状，以便不被相应反射镜的辐射入射侧的厚度屏蔽。 同样地，各个反射镜的辐射出口端以刀刃的形式制成。 这产生了用于EUV辐射源装置的反射镜的有利的远场分布使用，并且可以使得光强度的降低程度比常规情况更小。
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公开(公告)号：US06483239B1
公开(公告)日：2002-11-19
申请号：US09762301
申请日：2001-02-08
IPC分类号： H01J1704
CPC分类号： H01J61/025 , H01J61/35 , H01J61/86
摘要： A light source device including a short arc discharge lamp having a pair of opposed electrodes within a light emitting bulb of a discharge container, and a concave reflector having an optical axis arranged to coincide with a direction of an arc produced by the electrodes when the discharge lamp is activated. The electrodes are spaced from each other at a distance of 4.0 mm or less and the light emitting bulb has an inner surface and an outer surface which, at least in a specific portion, have substantially spherical surfaces with a center of curvature which is at a center of the arc. The specific portion is located in front of a critical line that passes through the light emitting bulb, the specific portion being an angle having an apex at the center of the arc. The concave reflector has an optical axis that is at least 3 sr in front of a plane which passes through the center of the arc and perpendicular to the optical axis of the concave reflector.
摘要翻译： 一种光源装置，包括在放电容器的发光灯泡内具有一对相对电极的短弧放电灯，以及具有光轴的凹面反射器，所述光反射器具有与电极产生的电弧方向一致的放电灯 灯被激活。 电极彼此间隔4.0mm或更小，发光灯泡具有内表面和至少在特定部分具有大致球形表面的外表面，曲面中心处于 圆弧的中心。 特定部分位于通过发光灯泡的临界线的前面，特定部分是具有在圆弧中心的顶点的角度。 凹面反射体的光轴在穿过圆弧的中心并且垂直于凹面反射体的光轴的平面的前方至少为3弧度。
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公开(公告)号：US08253926B2
公开(公告)日：2012-08-28
申请号：US12565881
申请日：2009-09-24
申请人： Taku Sumitomo , Kiyoyuki Kabuki , Toshio Yokota
发明人： Taku Sumitomo , Kiyoyuki Kabuki , Toshio Yokota
CPC分类号： G03F7/70575 , G03F7/70033
摘要： An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.
摘要翻译： 用于生产半导体和液晶的曝光装置具有一种光学系统，当将高能量激光照射到紫外光等发光时，能够有效地利用在灯放电容器内不产生孔而产生的光。 曝光装置具有用于发射紫外光的光源，用于发射激光的激光装置，用于反射从光源发射的紫外光的椭圆反射器和用于将由椭圆形反射器反射的光引导到物品的光学系统 通过包括准直透镜和积分透镜的光学元件进行处理，以及在由光学反射器反射的光的光路中提供的具有波长选择能力的分束器，以允许激光入射到来自光源的光源 椭圆形反射镜。
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公开(公告)号：US5971568A
公开(公告)日：1999-10-26
申请号：US775094
申请日：1996-12-30
申请人： Kiyoyuki Kabuki
发明人： Kiyoyuki Kabuki
摘要： An optical device and a multisurface reflector which can be used for this purpose, which has high uniformity of the illumination intensity on the entire surface of an area to be illuminated, and a small shape, and in which a high utilization factor of the light can be obtained is achieved according to the invention by there being a multisurface concave reflector which is composed of numerous mirror elements which combine to form a concave reflection surface of a generally oval shape. A light source lamp is arranged such that an emission part of it is positioned along the center axis of the multisurface reflector, and a lens plate is located in front of the multisurface reflector on a plane perpendicular to its center axis. The lens plate a plurality of lens elements which each correspond number to the number of mirror elements on the reflector. Furthermore, according to the invention, each mirror element of the multisurface reflector has a first focal point positioned in the emission part of the light source lamp, and another focal point is positioned in a corresponding lens element of the lens plate. The light from the emission part of the light source lamp is divided by each mirror element, and this divided light is superimposed by the respective lens element in an area to be illuminated.
摘要翻译： 可以用于此目的的光学装置和多表面反射器，其在被照射区域的整个表面上的照明强度均匀性和小形状，并且其中光的高利用率可以 根据本发明，通过存在由多个镜元件组成的多表面凹面反射器来实现，该反射镜组合形成大体椭圆形的凹面反射面。 光源灯被布置成使得其发射部分沿着多表面反射器的中心轴线定位，并且透镜板位于垂直于其中心轴线的平面上的多表面反射器的前面。 透镜板具有多个透镜元件，每个透镜元件对应于反射器上的反射镜元件的数量。 此外，根据本发明，多表面反射体的每个反射镜元件具有位于光源灯的发射部分中的第一焦点，并且另一焦点位于透镜板的相应透镜元件中。 来自光源灯的发射部分的光被每个反射镜元件分开，并且该分离的光被相应的透镜元件叠加在被照射的区域中。
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公开(公告)号：US08882275B2
公开(公告)日：2014-11-11
申请号：US13445489
申请日：2012-04-12
CPC分类号： G02B27/102 , G03B21/2033 , G03B21/2073 , G03B33/12 , H04N9/3111 , H04N9/3161 , H04N9/3164
摘要： In a light source device, in each division of an image frame, two or more of the color lights X, Y and Z (e.g., red, green and blue) can be projected simultaneously. Each of the color lights X, Y and Z is divided into two in terms of time so that synthesized light of one group of division color lights enters a first spatial modulation element. Synthesized light of another group of division color lights enters a second spatial modulation element, whereby gradation of each color light in each of the first and second spatial modulation elements is controlled.
摘要翻译： 在光源装置中，在图像帧的每个分割中，可以同时投影两个或更多个彩色光X，Y和Z（例如，红色，绿色和蓝色）。 颜色光X，Y和Z中的每一个在时间上分为两个，使得一组分色光的合成光进入第一空间调制元件。 另一组划分色光的合成光进入第二空间调制元件，由此控制第一和第二空间调制元件中的每一个中的各色光的灰度。
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公开(公告)号：US08668339B2
公开(公告)日：2014-03-11
申请号：US13445474
申请日：2012-04-12
IPC分类号： G03B21/00 , G03B21/14 , G03B21/20 , G03B21/26 , G02F1/00 , H04N5/74 , H05B37/02 , H05B39/04 , H05B41/36 , G02B27/12 , G02B27/14
CPC分类号： G03B21/2033 , G03B21/2073 , G03B33/12 , H04N9/3111 , H04N9/3161 , H04N9/3164 , H04N9/3167
摘要： In a light source device, that obtains high light usage efficiency by projecting simultaneously two or more of three primary color lights X, Y and Z. Moreover, each color light X, Y and Z is divided into two in terms of time so that p-wave and s-wave linear polarization lights are formed, such that the synthesized light of the p-wave linear polarization lights enters a first spatial modulation element and the synthesized light of the s-wave linear polarization lights enters a second spatial modulation element to permit gradation control of each color light.
摘要翻译： 在光源装置中，通过同时投射三个原色光X，Y，Z中的两个以上来获得高的光的使用效率。此外，每个色光X，Y和Z在时间上被分为两个，使得p 形成波浪和s波线偏振光，使得p波线偏振光的合成光进入第一空间调制元件，并且s波线偏振光的合成光进入第二空间调制元件 允许对每种颜色光进行灰度控制。
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公开(公告)号：US20120262676A1
公开(公告)日：2012-10-18
申请号：US13445489
申请日：2012-04-12
IPC分类号： G03B21/14
CPC分类号： G02B27/102 , G03B21/2033 , G03B21/2073 , G03B33/12 , H04N9/3111 , H04N9/3161 , H04N9/3164
摘要： In a light source device, in each division of an image frame, two or more of the color lights X, Y and Z (e.g., red, green and blue) can be projected simultaneously. Each of the color lights X, Y and Z is divided into two in terms of time so that synthesized light of one group of division color lights enters a first spatial modulation element. Synthesized light of another group of division color lights enters a second spatial modulation element, whereby gradation of each color light in each of the first and second spatial modulation elements is controlled.
摘要翻译： 在光源装置中，在图像帧的每个分割中，可以同时投影两个或更多个彩色光X，Y和Z（例如，红色，绿色和蓝色）。 颜色光X，Y和Z中的每一个在时间上分为两个，使得一组分色光的合成光进入第一空间调制元件。 另一组划分色光的合成光进入第二空间调制元件，由此控制第一和第二空间调制元件中的每一个中的各色光的灰度。
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