公开(公告)号：US08253926B2

公开(公告)日：2012-08-28

申请号：US12565881

申请日：2009-09-24

申请人： Taku Sumitomo ,  Kiyoyuki Kabuki ,  Toshio Yokota

发明人： Taku Sumitomo ,  Kiyoyuki Kabuki ,  Toshio Yokota

IPC分类号： G03B27/72 ,  G03B27/54

CPC分类号： G03F7/70575 ,  G03F7/70033

摘要： An exposure device for producing semiconductors and liquid crystals has an optical system capable of effectively using light generated without making a hole in a lamp discharge vessel when high energy laser light is supplied to it for emitting light, such as ultraviolet light. The exposure device has a light source for emitting ultraviolet light, a laser device for emitting laser light, an elliptical reflector for reflecting ultraviolet light emitted from the light source, and an optical system for directing light reflected by the elliptical reflector to an article to be treated via optical elements including a collimator lens and an integrator lens, and a beam splitter having a wavelength selecting ability provided in the optical path for light reflected by the elliptical reflector to allow laser light to be incident on the light source from and opening side of the elliptical reflector.

摘要翻译： 用于生产半导体和液晶的曝光装置具有一种光学系统，当将高能量激光照射到紫外光等发光时，能够有效地利用在灯放电容器内不产生孔而产生的光。 曝光装置具有用于发射紫外光的光源，用于发射激光的激光装置，用于反射从光源发射的紫外光的椭圆反射器和用于将由椭圆形反射器反射的光引导到物品的光学系统 通过包括准直透镜和积分透镜的光学元件进行处理，以及在由光学反射器反射的光的光路中提供的具有波长选择能力的分束器，以允许激光入射到来自光源的光源 椭圆形反射镜。

公开(公告)号：US20100264820A1

公开(公告)日：2010-10-21

申请号：US12662352

申请日：2010-04-13

申请人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

发明人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

IPC分类号： H01J61/20 ,  H01J61/00

CPC分类号： H01J65/04 ,  H01J61/025 ,  H01J61/18

摘要： An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

摘要翻译： 激光驱动光源包括封装放电介质的灯泡，用于发射激光束的激光束单元，其中激光束聚焦在用于产生放电的灯泡中，以及设置在灯泡中的光束屏蔽元件 屏蔽通过在灯泡中产生的放电的激光束的外围设备。

公开(公告)号：US20100225232A1

公开(公告)日：2010-09-09

申请号：US12659323

申请日：2010-03-04

申请人： Taku Sumitomo ,  Toshio Yokota

发明人： Taku Sumitomo ,  Toshio Yokota

IPC分类号： H01J17/30

CPC分类号： H01J65/04 ,  G03F7/70016 ,  G03F7/70925

摘要： A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

摘要翻译： 一种点亮具有放电灯的光源装置，用于反射从放电灯发出的光的反射镜，用于用光照射工件的发光光学系统，用于发射激光的一个或多个激光振荡器的方法 放电灯和用于开始放电的放电启动单元。 该方法包括通过用来自第一激光振荡器的激光束照射放电容器来去除附着在放电灯内表面的沉积物，通过放电启动单元在放电容器中开始放电，并将来自第二激光器的激光束 振荡器，进入放电容器。

公开(公告)号：US08358069B2

公开(公告)日：2013-01-22

申请号：US12659323

申请日：2010-03-04

申请人： Taku Sumitomo ,  Toshio Yokota

发明人： Taku Sumitomo ,  Toshio Yokota

IPC分类号： H01J17/16 ,  H05G2/00 ,  H05B37/02

CPC分类号： H01J65/04 ,  G03F7/70016 ,  G03F7/70925

摘要： A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

摘要翻译： 一种点亮具有放电灯的光源装置，用于反射从放电灯发出的光的反射镜，用于用光照射工件的发光光学系统，用于发射激光的一个或多个激光振荡器的方法 放电灯和用于开始放电的放电启动单元。 该方法包括通过用来自第一激光振荡器的激光束照射放电容器来去除附着在放电灯内表面的沉积物，通过放电启动单元在放电容器中开始放电，并将来自第二激光器的激光束 振荡器，进入放电容器。

公开(公告)号：US08288947B2

公开(公告)日：2012-10-16

申请号：US12903713

申请日：2010-10-13

申请人： Toshio Yokota ,  Taku Sumitomo ,  Yukio Yasuda

发明人： Toshio Yokota ,  Taku Sumitomo ,  Yukio Yasuda

IPC分类号： H01J61/00 ,  G01J1/00 ,  G02B27/20

CPC分类号： H01J65/04 ,  H01J61/025

摘要： In a light source device provided with a light emission tube in which a light emitting element is enclosed and at least one laser oscillator part for radiating a laser beam towards said light emission tube, for focusing a beam within a light emission tube with a large solid angle and for preventing that the beam with a high energy density impinges upon the wall of the light emission tube, the light emission tube has a tube wall, part of which is made to function as a focusing means, or the light emission tube has a focusing means at the inner surface thereof.

摘要翻译： 在设置有发光元件被封闭的发光管的光源装置中，以及至少一个用于向所述发光管照射激光束的激光振荡器部分，用于将光束聚焦在具有大固体的发光管内 角度并且为了防止具有高能量密度的光束照射在发光管的壁上，发光管具有管壁，其一部分被用作聚焦装置，或者发光管具有 聚焦装置在其内表面。

公开(公告)号：US08242695B2

公开(公告)日：2012-08-14

申请号：US12662352

申请日：2010-04-13

申请人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

发明人： Taku Sumitomo ,  Yukio Yasuda ,  Toshio Yokota

IPC分类号： H01J17/20 ,  H01J17/30 ,  H05G2/00

CPC分类号： H01J65/04 ,  H01J61/025 ,  H01J61/18

摘要： An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.

摘要翻译： 激光驱动光源包括封装放电介质的灯泡，用于发射激光束的激光束单元，其中激光束聚焦在用于产生放电的灯泡中，以及设置在灯泡中的光束屏蔽元件 屏蔽通过在灯泡中产生的放电的激光束的外围设备。

公开(公告)号：US20110095683A1

公开(公告)日：2011-04-28

申请号：US12926067

申请日：2010-10-25

申请人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

发明人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

IPC分类号： H01J61/36 ,  H01J9/26

CPC分类号： H01J61/368 ,  H01J9/326 ,  H01J61/86

摘要： A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10−9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.

摘要翻译： 高压放电灯具有由玻璃和密封金属片制成的密封部分。 在制造高压放电灯的方法中，用脉冲宽度为1×10-9秒以下的激光束照射密封金属片，以进行密封金属片的表面处理。 密封金属片可以具有深度为120至600nm且宽度为450至1,200nm的凹槽。

公开(公告)号：US08648531B2

公开(公告)日：2014-02-11

申请号：US12926067

申请日：2010-10-25

申请人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

发明人： Toshio Yokota ,  Yukio Yasuda ,  Hiroyuki Daido ,  Hiromitsu Kiriyama ,  Hajime Okada ,  Masayuki Suzuki ,  Izuru Daito

IPC分类号： H01J17/18

CPC分类号： H01J61/368 ,  H01J9/326 ,  H01J61/86

摘要： A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10−9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.

摘要翻译： 高压放电灯具有由玻璃和密封金属片制成的密封部分。 在制造高压放电灯的方法中，用脉冲宽度为1×10-9秒以下的激光束照射密封金属片，以进行密封金属片的表面处理。 密封金属片可以具有深度为120至600nm且宽度为450至1,200nm的凹槽。

公开(公告)号：US06414784B1

公开(公告)日：2002-07-02

申请号：US09537714

申请日：2000-03-30

申请人： Yasu Oosako ,  Kyouichi Deki ,  Toshio Yokota ,  Naoki Kitatochi

发明人： Yasu Oosako ,  Kyouichi Deki ,  Toshio Yokota ,  Naoki Kitatochi

IPC分类号： G02F135

CPC分类号： G02F1/3501 ,  G02F2001/3505

摘要： To prevent beam fluctuation produced when a nonlinear optical crystal is maintained at a high temperature, a beam passage component is provided at the beam entrance and exit sides of the nonlinear optical crystal beam of the crystal support device, and the temperature at the end of the beam passage component away from the crystal is controlled to within a range of difference from ambient temperature at which the beam will be stable.

摘要翻译： 为了防止当非线性光学晶体保持在高温时产生的光束波动，在晶体支撑装置的非线性光学晶体束的光束入射和出射侧设置光束通过部件，并且在 离开晶体的光束通过分量被控制在与光束将稳定的环境温度的差的范围内。

公开(公告)号：US5785793A

公开(公告)日：1998-07-28

申请号：US866072

申请日：1997-05-30

申请人： Tetsuji Arai ,  Shouei Ebisawa ,  Toshio Yokota

发明人： Tetsuji Arai ,  Shouei Ebisawa ,  Toshio Yokota

IPC分类号： B01J19/12 ,  G11B7/26 ,  B32B31/28

CPC分类号： G11B7/26 ,  B01J19/123 ,  B29C65/1406 ,  B29C65/1435 ,  B29C65/1445 ,  B29C65/1467 ,  B29C65/4845 ,  B29C66/452 ,  B29C66/8181 ,  B29C66/91221 ,  B29C66/91411 ,  B29C66/9161 ,  B29C66/952 ,  B29C66/71 ,  B29L2017/005

摘要： To cement UV radiation-transmitting substrates to one another without deformation and within a short time, and to cement them together with high efficiency without an aluminum film of an information recording layer melting, according to the invention, a device for bonding discs to one another is provided having a radiant light source which irradiates the discs with radiant light which contains ultraviolet radiation at least once in a flash; a wavelength selector which is placed in the optical path between the radiant light source and the discs at a distance from the discs, which transmits the ultraviolet rays and absorbs light in a range of wavelengths which are absorbed by the UV radiation-transmitting substrates of the discs; a cooling device which admits and discharges cooling air between the radiant light source and the wavelength selector.

摘要翻译： 为了将紫外线辐射透射基板彼此不变形并且在短时间内相互粘合，并且根据本发明，高效率地将它们粘合在一起，而没有信息记录层熔融的铝膜，用于将光盘彼此粘合的装置 设置有辐射光源，其用闪光灯至少一次地包含紫外线辐射的辐射光照射盘; 波长选择器，放置在辐射光源和光盘之间距离光盘一定距离处的光路中，透射紫外线并吸收由紫外线辐射透射基板吸收的波长范围内的光 圆盘 在辐射光源和波长选择器之间允许和排出冷却空气的冷却装置。