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公开(公告)号：US08016585B2
公开(公告)日：2011-09-13
申请号：US12270376
申请日：2008-11-13
申请人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
发明人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
CPC分类号： B29C35/0888 , B29C33/424 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper includes a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material. The support member is larger in size than the intermediate layer and the patterned resin layer. The intermediate layer is more flexible than the patterned resin layer. Also, the patterned resin layer has a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.
摘要翻译： 提供了一种用于基于光学转印的纳米结构转印装置并且能够自动输送和对准的树脂压模。 树脂压模包括由透光材料制成并具有机械强度的支撑构件，也由透光材料制成的中间层以及也由透光材料制成的图案化树脂层。 支撑构件的尺寸大于中间层和图案化树脂层。 中间层比图案化树脂层更柔软。 此外，图案化树脂层具有形成在模具中的高低区域图案的表面的高低区域的图案。
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12.发明申请公开(公告)号：US20100155989A1
公开(公告)日：2010-06-24
申请号：US12635730
申请日：2009-12-11
CPC分类号： B29C59/022 , B29C35/02 , B29C35/0888 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.
摘要翻译： 本发明的目的是提供一种用于转印精细图案的压模和用于制造压模的方法，压模具有精细的结构层，以提高树脂压模的连续转印性能，并允许精确和连续的转印。 为了实现上述目的，本发明提供一种用于转印精细图案的压模，包括：支撑基板上的精细结构层，其中精细结构层是主成分为倍半硅氧烷衍生物的树脂化合物的聚合物， 多个聚合性官能团。
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公开(公告)号：US20100104682A1
公开(公告)日：2010-04-29
申请号：US12359402
申请日：2009-01-26
申请人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
发明人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
IPC分类号： B29C35/08
CPC分类号： G11B5/855
摘要： An optical imprinting device capable of simultaneously imprinting fine patterns to both surfaces of an opaque substrate is provided. The imprinting device includes a stamper having a fine pattern on its surface to imprint the fine pattern onto a surface of an object to be imprinted by pressing the stamper against the object composed of a substrate and a photo-curing resin layer formed on the substrate. The imprinting device further includes a light source for applying light to the photo-curing resin layer of the object when imprinting the fine pattern of the stamper onto the photo-curing resin layer of the object. The light source applies light to the stamper at a predetermined incident angle to the surface of the stamper.
摘要翻译： 提供了能够同时将精细图案压印到不透明基板的两个表面的光学压印装置。 压印装置包括在其表面上具有精细图案的压模，通过将压模压在由基板构成的物体和形成在基板上的光固化树脂层的物体上，将精细图案印刷到待印刷对象的表面上。 压印装置还包括将压模的精细图案压印到物体的光固化树脂层上时将光施加到物体的光固化树脂层的光源。 光源以与预压件表面成预定入射角的方式将光施加于压模。
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公开(公告)号：US20100098799A1
公开(公告)日：2010-04-22
申请号：US12582732
申请日：2009-10-21
CPC分类号： B29C59/022 , B29C2035/0827 , B29C2059/023
摘要： An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
摘要翻译： 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案，在与形成凹凸面的面相反的微细图案层的表面上的树脂层，树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量，第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
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公开(公告)号：US5014143A
公开(公告)日：1991-05-07
申请号：US500454
申请日：1990-03-28
申请人： Kyoichi Mori , Kuniaki Toda , Nobuyuki Iizuka , Tsutomu Hongo , Tsutomu Nakadai
发明人： Kyoichi Mori , Kuniaki Toda , Nobuyuki Iizuka , Tsutomu Hongo , Tsutomu Nakadai
IPC分类号： G11B17/028
CPC分类号： G11B17/0282
摘要： A disk chuck mechanism for chucking a disk in a stepped-down portion of a rotary chuck member and releasing the disk by vertically moving a chuck head coupled to an operating shaft is disclosed wherein a ring member having a cut in part is provided for its diameter to be enlarged opposite to the stepped-down portion of the rotary chuck member for chucking the disk and biased in the direction in which its diameter contracts. The chuck head is moved in the axial direction to utilize an inclined side face of the chuck head to enlarge the diameter of the ring member. With this arrangement, it is ensured that the disk is chucked in between the stepped-down portion of the rotary chuck member and the ring member with the one stroke movement of the chuck head.
摘要翻译： 公开了一种用于将旋转卡盘部件的下降部分中的盘卡住并且通过垂直移动联接到操作轴的卡盘头来释放盘的盘卡盘机构，其中，为了使其直径 与旋转卡盘构件的落下部相对放大，用于夹紧盘并沿其直径收缩的方向偏置。 卡盘头沿轴向移动以利用卡盘头的倾斜侧面来增大环件的直径。 通过这种布置，通过卡盘头的一次行程确保盘被卡在旋转卡盘构件的降压部分和环形构件之间。
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公开(公告)号：US08770965B2
公开(公告)日：2014-07-08
申请号：US13370413
申请日：2012-02-10
IPC分类号： B29C35/08
CPC分类号： G03F7/0002 , B29C33/3878 , B82Y10/00 , B82Y40/00
摘要： A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
摘要翻译： 微结构转印装置的特征在于，该装置包括由用第一波长的光固化的第一光固化树脂组合物制成的压模和发射长于第一波长的第二波长的光的光源。 将微结构转移到提供有第二光固化树脂组合物的印模受体中，该第二光固化树脂组合物可用由光源发出的第二波长的光固化。
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17.发明授权公开(公告)号：US08690559B2
公开(公告)日：2014-04-08
申请号：US13193666
申请日：2011-07-29
IPC分类号： B29C43/56
CPC分类号： B29C33/3857 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F7/038 , G03F7/0757
摘要： The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.
摘要翻译： 本发明提供了一种纳米压印树脂压模，其包括在透射支撑基底材料上的微结构层，该微结构层由含有倍半硅氧烷衍生物作为主要成分的树脂组合物的聚合物形成，该主体组分具有多个聚合性官能团 基团，具有多个可聚合官能团且不同于倍半硅氧烷衍生物的可聚合树脂组分和可光聚合引发剂，其中可光聚合引发剂的含量百分比等于或大于0.3质量％且等于或小于3 相对于倍半硅氧烷衍生物和可聚合树脂组分的总质量的质量％，并且微结构层允许等于或大于80％的光在365nm的波长下通过。
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18.发明授权公开(公告)号：US08603380B2
公开(公告)日：2013-12-10
申请号：US13603455
申请日：2012-09-05
IPC分类号： B29C35/00
CPC分类号： B29C59/022 , B29C35/02 , B29C35/0888 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.
摘要翻译： 本发明的目的是提供一种用于转印精细图案的压模和用于制造压模的方法，压模具有精细的结构层，以提高树脂压模的连续转印性能，并允许精确和连续的转印。 为了实现上述目的，本发明提供了一种用于转印精细图案的压模，包括：支撑基板上的精细结构层，其中精细结构层是主成分为倍半硅氧烷衍生物的树脂化合物的聚合物， 多个聚合性官能团。
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19.发明申请MICROFINE STRUCTURE, METHOD FOR PRODUCING MICROFINE STRUCTURE, AND POLYMERIZABLE RESIN COMPOSITION FOR PRODUCING THE SAME 审中-公开微晶结构，微晶纤维结构体的制造方法及其制造方法的聚合性树脂组合物公开(公告)号：US20130011632A1
公开(公告)日：2013-01-10
申请号：US13519589
申请日：2010-12-22
申请人： Masahiko Ogino , Susumu Komoriya , Akihiro Miyauchi , Ryuta Washiya , Kyoichi Mori , Noritake Shizawa
发明人： Masahiko Ogino , Susumu Komoriya , Akihiro Miyauchi , Ryuta Washiya , Kyoichi Mori , Noritake Shizawa
CPC分类号： C08F283/02 , B82Y10/00 , B82Y40/00 , C09D4/06 , G03F7/0002 , G03F7/027 , G03F7/038 , G03F7/0388 , Y10T428/24802 , C08F220/30 , C08F220/40 , C08F222/1006
摘要： Provided is a method for producing a microfine structure comprising the steps of: forming a resin film by applying a liquid polymerizable resin composition containing a high molecular weight component, a low molecular weight component and a reactive dilution component to an adhesion promoting layer formed on a substrate; imprinting a mold with an extremely fine convex concave pattern onto the resin film; and transferring the convex concave pattern to the resin film. Herein, components of the adhesion promoting layer, the high molecular weight component, the low molecular weight component and the reactive dilution component respectively have cross-linking reactive functional groups which react with each other.
摘要翻译： 提供一种微细结构体的制造方法，其特征在于，包括以下工序：通过将含有高分子量成分，低分子量成分和反应性稀释成分的液体聚合性树脂组合物涂布在形成于 基质; 将具有非常细的凸凹图案的模具印刷到树脂膜上; 并将凸凹图案转印到树脂膜上。 这里，粘合促进层，高分子量组分，低分子量组分和反应性稀释组分的组分分别具有彼此反应的交联反应性官能团。
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20.发明申请NANO-IMPRINTING RESIN STAMPER AND NANO-IMPRINTING APPARATUS USING THE SAME 失效NANO印花树脂印刷机和使用其的纳米印刷装置公开(公告)号：US20120027884A1
公开(公告)日：2012-02-02
申请号：US13193666
申请日：2011-07-29
CPC分类号： B29C33/3857 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F7/038 , G03F7/0757
摘要： The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.
摘要翻译： 本发明提供了一种纳米压印树脂压模，其包括在透射支撑基底材料上的微结构层，该微结构层由含有倍半硅氧烷衍生物作为主要成分的树脂组合物的聚合物形成，该主体组分具有多个聚合性官能团 基团，具有多个可聚合官能团且不同于倍半硅氧烷衍生物的可聚合树脂组分和可光聚合引发剂，其中可光聚合引发剂的含量百分比等于或大于0.3质量％且等于或小于3 相对于倍半硅氧烷衍生物和可聚合树脂组分的总质量的质量％，并且微结构层允许等于或大于80％的光在365nm的波长下通过。
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