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公开(公告)号：US08016585B2
公开(公告)日：2011-09-13
申请号：US12270376
申请日：2008-11-13
申请人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
发明人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
CPC分类号： B29C35/0888 , B29C33/424 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper includes a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material. The support member is larger in size than the intermediate layer and the patterned resin layer. The intermediate layer is more flexible than the patterned resin layer. Also, the patterned resin layer has a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.
摘要翻译： 提供了一种用于基于光学转印的纳米结构转印装置并且能够自动输送和对准的树脂压模。 树脂压模包括由透光材料制成并具有机械强度的支撑构件，也由透光材料制成的中间层以及也由透光材料制成的图案化树脂层。 支撑构件的尺寸大于中间层和图案化树脂层。 中间层比图案化树脂层更柔软。 此外，图案化树脂层具有形成在模具中的高低区域图案的表面的高低区域的图案。
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公开(公告)号：US20090123590A1
公开(公告)日：2009-05-14
申请号：US12270376
申请日：2008-11-13
申请人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
发明人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
IPC分类号： B29C35/08
CPC分类号： B29C35/0888 , B29C33/424 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper comprises a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material, the support member being larger in size than the intermediate layer and the patterned resin layer, the intermediate layer being more flexible than the patterned resin layer, and the patterned resin layer having a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.
摘要翻译： 提供了一种用于基于光学转印的纳米结构转印装置并且能够自动输送和对准的树脂压模。 树脂压模包括由透光材料制成并具有机械强度的支撑构件，也由透光材料制成的中间层，以及也由透光材料制成的图案化树脂层，支撑构件 尺寸比中间层和图案化树脂层，中间层比图案化树脂层更具柔性，并且图案化树脂层具有形成在其表面上的高和低区域的图案，其是高图案的图案 和模具中的低面积。
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3.发明授权Nanoimprint stamper and a fine-structure transfer apparatus using the stamper 有权纳米压印模和使用压模的精细结构转印装置公开(公告)号：US08096802B2
公开(公告)日：2012-01-17
申请号：US12534232
申请日：2009-08-03
申请人： Kyoichi Mori , Noritake Shizawa , Susumu Komoriya , Akihiro Miyauchi , Takashi Ando , Tetsuhiro Hatogai
发明人： Kyoichi Mori , Noritake Shizawa , Susumu Komoriya , Akihiro Miyauchi , Takashi Ando , Tetsuhiro Hatogai
CPC分类号： B29C35/0888 , B29C33/0088 , B29C33/20 , B29C33/30 , B29C33/305 , B29C43/003 , B29C43/021 , B29C43/10 , B29C43/36 , B29C2035/0827 , B29C2043/025 , B29C2043/3634 , B29C2043/3652 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A nanoimprint stamper can simultaneously conform to two types of anomaly in the shape of a transfer substrate, for example warpage and surface protrusions (including foreign objects) that differ greatly in the wavelength of variation. The nanoimprint stamper is capable of performing transfer with a smaller number of defects and in a uniform way. The nanoimprint stamper includes a light-transmitting rigid substrate, a light-transmitting resilient plate, a light-trarsmitting and flexible rigid stamper base, a light-transmitting stamper buffer layer, and a light-transmitting patterned stamp layer. The stamper buffer layer has a lower Young's modulus than the patterned stamp layer.
摘要翻译： 纳米压印模具可以同时符合转印基板形状的两种异常，例如在变化波长上差别很大的翘曲和表面突起（包括异物）。 纳米压印压模能够以较少数量的缺陷和均匀的方式进行转印。 纳米压印压模包括透光刚性基板，透光弹性板，光束和柔性刚性压模基座，透光压模缓冲层和透光图案印刷层。 压模缓冲层具有比图案化的印模层更低的杨氏模量。
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公开(公告)号：US20100104682A1
公开(公告)日：2010-04-29
申请号：US12359402
申请日：2009-01-26
申请人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
发明人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
IPC分类号： B29C35/08
CPC分类号： G11B5/855
摘要： An optical imprinting device capable of simultaneously imprinting fine patterns to both surfaces of an opaque substrate is provided. The imprinting device includes a stamper having a fine pattern on its surface to imprint the fine pattern onto a surface of an object to be imprinted by pressing the stamper against the object composed of a substrate and a photo-curing resin layer formed on the substrate. The imprinting device further includes a light source for applying light to the photo-curing resin layer of the object when imprinting the fine pattern of the stamper onto the photo-curing resin layer of the object. The light source applies light to the stamper at a predetermined incident angle to the surface of the stamper.
摘要翻译： 提供了能够同时将精细图案压印到不透明基板的两个表面的光学压印装置。 压印装置包括在其表面上具有精细图案的压模，通过将压模压在由基板构成的物体和形成在基板上的光固化树脂层的物体上，将精细图案印刷到待印刷对象的表面上。 压印装置还包括将压模的精细图案压印到物体的光固化树脂层上时将光施加到物体的光固化树脂层的光源。 光源以与预压件表面成预定入射角的方式将光施加于压模。
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公开(公告)号：US08092209B2
公开(公告)日：2012-01-10
申请号：US12359402
申请日：2009-01-26
申请人： Takashi Ando , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
发明人： Takashi Ando , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
CPC分类号： G11B5/855
摘要： An optical imprinting device capable of simultaneously imprinting fine patterns to both surfaces of an opaque substrate is provided. The imprinting device includes a stamper having a fine pattern on its surface to imprint the fine pattern onto a surface of an object to be imprinted by pressing the stamper against the object composed of a substrate and a photo-curing resin layer formed on the substrate. The imprinting device further includes a light source for applying light to the photo-curing resin layer of the object when imprinting the fine pattern of the stamper onto the photo-curing resin layer of the object. The light source applies light to the stamper at a predetermined incident angle to the surface of the stamper.
摘要翻译： 提供了能够同时将精细图案压印到不透明基板的两个表面的光学压印装置。 压印装置包括在其表面上具有精细图案的压模，通过将压模压在由基板构成的物体和形成在基板上的光固化树脂层的物体上，将精细图案印刷到待印刷对象的表面上。 压印装置还包括将压模的精细图案压印到物体的光固化树脂层上时将光施加到物体的光固化树脂层的光源。 光源以与预压件表面成预定入射角的方式将光施加于压模。
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6.发明申请MICROFINE STRUCTURE, METHOD FOR PRODUCING MICROFINE STRUCTURE, AND POLYMERIZABLE RESIN COMPOSITION FOR PRODUCING THE SAME 审中-公开微晶结构，微晶纤维结构体的制造方法及其制造方法的聚合性树脂组合物公开(公告)号：US20130011632A1
公开(公告)日：2013-01-10
申请号：US13519589
申请日：2010-12-22
申请人： Masahiko Ogino , Susumu Komoriya , Akihiro Miyauchi , Ryuta Washiya , Kyoichi Mori , Noritake Shizawa
发明人： Masahiko Ogino , Susumu Komoriya , Akihiro Miyauchi , Ryuta Washiya , Kyoichi Mori , Noritake Shizawa
CPC分类号： C08F283/02 , B82Y10/00 , B82Y40/00 , C09D4/06 , G03F7/0002 , G03F7/027 , G03F7/038 , G03F7/0388 , Y10T428/24802 , C08F220/30 , C08F220/40 , C08F222/1006
摘要： Provided is a method for producing a microfine structure comprising the steps of: forming a resin film by applying a liquid polymerizable resin composition containing a high molecular weight component, a low molecular weight component and a reactive dilution component to an adhesion promoting layer formed on a substrate; imprinting a mold with an extremely fine convex concave pattern onto the resin film; and transferring the convex concave pattern to the resin film. Herein, components of the adhesion promoting layer, the high molecular weight component, the low molecular weight component and the reactive dilution component respectively have cross-linking reactive functional groups which react with each other.
摘要翻译： 提供一种微细结构体的制造方法，其特征在于，包括以下工序：通过将含有高分子量成分，低分子量成分和反应性稀释成分的液体聚合性树脂组合物涂布在形成于 基质; 将具有非常细的凸凹图案的模具印刷到树脂膜上; 并将凸凹图案转印到树脂膜上。 这里，粘合促进层，高分子量组分，低分子量组分和反应性稀释组分的组分分别具有彼此反应的交联反应性官能团。
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公开(公告)号：US08535035B2
公开(公告)日：2013-09-17
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/00
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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公开(公告)号：US08333915B2
公开(公告)日：2012-12-18
申请号：US13238735
申请日：2011-09-21
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.
摘要翻译： 精细结构转印方法，其中形成在压模的两个表面中的一个上的精细图案被压在转印元件的两个表面之一上的抗蚀剂涂层上，以便转印精细图案 到抗蚀剂涂层，其中压模和转印元件之间的空间中的气氛被压模抵抗转印元件之前的抗蚀剂的蒸汽所代替。
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公开(公告)号：US08096800B2
公开(公告)日：2012-01-17
申请号：US12711377
申请日：2010-02-24
IPC分类号： A01J21/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.
摘要翻译： 精细结构转印装置包括压模，放置具有抗蚀剂涂层的转印元件的台和用于加热待蒸发的抗蚀剂涂层的装置或用于将抗蚀剂的蒸气供应到第一和第 压模和转印元件。
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公开(公告)号：US20100303947A1
公开(公告)日：2010-12-02
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/02
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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