Method for manufacturing thin film solar cell
    20.
    发明授权
    Method for manufacturing thin film solar cell 有权
    制造薄膜太阳能电池的方法

    公开(公告)号:US08691616B2

    公开(公告)日:2014-04-08

    申请号:US13671289

    申请日:2012-11-07

    Abstract: A method for manufacturing a thin film solar cell includes depositing a front electrode on a substrate in a chamber, etching the front electrode formed on the substrate to form an uneven portion on the surface of the front electrode, forming a photoelectric conversion unit on the front electrode, and forming a back electrode on the photoelectric conversion unit. The depositing of the front electrode includes depositing the front electrode while reducing a process pressure of the chamber from a first pressure to a second pressure lower than the first pressure. The etching of the front electrode form the uneven portion of the front electrode so that a top portion of the uneven portion includes a portion formed at the second pressure.

    Abstract translation: 一种薄膜太阳能电池的制造方法,其特征在于,在前述电极的基板的表面上形成前面的电极,在前述电极的表面形成凹凸部, 电极,并在光电转换单元上形成背电极。 前电极的沉积包括沉积前电极,同时将室的处理压力从第一压力降低到低于第一压力的第二压力。 前电极的蚀刻形成前电极的不平坦部分,使得不平坦部分的顶部包括形成在第二压力下的部分。

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