公开(公告)号：US20150083203A1

公开(公告)日：2015-03-26

申请号：US14394642

申请日：2013-04-02

Applicant: LG ELECTRONICS INC.

Inventor： Soohyun Kim ,  Hongcheol Lee ,  Jinwon Chung ,  Sehwon Ahn

IPC: H01L31/0368 ,  H01L31/077 ,  H01L31/0376

CPC classification number: H01L31/03685 ,  H01L31/0376 ,  H01L31/03762 ,  H01L31/076 ,  H01L31/077 ,  Y02E10/545 ,  Y02E10/548

Abstract: A thin film solar cell includes a substrate, a first electrode and a second electrode positioned on one surface of the substrate, and a photoelectric conversion unit positioned between the first electrode and the second electrode. The photoelectric conversion unit includes a plurality of photoelectric conversion layers each including a p-type semiconductor layer, an i-type semiconductor layer, and an n-type semiconductor layer. At least one of the p-type semiconductor layers of the plurality of photoelectric conversion layers contains microcrystalline silicon (mc-Si) and amorphous silicon oxide (a-SiOx).

Abstract translation: 薄膜太阳能电池包括位于基板的一个表面上的基板，第一电极和第二电极以及位于第一电极和第二电极之间的光电转换单元。 光电转换单元包括多个光电转换层，每个光电转换层包括p型半导体层，i型半导体层和n型半导体层。 多个光电转换层中的至少一个p型半导体层含有微晶硅（mc-Si）和非晶氧化硅（a-SiOx）。

公开(公告)号：US08691616B2

公开(公告)日：2014-04-08

申请号：US13671289

申请日：2012-11-07

Applicant: LG Electronics Inc.

Inventor： Soohyun Kim ,  Hyun Lee ,  Jinwon Chung ,  Sehwon Ahn

IPC: H01L21/00 ,  H01L21/44

CPC classification number: H01L31/022466 ,  H01L31/022483 ,  H01L31/02366 ,  H01L31/1884 ,  Y02E10/50

Abstract: A method for manufacturing a thin film solar cell includes depositing a front electrode on a substrate in a chamber, etching the front electrode formed on the substrate to form an uneven portion on the surface of the front electrode, forming a photoelectric conversion unit on the front electrode, and forming a back electrode on the photoelectric conversion unit. The depositing of the front electrode includes depositing the front electrode while reducing a process pressure of the chamber from a first pressure to a second pressure lower than the first pressure. The etching of the front electrode form the uneven portion of the front electrode so that a top portion of the uneven portion includes a portion formed at the second pressure.

Abstract translation: 一种薄膜太阳能电池的制造方法，其特征在于，在前述电极的基板的表面上形成前面的电极，在前述电极的表面形成凹凸部， 电极，并在光电转换单元上形成背电极。 前电极的沉积包括沉积前电极，同时将室的处理压力从第一压力降低到低于第一压力的第二压力。 前电极的蚀刻形成前电极的不平坦部分，使得不平坦部分的顶部包括形成在第二压力下的部分。