公开(公告)号：US20220139747A1

公开(公告)日：2022-05-05

申请号：US17579289

申请日：2022-01-19

Applicant: LG ELECTRONICS INC.

Inventor： Inbum YANG ,  Junghun RHO ,  Imdeok JUNG ,  Bongwoon CHOI

IPC: H01L21/677 ,  H01L25/075 ,  H01L33/00

Abstract: Discussed is a device for self-assembling semiconductor light-emitting diodes, the device including an assembly chamber having a space for accommodating a fluid; and a substrate chuck having a substrate support part configured to support a substrate, and a vertical moving part for lowering the substrate so that one surface of the substrate is in contact with the fluid in a state in which the substrate is supported by the substrate support part.

公开(公告)号：US20210090928A1

公开(公告)日：2021-03-25

申请号：US16818222

申请日：2020-03-13

Applicant: LG ELECTRONICS INC.

Inventor： Inbum YANG ,  Junghun RHO ,  Imdeok JUNG ,  Bongwoon CHOI

IPC: H01L21/68 ,  H01L33/00 ,  H01L25/075 ,  H01L21/677

Abstract: Discussed is a substrate chuck including: a substrate support part for supporting a substrate having an assembly electrode; a vertical moving part which moves the substrate so that one surface of the substrate comes in contact with a fluid in a state in which the substrate is supported by the substrate support; an electrode connection part for applying power to the assembly electrode to generate an electric field so that semiconductor light-emitting diodes are placed at the predetermined positions of the substrate in a process of moving the semiconductor light-emitting diodes by a position change of at least one magnet; and a rotating part for rotating the substrate support part around a rotating shaft so that the substrate is placed in an upward or downward direction, wherein the rotating shaft is spaced apart from a center of the substrate support part at a predetermined distance.

公开(公告)号：US20210090925A1

公开(公告)日：2021-03-25

申请号：US16818469

申请日：2020-03-13

Applicant: LG ELECTRONICS INC.

Inventor： Inbum YANG ,  Sangsik JUNG ,  Imdeok JUNG ,  Bongwoon CHOI

IPC: H01L21/677 ,  H01L33/00 ,  H01L25/075

Abstract: Discussed is a device for self-assembling semiconductor light-emitting diodes, in which the device includes an assembly chamber having a space for accommodating a fluid; a magnetic field forming part having at least one magnet for applying a magnetic force to the semiconductor light-emitting diodes dispersed in the fluid and a moving part for changing positions of the at least one magnet so that the semiconductor light-emitting diodes move in the fluid; a substrate chuck having a substrate support part configured to support a substrate, and a vertical moving part for lowering the substrate so that one surface of the substrate is in contact with the fluid in a state in which the substrate is supported by the substrate support part; and a controller for controlling a movement of the magnetic field forming part and the substrate chuck, wherein the controller controls a depth at which the substrate is submerged in the fluid based on a degree of warping of the substrate.

公开(公告)号：US20210090916A1

公开(公告)日：2021-03-25

申请号：US16842347

申请日：2020-04-07

Applicant: LG ELECTRONICS INC.

Inventor： Inbum YANG ,  Junghun RHO ,  Imdeok JUNG ,  Bongwoon CHOI

IPC: H01L21/67 ,  H01L21/683 ,  H01L25/075

Abstract: Discussed is a device for self-assembling semiconductor light-emitting diodes includes a substrate chuck that is provided in an assembly chamber and supports a substrate and disposes the substrate at an assembly position, wherein the substrate chuck sucks or injects a gas present between the substrate and a fluid during loading and unloading of the substrate.

公开(公告)号：US20210090909A1

公开(公告)日：2021-03-25

申请号：US16842323

申请日：2020-04-07

Applicant: LG ELECTRONICS INC.

Inventor： Inbum YANG ,  Junghun RHO ,  Imdeok JUNG ,  Bongwoon CHOI

IPC: H01L21/67 ,  H01L25/075 ,  H01L21/68

Abstract: Discussed is a device for self-assembling semiconductor light-emitting including: a chip supply part to supply the semiconductor light-emitting diodes to the substrate in cooperation with magnets disposed in a plurality of rows to form the magnetic field, wherein the chip supply part includes: a chip accommodating part to accommodate the semiconductor light-emitting diodes; a vertical moving part to adjust a distance between the chip supply part and the magnets; a horizontal moving part to move the chip supply part such that the chip accommodating part is alternately overlapped with a part of the magnets; and a controller to drive the vertical and horizontal moving parts to control a position of the chip supply part, and the controller moves the chip supply part in at least one of a horizontal direction and a vertical direction at a predetermined path and a plurality of points existing on the predetermined path.