公开(公告)号：US20140065757A1

公开(公告)日：2014-03-06

申请号：US13890931

申请日：2013-05-09

Applicant: LG Electronics Inc.

Inventor： Mann YI ,  Jeonghyo KWON ,  Seongeun LEE ,  Taeyoung KWON

IPC: H01L31/0236

CPC classification number: H01L31/0236 ,  H01L21/02054 ,  H01L31/02167 ,  H01L31/02168 ,  H01L31/02363 ,  H01L31/068 ,  Y02E10/52 ,  Y02E10/547

Abstract: A method for manufacturing a solar cell includes performing a dry etching process to form a textured surface including a plurality of minute protrusions on a first surface of a semiconductor substrate, performing a first cleansing process for removing damaged portions of surfaces of the minute protrusions using a basic chemical and removing impurities adsorbed on the surfaces of the minute protrusions, performing a second cleansing process for removing impurities remaining or again adsorbed on the surfaces of the minute protrusions using an acid chemical after performing the first cleansing process, and forming an emitter region at the first surface of the semiconductor substrate.

Abstract translation: 一种制造太阳能电池的方法包括：在半导体衬底的第一表面上进行干蚀刻工艺以形成包括多个微小突起的纹理化表面，使用第一清洁工艺去除微小突起的损伤部分， 基本化学和去除吸附在微小突起表面上的杂质，进行第二次清洁处理，以在第一次清洁处理之后，使用酸性化学品除去残留或再次吸附在微小突起的表面上的杂质，以及形成发射极区域 半导体衬底的第一表面。