公开(公告)号：US07718964B2

公开(公告)日：2010-05-18

申请号：US12066388

申请日：2006-09-25

Applicant: Laurent Frey

Inventor： Laurent Frey

IPC: H01L27/18

CPC classification number: G01J1/42 ,  G01J1/02 ,  G01J1/0209 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0477

Abstract: A high time-resolution ultrasensitive optical detector, using a planar waveguide leakage mode, and methods for making the detector. The detector includes a stacking with a dielectric substrate, a detection element, first and second dielectric layers, and a dielectric superstrate configured to send photon(s) into the light guide formed by the first layer. The thicknesses of the layers is chosen to enable a resonant coupling between the photon(s) and a leakage mode of the guide, the stacking having an absorption resonance linked to the leakage mode for a given polarization of the photon(s).

Abstract translation: 使用平面波导泄漏模式的高分辨率超灵敏光学检测器和用于制造检测器的方法。 检测器包括具有电介质基板，检测元件，第一和第二电介质层以及被配置为将光子发送到由第一层形成的光导中的介电顶板的堆叠。 选择层的厚度以实现光子与引导件的泄漏模式之间的谐振耦合，所述堆叠具有与光子的给定极化的泄漏模式相关联的吸收共振。

公开(公告)号：US20090020701A1

公开(公告)日：2009-01-22

申请号：US11861876

申请日：2007-09-26

Applicant: Laurent Frey

Inventor： Laurent Frey

IPC: H01L39/00

CPC classification number: G01J1/42 ,  G01J1/02 ,  G01J1/0209 ,  G01J1/04 ,  G01J1/0407

Abstract: This detector is intended to detect at least one photon and comprises a dielectric substrate (30), of index nO; a detecting element (32) forming a serpentine, placed on the substrate and generating a signal using the energy of the photon(s); a dielectric grating, formed of lines of index nH, alternating with lines of index nB, avec nH>nO and nH>nB, the grating being placed above the detecting element, the set grating-element presenting a resonant absorption in a given incidence and for a given polarisation; and a superstratum (40) having a refractive index ni, this superstratum being placed above the one-dimensional dielectric grating, nH being furthermore greater than ni.

Abstract translation: 该检测器旨在检测至少一个光子并且包括指数为n0的电介质基板（30）; 形成蛇形的检测元件（32），放置在基板上并使用光子的能量产生信号; 由折射率nH的线形成的介质光栅，与索引nB，avec nH> nO和nH> nB的线交替，光栅放置在检测元件的上方，所设置的光栅元件在给定的入射下呈现谐振吸收， 对于给定的极化; 和具有折射率为ni的上层（40），该超层位于一维介质光栅上方，nH还大于ni。

公开(公告)号：US20080272302A1

公开(公告)日：2008-11-06

申请号：US11911667

申请日：2006-04-21

Applicant: Laurent Frey ,  Jean-Claude Villegier

Inventor： Laurent Frey ,  Jean-Claude Villegier

IPC: G01J1/04

CPC classification number: G01J1/42 ,  B82Y20/00 ,  G01J1/0209 ,  G02B6/1226 ,  G02B6/30 ,  G02B2006/12107

Abstract: An ultra-sensitive optical detector with large time resolution, using a surface plasmon. The optical detector is configured to detect at least one photon, and including a dielectric substrate, and on the substrate, at least one bolometric detection component, that generates an electrical signal from the energy of received photon(s). Additionally, at least one coupling component is formed on the substrate, distinct from the detection component and including a metal component, and generates a surface plasmon by interaction with the photon(s) and guiding the plasmon right up to the detection component, which then absorbs the energy of the surface plasmon.

Abstract translation: 使用表面等离子体激光器，具有较大时间分辨率的超灵敏光学检测器。 光学检测器被配置为检测至少一个光子，并且包括电介质基板，并且在基板上，至少一个测温检测部件，其从所接收的光子的能量产生电信号。 此外，至少一个耦合部件形成在衬底上，不同于检测部件并且包括金属部件，并且通过与光子的相互作用并且将等离子体激元引导到检测部件来产生表面等离子体激元， 吸收表面等离子体的能量。

公开(公告)号：US20080197285A1

公开(公告)日：2008-08-21

申请号：US11915946

申请日：2006-06-06

Applicant: Laurent Frey ,  Jean-Claude Villegier

Inventor： Laurent Frey ,  Jean-Claude Villegier

IPC: H01L39/00

CPC classification number: G01J1/42 ,  B82Y20/00 ,  G01J1/02 ,  G01J1/0209 ,  G02B6/1223 ,  G02B6/305 ,  G02B6/4206

Abstract: Ultrasensitive optical detector with high resolution in time, using a waveguide, and processes for manufacturing this detectorThis detector, designed to detect at least one photon, comprises a dielectric substrate (2) and at least one detection element on this substrate, designed to generate an electrical signal starting from the energy of the photon(s) received, and a guide element to guide this or these photons the energy of which is then absorbed by the detection element (4) at an absorption zone which is less than 100 nm thick. The detection element is substantially straight on the substrate and is short, and the guide element comprises a single mode light waveguide with strong confinement (6), placed on the detection element. The invention is applicable particularly to detection and localisation of operating defects in a semiconducting circuit.

Abstract translation: 使用波导的高分辨率的超灵敏光学检测器和用于制造该检测器的工艺该设计用于检测至少一个光子的检测器包括电介质基板（2）和该基板上的至少一个检测元件，设计成产生 从所接收的光子的能量开始的电信号和引导元件，以引导这个或这些光子，其能量然后在小于100nm厚的吸收区被检测元件（4）吸收 。 检测元件在基板上基本上是直的，并且是短的，并且引导元件包括放置在检测元件上的具有强限制（6）的单模光波导。 本发明特别适用于半导体电路中的工作缺陷的检测和定位。