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公开(公告)号：US12007555B2
公开(公告)日：2024-06-11
申请号：US16948051
申请日：2020-08-28
发明人： Wenlin Jin , Maziar Moradi , Gonzalo Wills , Stephen Bagnald
CPC分类号： G02B26/0841 , B81B3/0045 , G01S7/4817 , H02N1/008 , B81B2201/033 , B81B2201/042 , B81B2203/0154 , B81B2203/0307
摘要： A micro-electro-mechanical system (MEMS) device may comprise a first layer that includes a stator comb actuator; a second layer that includes a rotor comb actuator; a mirror structure that includes a mirror; and a first set of hinges and a second set of hinges configured to tilt the mirror structure about a first axis of the MEMS device based on a driving torque caused by the stator comb actuator engaging with the rotor comb actuator. The first set of hinges may be configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator. The second set of hinges may be configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.
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12.发明授权公开(公告)号：US11949351B2
公开(公告)日：2024-04-02
申请号：US16913907
申请日：2020-06-26
发明人： Wenlin Jin , Gonzalo Wills
摘要： A linear comb drive may include a stator. The linear comb drive may include a rotor. At least one of the stator or the rotor may include a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.
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公开(公告)号：US11906852B2
公开(公告)日：2024-02-20
申请号：US17810080
申请日：2022-06-30
发明人： Edward Wang , Wenlin Jin , Chi-li-ma Harnold
IPC分类号： G02F1/1339 , G02F1/1362 , G02F1/1343 , G02F1/1337
CPC分类号： G02F1/13392 , G02F1/1337 , G02F1/134309 , G02F1/136277 , G02F2202/16 , G02F2202/28 , G02F2202/36
摘要： In some implementations, a liquid crystal on silicon panel includes a backplane with an electrical contact formed on the backplane, a first alignment layer disposed on the backplane and interfacing with the electrical contact, a conductive layer that is light transmissive, a second alignment layer disposed on the conductive layer, and a plurality of beads in an electrically-conductive adhesive between the first alignment layer and the second alignment layer. Electrically-conductive particles within the electrically-conductive adhesive may make the electrically-conductive adhesive electrically-conductive. A first set of the electrically-conductive particles may puncture the first alignment layer to contact the electrical contact, and a second set of the electrically-conductive particles may puncture the second alignment layer to contact the conductive layer. An electrical connection of the electrical contact and the conductive layer may be via a plurality of the electrically-conductive particles.
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14.发明申请公开(公告)号：US20210242807A1
公开(公告)日：2021-08-05
申请号：US16913907
申请日：2020-06-26
发明人： Wenlin Jin , Gonzalo WILLS
摘要： A linear comb drive may include a stator. The linear comb drive may include a rotor. At least one of the stator or the rotor may include a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.
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公开(公告)号：US09285538B2
公开(公告)日：2016-03-15
申请号：US14060433
申请日：2013-10-22
发明人： Jinxi Shen , Barthelemy Fondeur , Wenlin Jin , David J. Chapman , Niki Liu
CPC分类号： G02B6/12009 , G02B6/1203 , G02B6/12033
摘要： A wavelength selective device including an arrayed waveguide grating is disclosed. The wavelength selective device includes a MEMS mirror, which couples light from an input port to an elongate aperture of an input star coupler or slab of the arrayed waveguide grating. A controller tilts the MEMS mirror in response to a sensed temperature change of the arrayed waveguide grating, thereby lessening a sensitivity of the arrayed waveguide grating to the temperature change. The MEMS mirror can also be tilted to shift wavelengths of the wavelength channels of the arrayed waveguide grating by pre-defined amounts upon receiving a corresponding remote command.
摘要翻译： 公开了一种包括阵列波导光栅的波长选择装置。 波长选择装置包括MEMS反射镜，其将来自输入端口的光耦合到阵列波导光栅的输入星形耦合器或平板的细长孔。 控制器响应于所检测到的阵列波导光栅的温度变化而倾斜MEMS镜，从而减小阵列波导光栅对温度变化的灵敏度。 MEMS反射镜也可以倾斜，以在接收相应的远程命令时通过预定义的量来移位阵列波导光栅的波长通道的波长。
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