公开(公告)号：US10910959B2

公开(公告)日：2021-02-02

申请号：US16252042

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

IPC: H02N1/00

Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

公开(公告)号：US20200099318A1

公开(公告)日：2020-03-26

申请号：US16584567

申请日：2019-09-26

Applicant: MEMS Drive, Inc.

Inventor： Guiqin Wang ,  Matthew Ng ,  Xiaolei Liu

IPC: H02N2/02 ,  H02N1/00 ,  H02K41/035 ,  G03B13/36 ,  G02B7/09 ,  G02B27/64 ,  G03B5/02 ,  G03B5/04 ,  G02B5/20 ,  G03B11/00

Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.

公开(公告)号：US20190157988A1

公开(公告)日：2019-05-23

申请号：US16252042

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

IPC: H02N1/00

Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

公开(公告)号：US20180076739A1

公开(公告)日：2018-03-15

申请号：US15699201

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Xiaolei Liu ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  H01L41/053

Abstract: INVENTION #7A micro-electrical-mechanical system (MEMS) device includes one or more slidable connection assemblies for releasably coupling the micro-electrical-mechanical system (MEMS) device to a wafer from which the micro-electrical-mechanical system (MEMS) device was made.

公开(公告)号：US20180076737A1

公开(公告)日：2018-03-15

申请号：US15698917

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00

Abstract: A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.

公开(公告)号：US20170187937A1

公开(公告)日：2017-06-29

申请号：US15447940

申请日：2017-03-02

Applicant: MEMS Drive, Inc.

Inventor： Matthew NG ,  Roman Gutierrez ,  Guiqin Wang

IPC: H04N5/232 ,  B81B3/00 ,  H02N1/00 ,  H04N5/225

CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

公开(公告)号：US11124411B2

公开(公告)日：2021-09-21

申请号：US16251838

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US10815119B2

公开(公告)日：2020-10-27

申请号：US16251933

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US10807857B2

公开(公告)日：2020-10-20

申请号：US15698942

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang ,  Gerardo Morabito

IPC: B81B7/00 ,  B81B3/00

Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

公开(公告)号：US10523135B2

公开(公告)日：2019-12-31

申请号：US15699007

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Xiaolei Liu ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  H02N1/06 ,  H02N2/02 ,  H01L41/053 ,  G02B27/64 ,  B81B7/00 ,  H01L41/09 ,  H01L41/25 ,  H04N5/225 ,  G02B7/09 ,  G02B7/10

Abstract: A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.