公开(公告)号：US20170187937A1

公开(公告)日：2017-06-29

申请号：US15447940

申请日：2017-03-02

Applicant: MEMS Drive, Inc.

Inventor： Matthew NG ,  Roman Gutierrez ,  Guiqin Wang

IPC: H04N5/232 ,  B81B3/00 ,  H02N1/00 ,  H04N5/225

CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

公开(公告)号：US20170320724A1

公开(公告)日：2017-11-09

申请号：US15441887

申请日：2017-02-24

Applicant: MEMS Drive, Inc.

Inventor： Roman Gutierrez ,  Tony Tang ,  Xiaolei Liu ,  Guiqin Wang ,  Matthew NG

IPC: B81B7/00 ,  B81C1/00

CPC classification number: H01L21/76816 ,  B81B3/0045 ,  B81B7/0029 ,  B81B2203/0353 ,  B81C1/00674 ,  B81C1/00682 ,  B81C2201/0112 ,  B81C2201/0135 ,  H01L21/768 ,  H01L21/76898 ,  H01L23/485 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/1461 ,  H01L2924/181

Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US20170190568A1

公开(公告)日：2017-07-06

申请号：US14985175

申请日：2015-12-30

Applicant: MEMS DRIVE, INC.

Inventor： Gerardo MORABITO ,  Xiaolei LIU ,  Guiqin WANG ,  Roman GUTIERREZ ,  Matthew NG

IPC: B81B3/00 ,  H02N1/00

CPC classification number: B81B3/0051 ,  B81B7/0016 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/0136 ,  H02N1/006

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

公开(公告)号：US20170170059A1

公开(公告)日：2017-06-15

申请号：US15442085

申请日：2017-02-24

Applicant: MEMS Drive, Inc.

Inventor： Roman Gutierrez ,  Tony Tang ,  Xiaolei Liu ,  Guiqin Wang ,  Matthew NG

IPC: H01L21/768 ,  H01L23/485

CPC classification number: H01L21/76816 ,  B81B3/0045 ,  B81B7/0029 ,  B81B2203/0353 ,  B81C1/00674 ,  B81C1/00682 ,  B81C2201/0112 ,  B81C2201/0135 ,  H01L21/768 ,  H01L21/76898 ,  H01L23/485 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/1461 ,  H01L2924/181

Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US20170359496A1

公开(公告)日：2017-12-14

申请号：US15686710

申请日：2017-08-25

Applicant: MEMS Drive, Inc.

Inventor： Matthew NG ,  Roman Gutierrez ,  Guiqin Wang

IPC: H04N5/232 ,  H02N1/00 ,  B81B3/00 ,  H04N5/225

CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.