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11.发明公开公开(公告)号：US20240174510A1
公开(公告)日：2024-05-30
申请号：US18436381
申请日：2024-02-08
Applicant: MIRRORCLE TECHNOLOGIES, INC.
Inventor： Stefan Richter , Johannes Kindt , Veljko Milanovic
CPC classification number: B81B3/0078 , H02N1/008 , B81B2201/04 , B81B2203/0154 , B81B2203/058
Abstract: A microelectromechanical system (MEMS) device comprising a wafer including a MEMS device in a substrate of the wafer is mounted to a fluid dispenser stage. The MEMS device has a damping structure coupled to a suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to the fixed part of the substrate. The damping structure extends into a gap between the suspended element and fixed part of the substrate. The fluid confinement structures permit movement of the damping structure within a limited portion of the gap and confine a viscoelastic fluid to the limited portion of the gap. A viscoelastic fluid is deposited onto the wafer in an area of the wafer configured to communicate the viscoelastic fluid into the limited portion of the gap.
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12.发明公开公开(公告)号：US20240174509A1
公开(公告)日：2024-05-30
申请号：US18436373
申请日：2024-02-08
Applicant: MIRRORCLE TECHNOLOGIES, INC.
Inventor： Stefan Richter , Johannes Kindt , Veljko Milanovic
CPC classification number: B81B3/0078 , H02N1/008 , B81B2201/04 , B81B2203/0154 , B81B2203/058
Abstract: A microelectromechanical system (MEMS) device includes a substrate, a suspended element and a damping structure connected to the suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to a fixed part of the substrate. The damping structure extends into a gap between the suspended element and the fixed part of the substrate. The damping structure includes one or more winglets that protrude over a recessed portion of the fixed part of the substrate. The fluid confinement structures are formed by the recessed portion of the fixed substrate and are configured to permit movement of the damping structure over the recessed portion of the substrate and confine a viscoelastic fluid to the limited portion of the gap underneath the winglets.
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公开(公告)号：US11927743B2
公开(公告)日：2024-03-12
申请号：US16983831
申请日：2020-08-03
Applicant: Mirrorcle Technologies, Inc.
Inventor： Veljko Milanovic , Abhishek Kasturi
CPC classification number: G02B26/101 , G02B26/0833 , G02B27/0101 , G02B27/0172 , G02B27/141 , G02B2027/0114
Abstract: An apparatus includes a scan module having one or more laser sources that generate one or more initial laser beams and two or more beam deflectors that deflect the initial laser beam(s). A beam optic substantially collimates the initial laser beam(s) to produce one or more collimated laser beams. One or more beam deflector controllers control the angle of beam deflection from each beam deflector. Relay optics between the two or more beam deflectors image each sequential beam deflector onto the subsequent beam deflector in such a manner that the beam deflecting from the last beam deflector in an optical chain contains a combination or superposition of all the beam deflections of the beam deflectors in the sequence, and maintains a beam divergence of the one or more collimated beams.
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公开(公告)号：US20230204728A1
公开(公告)日：2023-06-29
申请号：US17592408
申请日：2022-02-03
Applicant: Mirrorcle Technologies, Inc.
Inventor： Veljko Milanovic , Ljubisa Ristic , Abhishek Kasturi , Daniel Lovell
IPC: G01S7/481 , G01S7/4865 , G01S7/4915 , G01S17/42 , G01S17/58 , G01B11/24
CPC classification number: G01S7/4817 , G01S7/4865 , G01S7/4915 , G01S17/42 , G01S17/58 , G01B11/24 , G01S7/4814
Abstract: A combined sensing and projection apparatus includes a LIDAR sensor, a scan module, a unified processor and a mechanical mounting. The LIDAR sensor is configured to detect light and sense a physical property of an object or environment. The scan module has a micro-electromechanical system (MEMS) mirror configured to deflect one or more laser beams to project vector graphic content related to the physical property of the object. The unified processor is configured to reduce processing delays by fusion of processing of both vector graphic content and determination of the physical property of the object. The scan module and sensor are attached to the mechanical mounting.
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Patent Agency Ranking
15.发明授权公开(公告)号：US12195326B2
公开(公告)日：2025-01-14
申请号：US18436381
申请日：2024-02-08
Applicant: MIRRORCLE TECHNOLOGIES, INC.
Inventor： Stefan Richter , Johannes Kindt , Veljko Milanovic
Abstract: A microelectromechanical system (MEMS) device comprising a wafer including a MEMS device in a substrate of the wafer is mounted to a fluid dispenser stage. The MEMS device has a damping structure coupled to a suspended element and one or more fluid confinement structures. The suspended element is connected to a fixed part of the substrate by one or more flexures configured to permit movement of the suspended element relative to the fixed part of the substrate. The damping structure extends into a gap between the suspended element and fixed part of the substrate. The fluid confinement structures permit movement of the damping structure within a limited portion of the gap and confine a viscoelastic fluid to the limited portion of the gap. A viscoelastic fluid is deposited onto the wafer in an area of the wafer configured to communicate the viscoelastic fluid into the limited portion of the gap.
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16.发明申请公开(公告)号：US20250011161A1
公开(公告)日：2025-01-09
申请号：US18886922
申请日：2024-09-16
Applicant: Mirrorcle Technologies, Inc.
Inventor： Veljko Milanovic
IPC: B81B7/00
Abstract: A MEMS micromirror device comprising, a reflective movable mirror and an underlying substrate. A viscous liquid or gel is located between the movable mirror and substrate.
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公开(公告)号：US11933970B1
公开(公告)日：2024-03-19
申请号：US17551497
申请日：2021-12-15
Applicant: Mirrorcle Technologies, Inc.
Inventor： Veljko Milanovic , Abhishek Kasturi
CPC classification number: G02B26/101 , G02B26/0833 , G02B27/0101 , G02B27/0172 , G02B27/141 , G02B2027/0114
Abstract: An apparatus, comprising two or more scan modules, each scan module having one or more laser sources that generate one or more laser beams and a beam deflector that deflects the two or more laser beams. A fluorescent emissive sheet (FES) receives the one or more laser beams deflected by the beam deflectors of the one or more scan modules and emits light of longer wavelength than that of the one or more laser beams at portions of the FES that are struck by the one or more laser beams. An optically transmissive viewing window coupled to a podium wherein the light of longer wavelength than that of the one or more laser beams is projected onto the viewing window.
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公开(公告)号：US11927746B1
公开(公告)日：2024-03-12
申请号：US17551570
申请日：2021-12-15
Applicant: Mirrorcle Technologies, Inc.
Inventor： Veljko Milanovic , Abhishek Kasturi
CPC classification number: G02B26/101 , G02B26/0833 , G02B27/0101 , G02B27/0172 , G02B27/141 , G02B2027/0114
Abstract: An apparatus, comprising, a scan module having one or more laser sources that generate one or more initial laser beams and two or more beam deflectors that deflect the one or more initial laser beams. A beam optic is configured to substantially collimate the one or more initial laser beams to produce one or more collimated laser beams. One or more beam deflector controllers are configured to control an angle of beam deflection from each beam deflector. Relay optics between the two or more beam deflectors are configured to image each sequential beam deflector in an optical chain onto the subsequent beam deflector in such a manner that the beam deflecting from a last beam deflector in the optical chain contains a combination or superposition of all the beam deflections of the beam deflectors in the sequence, and maintains a beam divergence of the one or more collimated beams. A first beam deflector of the two or more beam deflectors is configured to scan about a single axis and a second beam deflector of the two or more beam deflectors is configured to scan in a quasi-static mode about two orthogonal axes.
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19.发明授权公开(公告)号：US11772959B2
公开(公告)日：2023-10-03
申请号：US17940770
申请日：2022-09-08
Applicant: Mirrorcle Technologies, Inc.
Inventor： Stefan Richter , Johannes Kindt , Veljko Milanovic
CPC classification number: B81B3/0078 , H02N1/008 , B81B2201/04 , B81B2203/0154 , B81B2203/058
Abstract: MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. An actuator coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
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