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公开(公告)号：US20190390947A1
公开(公告)日：2019-12-26
申请号：US16437765
申请日：2019-06-11
Applicant: MITUTOYO CORPORATION
Inventor： Takeshi KAWABATA , Kazuhiko HIDAKA
Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.
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公开(公告)号：US20190170493A1
公开(公告)日：2019-06-06
申请号：US16207706
申请日：2018-12-03
Applicant: MITUTOYO CORPORATION
Inventor： Atsushi SHIMAOKA , Kazuhiko HIDAKA
Abstract: A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.
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公开(公告)号：US20170284794A1
公开(公告)日：2017-10-05
申请号：US15460994
申请日：2017-03-16
Applicant: MITUTOYO CORPORATION
Inventor： Kazuhiko HIDAKA , Sadayuki MATSUMIYA
IPC: G01B11/24
CPC classification number: G01B11/2441 , G01B11/2425
Abstract: A measuring probe for measuring a screw groove of a relatively movable ball screw includes a light source, an objective lens formed to correspond to the screw groove of the ball screw, arranged to be opposed to the screw groove of the ball screw in a non-contact manner, and configured to emit light from the light source to the screw groove of the ball screw, and a line sensor configured to detect an interference pattern generated by reflected light from the screw groove of the ball screw and reflected light on a surface of the objective lens. This enables high-accuracy measurement of a specified area of a shape of a side surface of a relatively movable work in a non-contact manner.
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公开(公告)号：US20170097221A1
公开(公告)日：2017-04-06
申请号：US15281326
申请日：2016-09-30
Applicant: MITUTOYO CORPORATION
Inventor： Kazuhiko HIDAKA , Nobuyuki HAMA , Tatsuki NAKAYAMA , Sadayuki MATSUMIYA
IPC: G01B5/012
Abstract: A measuring probe for measuring a screw groove of a relatively rotatable ball screw includes a stylus having a tip end portion configured to contact the screw groove, a radial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an X direction toward an axial center of the ball screw, an axial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an axial direction (Z direction) of the axial center, and sensors configured to detect displacement of the stylus produced by the radial-direction displacement mechanism and the axial-direction displacement mechanism. This enables high-accuracy measurement of a predetermined position of a side surface of a relatively rotatable work.
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公开(公告)号：US20160258733A1
公开(公告)日：2016-09-08
申请号：US14789283
申请日：2015-07-01
Applicant: MITUTOYO CORPORATION
Inventor： Atsushi SHIMAOKA , Tomoyuki MIYAZAKI , Kazuhiko HIDAKA
CPC classification number: G01B3/008 , G01B5/0016 , G01B5/012 , G01B5/20 , G01B11/007
Abstract: A measuring probe includes a stylus having a contact part to be in contact with an object to be measured, an axial motion mechanism having a moving member that allows the contact part to move in an axial direction, and a rotary motion mechanism having a rotating member that allows the contact part to move along a plane perpendicular to the axial direction by means of rotary motion. The measuring probe includes a probe main body that incorporates the axial motion mechanism, and a probe module that is supported by the probe main body, incorporates the rotary motion mechanism, and supports the stylus. The probe main body and the probe module are detachably coupled to each other with a pair of rollers and a ball capable of positioning to each other. This allows adequate detection sensitivity and a restoring force suitable for the stylus to be obtained at a low cost.
Abstract translation: 测量探头包括具有与待测对象接触的接触部的触针，具有允许接触部沿轴向移动的移动部件的轴向运动机构，以及具有旋转部件的旋转运动机构 这允许接触部分通过旋转运动沿着垂直于轴向方向的平面移动。 测量探头包括具有轴向运动机构的探针主体和由探头主体支撑的探针模块，包括旋转运动机构，并支撑触针。 探针主体和探针模块通过一对能够彼此定位的滚子和球体彼此可拆卸地联接。 这允许足够的检测灵敏度，并且以低成本获得适合于触针的恢复力。
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Patent Agency Ranking
公开(公告)号：US20150075020A1
公开(公告)日：2015-03-19
申请号：US14483753
申请日：2014-09-11
Applicant: MITUTOYO CORPORATION
Inventor： Yasunori MORI , Takeshi YAMAMOTO , Atsushi SHIMAOKA , Tomoyuki MIYAZAKI , Kazuhiko HIDAKA
Abstract: A lever-type measuring machine swinging around a supporting point includes a stylus measuring a shape of a measured object, an arm having a first end connected to the stylus and a second end connected to the supporting point, and a balancer having a first end connected to the supporting point. The balancer is formed of a material having high specific flexural rigidity. The lever-type measuring machine enables more accurate measurement.
Abstract translation: 围绕支撑点摆动的杠杆式测量机包括测量被测物体的形状的触针，具有连接到触控笔的第一端的臂和连接到支撑点的第二端，以及平衡器，其具有第一端连接 到支持点。 平衡器由具有高抗弯刚度的材料形成。 杠杆式测量机可以进行更精确的测量。
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17.发明申请公开(公告)号：US20220383642A1
公开(公告)日：2022-12-01
申请号：US17747034
申请日：2022-05-18
Applicant: MITUTOYO CORPORATION
Inventor： Tomohiro KIIRE , Kazuhiko HIDAKA
Abstract: A position detection system includes: a plurality of distance detection apparatuses that generate distance data indicating distances to a plurality of positions on the object by detecting light reflected by the object in a predetermined three-dimensional space; an object identification part that identifies the object included in one or more pieces of distance data among a plurality of pieces of the distance data generated by the plurality of distance detection apparatuses; and a position identification part that identifies a position of the object in the three-dimensional space on the basis of (i) a position in the three-dimensional space of the distance detection apparatus that generated the distance data with which the object identification part identified the object and (ii) a position of the object in the distance data.
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公开(公告)号：US20200271901A1
公开(公告)日：2020-08-27
申请号：US16789970
申请日：2020-02-13
Applicant: MITUTOYO CORPORATION
Inventor： Kazuhiko HIDAKA , Hiromu MAIE , Jyota MIYAKURA
Abstract: The present invention provides a lens substrate stacking position calculating apparatus capable of calculating a stacking position at which the number of lens sets whose optical axis deviation falls within an allowable range is maximized, when a plurality of wafer lens arrays are bonded together even if the position of each lens formed on a wafer substrate is deviated between wafer lens arrays to be stacked. The lens substrate stacking position calculating apparatus calculates the positional relationship of two or more transparent substrates to be stacked when the two or more transparent substrates on which a plurality of lenses are two-dimensionally arranged are stacked to form a plurality of lens sets each including two or more lenses. A position of each lens is specified in advance in a common coordinate system.
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公开(公告)号：US20170146336A1
公开(公告)日：2017-05-25
申请号：US15422794
申请日：2017-02-02
Applicant: MITUTOYO CORPORATION
Inventor： Atsushi SHIMAOKA , Tomoyuki MIYAZAKI , Kazuhiko HIDAKA
Abstract: A measuring probe includes a stylus having a contact part, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes first diaphragm structures and a moving member that allows the contact part to move in an axial direction. The rotary motion mechanism includes a second diaphragm structure and a rotating member that allows the contact part to move along a plane perpendicular to the axial direction. The first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure, and the second diaphragm structure is disposed between the first diaphragm structures in the axial direction. The axial motion mechanism supports the rotary motion mechanism, or the rotary motion mechanism supports the axial motion mechanism.
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公开(公告)号：US20160290797A1
公开(公告)日：2016-10-06
申请号：US14674397
申请日：2015-03-31
Applicant: MITUTOYO CORPORATION
Inventor： Edwin BOS , Ernst TREFFERS , Kazuhiko HIDAKA
IPC: G01B21/04
Abstract: A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.
Abstract translation: 接触探针包括触针，传感器和两个平行的大致平面的平板。 触针有一个接触。 该传感器具有基本上平面形状并且包括固定部分，至少三个薄壁部分，每个薄壁部分由平板形成并且具有气溶沉积在其上的应变传感器，以及可移动部分，触针安装到该可移动部分并且连接到 在至少三个位置经由薄壁部分固定部分。 两个平行的基本平坦的板连接到相对侧上的固定部分并且夹持可动部分，以便在可移动部分和两个平行的大致平面的板之间保持预定的距离，并限制可移动部分移动到可移动范围。 传感器由于应变传感器响应于来自触针的测量力而变形而输出接触信号。
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