公开(公告)号：US10429166B2

公开(公告)日：2019-10-01

申请号：US15680653

申请日：2017-08-18

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B3/22 ,  G01B21/04

Abstract: A processing device includes: a coordinate acquisition unit that acquires a moving amount of a measuring probe and a probe output; a matrix generation unit that generates a correction matrix including linear correction elements and non-linear correction elements; and a probe output correction unit that corrects the probe output with the correction matrix. The coordinate acquisition unit acquires the moving amount and the probe output of the measuring probe in each of measurement points in a quantity larger than or equal to the sum of the number of the linear correction elements and the number of the non-linear correction elements. Consequently, a non-linear error of the probe output supplied from the measuring probe can be corrected, and thus shape coordinates of an object to be measured can be obtained with high accuracy.

公开(公告)号：US09719779B2

公开(公告)日：2017-08-01

申请号：US14929588

申请日：2015-11-02

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa ,  Hideyuki Nakagawa

IPC: G01B5/04 ,  G01B21/04

CPC classification number: G01B21/045

Abstract: A form measuring machine includes: a scanning probe including a stylus with a tip ball and a probe body attached with the stylus; a movable slider supporting the scanning probe; a scale detecting a slider displacement of the slider; a tip ball displacement detector detecting a tip ball displacement of the tip ball; and an arithmetic unit calculating a measurement value based on the slider displacement, the tip ball displacement and a correction filter and comprising a correction filter setting section that: calculates a correction matrix diagonal component from the slider displacement and the tip ball displacement detected by calibration of the scanning probe; and calculates a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter.

公开(公告)号：US09464877B2

公开(公告)日：2016-10-11

申请号：US14617135

申请日：2015-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B5/016

CPC classification number: G01B5/008 ,  G01B5/016 ,  G01B21/045

Abstract: A calculator includes a first filter, a second filter, and an adding device. The first filter outputs, as a first corrected value, a value in which displacement of a displacement table detected by a scale has been corrected based on first frequency transfer characteristics from a scale to a measured object station. The second filter outputs, as a second corrected value, a value in which the first corrected value is corrected based on second frequency transfer characteristics from a ball tip to a ball tip displacement detector. The adding device adds the second corrected value and displacement of the ball tip detected by the ball tip displacement detector to calculate a measured value.

Abstract translation: 计算器包括第一滤波器，第二滤波器和加法装置。 第一滤波器作为第一校正值输出基于从刻度尺到测量对象站的第一频率传递特性来校正由刻度尺检测的位移表的位移的值。 第二滤波器作为第二校正值输出基于从球头到球头位移检测器的第二频率传递特性校正第一校正值的值。 添加装置添加由球头位移检测器检测出的第二校正值和球尖的位移，以计算测量值。

公开(公告)号：US20150369655A1

公开(公告)日：2015-12-24

申请号：US14740707

申请日：2015-06-16

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa

IPC: G01H11/08 ,  G06F3/043 ,  G06F3/0354

CPC classification number: G01H11/08 ,  G01B7/012 ,  G06F3/03545 ,  G06F3/0433 ,  H03K5/088

Abstract: A contact detector circuit that detects a change in a DC sensor signal based on a change in a physical amount to be detected includes: a reference signal generation circuit that generates a reference signal based on the DC sensor signal; a trigger signal output circuit that compares the DC sensor signal with the reference signal and outputs a trigger signal based on a result of the comparison; and a sampling-and-holding circuit that holds the reference signal when the trigger signal is started to be outputted and outputs the held reference signal to the trigger signal output circuit while the trigger signal is outputted. The trigger signal output circuit uses the reference signal outputted by the sampling-and-holding circuit for the comparison with the DC sensor signal while the trigger signal is outputted.

Abstract translation: 基于待检测物理量的变化来检测DC传感器信号的变化的接触检测器电路包括：基于所述DC传感器信号生成参考信号的参考信号生成电路; 触发信号输出电路，其将所述DC传感器信号与所述参考信号进行比较，并且基于所述比较的结果输出触发信号; 以及当触发信号开始输出时保持参考信号的采样和保持电路，并且在触发信号被输出的同时将保持的参考信号输出到触发信号输出电路。 触发信号输出电路在输出触发信号的同时，使用由采样保持电路输出的参考信号与直流传感器信号进行比较。

公开(公告)号：US09097504B2

公开(公告)日：2015-08-04

申请号：US14066804

申请日：2013-10-30

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa ,  Hideyuki Nakagawa

IPC: G01B5/008 ,  G01B21/04

CPC classification number: G01B5/008 ,  G01B21/045

Abstract: A shape measuring machine includes a slider that supports a scanning probe including a tip sphere. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The correction filter outputs a correction value that is obtained by correcting the displacement of the tip sphere detected by the tip sphere displacement detection unit based on an inverse characteristic of a frequency transfer characteristic from the scale unit to the tip sphere. The adder calculates the measurement value by adding the displacement of the slider detected by the scale unit and the correction value.

Abstract translation: 一种形状测量机包括支撑包括尖端球体的扫描探针的滑块。 刻度单元检测滑块的位移。 尖端球体位移检测单元检测尖端球体的位移。 计算单元包括校正滤波器和加法器，并且根据滑块和尖端球体的位移来计算测量值。 校正滤波器输出校正值，其通过基于从刻度单元到尖端球体的频率传递特性的反特性来校正由尖端球体位移检测单元检测到的尖端球的位移而获得。 加法器通过将由比例单元检测到的滑块的位移和校正值相加来计算测量值。

公开(公告)号：US20130176575A1

公开(公告)日：2013-07-11

申请号：US13733434

申请日：2013-01-03

Applicant: MITUTOYO CORPORATION

Inventor： Kazuhiko Hidaka ,  Nobuhiro Ishikawa

IPC: G01B9/02

CPC classification number: G01B9/02041 ,  G01B5/012 ,  G01B11/007 ,  G01B11/272

Abstract: An image sensor for fringe images of interference fringes and the like in which the optical system has a simpler configuration than that of the conventional line image sensor, and faster detection becomes possible includes a light receiving plane on which two or more straight rows of pixels are disposed, and captures images of regular fringes generated from light reflected from an irradiated body in accordance with the amount of light received by each pixel; among the rows of pixels, at least two rows of pixels are disposed at right angles to each other, and acquires images of linear fringes crossing almost at right angles in two directions among the fringe projected onto the light receiving plane.

Abstract translation: 一种用于干涉条纹等的边缘图像的图像传感器，其中光学系统具有比常规线图像传感器更简单的构造，并且更快的检测可能包括其上两个或更多个直线像素的光接收平面 并且根据由每个像素接收的光的量捕获从照射的身体反射的光产生的规则条纹的图像; 在像素行之中，至少两行像素彼此成直角地设置，并且获取在投影到光接收平面上的边缘中的两个方向上几乎以直角交叉的直线条纹的图像。