Extended reality virtual distance measurement system

    公开(公告)号:US11867507B1

    公开(公告)日:2024-01-09

    申请号:US18143843

    申请日:2023-05-05

    Applicant: MLOptic Corp

    Inventor: Pengfei Wu Wei Zhou

    CPC classification number: G01B9/02098 G01B9/02041

    Abstract: A system for providing a virtual distance of a device under test, the system including a light source, a wedge shear plate including a first surface, a second surface and a wedge angle, wherein the second surface is disposed at the wedge angle with respect to the first surface and the wedge shear plate is configured to be disposed between the device under test and the light source, a first detector configured for receiving a first interference pattern formed as a result of the light source being disposed through and reflected by the first surface and the second surface of the wedge shear plate and a second detector configured for receiving a second interference pattern formed as a result of the light source being disposed through and reflected by the first surface and the second surface of the wedge shear plate.

    Scanning overlay metrology using overlay targets having multiple spatial frequencies

    公开(公告)号:US11796925B2

    公开(公告)日:2023-10-24

    申请号:US17709104

    申请日:2022-03-30

    CPC classification number: G03F7/70633 G01B9/02041

    Abstract: An overlay metrology system may include an illumination source and illumination optics to illuminate an overlay target on a sample with illumination from the illumination source as the sample is in motion with respect to the illumination from the illumination source in accordance with a measurement recipe. The overlay target may include one or more cells, where a single cell is suitable for measurement along a particular direction. Such a cell may include two or more gratings with different pitches. Further, the system may include two or more photodetectors, each configured to capture three diffraction lobes from the two or more grating structures. The system may further include a controller to determine an overlay measurement associated with each cell of the overlay target.

    OCT image capture device
    6.
    发明授权

    公开(公告)号:US11659991B2

    公开(公告)日:2023-05-30

    申请号:US16606040

    申请日:2018-04-18

    Applicant: ROWIAK GMBH

    CPC classification number: A61B3/102 G01B9/02041 G01B9/02091

    Abstract: An OCT examination device for recording an object comprises an OCT radiation source which emits OCT radiation, an OCT beam path, a housing, an exit opening formed in the housing for the OCT radiation of the OCT radiation source, an OCT exit direction of the radiation through the exit opening, a control unit connected to the OCT radiation source OCT radiation and configured to record a multiplicity of measurement profiles mutually separated in a recording period and, within the recording period, to drive the OCT radiation source in order to emit the OCT radiation and the OCT radiation receiver in order to receive the backscattered OCT radiation, and to keep an OCT output direction and an OCT exit direction constant with respect to one another in their angular orientation during the recording period.

    ULTRA-WIDE FIELD OF VIEW OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM

    公开(公告)号:US20180184894A1

    公开(公告)日:2018-07-05

    申请号:US15847843

    申请日:2017-12-19

    Inventor: Wei Su

    Abstract: Various embodiments of the present disclosure describe an ultra-wide field of view (FOV) optical coherence tomography (OCT) imaging system. The ultra-wide FOV OCT imaging system can include an imaging probe, a console and a cable. The imaging probe can include an optical widow, a first imaging module and a second imaging module. The first imaging module is configured to form a first image of the eye. The second imaging module is configured to form a second image of the eye. The second imaging module can include a scanning mirror configured to receive a sample arm portion of a second light beam from a second light source and scan the sample arm portion. The console can include the second light source, an interferometer, and a processor. The cable is coupled between the console and the imaging probe and includes a first fiber, a second fiber and a third fiber.

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