公开(公告)号：US5994821A

公开(公告)日：1999-11-30

申请号：US978422

申请日：1997-11-25

申请人： Katsumi Imada ,  Tetsuro Otsuchi ,  Masato Sugimoto ,  Yoshihiro Tomita ,  Osamu Kawasaki

发明人： Katsumi Imada ,  Tetsuro Otsuchi ,  Masato Sugimoto ,  Yoshihiro Tomita ,  Osamu Kawasaki

IPC分类号： H01L41/09 ,  H01L41/04

CPC分类号： H01L41/094

摘要： Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.

摘要翻译： 矩形压电基板各自具有彼此相对的主表面，其厚度为50μm厚×1mm×8mm长，由铌酸锂（LiNbO 3）构成，直接接合在主表面上，使得它们的轴线 极化被设置在彼此相反的方向上，从而构成压电元件。 在压电元件的两个主表面上形成厚度为0.2μm，由铬镍制成的电极，从而形成双压电晶片式机电转换元件的精密位移控制致动器。 这种构造使得可以提供一种紧凑的精确位移控制致动器，其具有大的位移和极小的位移和共振频率等特性的变化。

公开(公告)号：US5929555A

公开(公告)日：1999-07-27

申请号：US834207

申请日：1997-04-15

申请人： Masato Sugimoto ,  Katsu Takeda ,  Yoshihiro Tomita ,  Osamu Kawasaki

发明人： Masato Sugimoto ,  Katsu Takeda ,  Yoshihiro Tomita ,  Osamu Kawasaki

IPC分类号： H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/56 ,  H01L41/08

CPC分类号： H03H9/177 ,  H03H3/04 ,  H03H9/02031 ,  H03H9/0207 ,  H03H9/176 ,  Y10T29/42 ,  Y10T29/49004

摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.

摘要翻译： 通过使用没有任何粘合剂的直接粘合，为具有彼此具有大致相同厚度的两个压电单晶板11和12制备具有反向畴的晶片。 然后，驱动电极13形成在具有反向域的晶片的两个主平面上，以提供压电谐振器。 具有反转偏振结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，抑制具有反向偏振的畴的厚度的散射。 在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。 因此，以简单的方式抑制杂散模式。