Angular-velocity sensor
    12.
    发明授权
    Angular-velocity sensor 有权
    角速度传感器

    公开(公告)号:US07164179B2

    公开(公告)日:2007-01-16

    申请号:US10495926

    申请日:2003-08-06

    IPC分类号: H01L27/14

    CPC分类号: G01C19/5607

    摘要: An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.

    摘要翻译: 角速度传感器包括音叉形基板(1),驱动器(110),其设置在形成音叉的臂上并使臂振动; 监视器(150),用于检测由驾驶员(110)产生的振动; 以及用于检测施加角速度的振动的位移的检测器(120)。 驱动器(110),监视器(150)和检测器(120)由形成在臂上的下电极层,压电薄膜和上电极层制成。 压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。 沿着外周边缘的平坦部分没有形成上电极层。 这种结构防止了下电极层和上电极层之间的短路。

    Acceleration sensor and acceleration apparatus using acceleration sensor
    14.
    发明授权
    Acceleration sensor and acceleration apparatus using acceleration sensor 有权
    加速度传感器和使用加速度传感器的加速装置

    公开(公告)号:US06382026B1

    公开(公告)日:2002-05-07

    申请号:US09463140

    申请日:2000-04-12

    IPC分类号: G01P1509

    摘要: An acceleration sensor having a well controlled dispersion in the detection, characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).

    摘要翻译: 具有在低频检测中的检测,特性和改进的检测特性中良好控制的色散的加速度传感器包括:第一压电板(11),通过直接接合结合到第一压电板(11)的第二压电板(12) ,设置在第一压电板(11)的主表面上的第一外部电极(13)和设置在第二压电板(12)的主表面上的第二外部电极(14)。 第一压电板(11)和第二压电板(12)以它们的偏振轴彼此相反地接合在一起。 加速度传感器的外观类似于截面中的字母“L”; 支撑部分(15)的厚度大于其余部分(自由振动部分)的厚度。

    Drop shock measurement system and acceleration sensor element used in the same
    15.
    发明授权
    Drop shock measurement system and acceleration sensor element used in the same 失效
    跌落震动测量系统和加速度传感器元件相同

    公开(公告)号:US07493818B2

    公开(公告)日:2009-02-24

    申请号:US10769263

    申请日:2004-01-30

    IPC分类号: G01D21/00

    摘要: The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.

    摘要翻译: 跌落冲击测量系统具有i)多个双压电晶片式加速度传感器,其包含多个自由振动部分,每个自由振动部分具有各自的引出电极; ii)用于选择双压电晶片式加速度传感器的输出的开关部分; iii)放大电路,用于放大从加速度传感器经由开关部分施加的信号; 以及iv)用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

    Drop shock measurement system and acceleration sensor element used in the same
    16.
    发明授权
    Drop shock measurement system and acceleration sensor element used in the same 失效
    跌落震动测量系统和加速度传感器元件相同

    公开(公告)号:US07275412B2

    公开(公告)日:2007-10-02

    申请号:US11170333

    申请日:2005-06-29

    IPC分类号: G01N19/00

    摘要: The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.

    摘要翻译: 跌落冲击测量系统具有i)多个双压电晶片式加速度传感器,其包含多个自由振动部分,每个自由振动部分具有各自的引出电极; ii)用于选择双压电晶片式加速度传感器的输出的开关部分; iii)放大电路,用于放大从加速度传感器经由开关部分施加的信号; 以及iv)用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

    Drop shock measurement system and acceleration sensor element used in the same
    17.
    发明申请
    Drop shock measurement system and acceleration sensor element used in the same 失效
    跌落震动测量系统和加速度传感器元件相同

    公开(公告)号:US20050284240A1

    公开(公告)日:2005-12-29

    申请号:US11170333

    申请日:2005-06-29

    摘要: The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.

    摘要翻译: 跌落冲击测量系统具有i)多个双压电晶片式加速度传感器,其包含多个自由振动部分,每个自由振动部分具有各自的引出电极; ii)用于选择双压电晶片式加速度传感器的输出的开关部分; iii)放大电路,用于放大从加速度传感器经由开关部分施加的信号; 以及iv)用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

    Holding structure for a piezoelectric vibrator
    18.
    发明授权
    Holding structure for a piezoelectric vibrator 失效
    压电振子的保持结构

    公开(公告)号:US5521457A

    公开(公告)日:1996-05-28

    申请号:US249738

    申请日:1994-05-26

    CPC分类号: H03H9/09 B06B1/06 H03H9/1028

    摘要: Protrusions made of an electrically conductive material such as a metal or ceramic are formed around a node point or a node line of vibrations of a piezoelectric plate on two principal planes thereof by a spraying process. The piezoelectric plate is held at the protrusions with leaf springs on the two principal planes. Thus, protrusions of a small surface area are formed without deteriorating the piezoelectric plate. The piezoelectric plate can be held stably without deteriorating the vibration characteristics. An alternating voltage is applied to electrodes of the piezoelectric plate through the electrically conductive protrusions. Because a spraying process is used, the protrusions can be thickly and precisely formed in a small area and held surely and reliably, with a good mechanical strength of the protrusions.

    摘要翻译: 由诸如金属或陶瓷的导电材料制成的突起通过喷涂工艺在其两个主平面上的压电板的振动的节点或节点线周围形成。 压电板通过两个主平面上的板簧保持在突起处。 因此,形成小表面积的突起,而不会使压电板劣化。 压电板可以稳定地保持而不会降低振动特性。 通过导电突起将交变电压施加到压电板的电极。 由于使用喷涂工艺,所以能够以较小的面积厚度精确地形成突出部,并且以突出部的良好机械强度可靠且可靠地保持。