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公开(公告)号：US20050029606A1
公开(公告)日：2005-02-10
申请号：US10495926
申请日：2003-08-06
IPC分类号： G01C19/56 , G01C19/5607 , H01L41/22 , H01L41/29 , H01L41/332 , H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
摘要翻译： 角速度传感器包括音叉形基板（1），驱动器（110），其设置在形成音叉的臂上并使臂振动; 监视器（150），用于检测由驾驶员（110）产生的振动; 以及用于检测施加角速度的振动的位移的检测器（120）。 驱动器（110），监视器（150）和检测器（120）由形成在臂上的下电极层，压电薄膜和上电极层制成。 压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。 沿着外周边缘的平坦部分没有形成上电极层。 这种结构防止了下电极层和上电极层之间的短路。
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公开(公告)号：US07164179B2
公开(公告)日：2007-01-16
申请号：US10495926
申请日：2003-08-06
IPC分类号： H01L27/14
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
摘要翻译： 角速度传感器包括音叉形基板（1），驱动器（110），其设置在形成音叉的臂上并使臂振动; 监视器（150），用于检测由驾驶员（110）产生的振动; 以及用于检测施加角速度的振动的位移的检测器（120）。 驱动器（110），监视器（150）和检测器（120）由形成在臂上的下电极层，压电薄膜和上电极层制成。 压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。 沿着外周边缘的平坦部分没有形成上电极层。 这种结构防止了下电极层和上电极层之间的短路。
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公开(公告)号：US06984572B2
公开(公告)日：2006-01-10
申请号：US10473980
申请日：2003-01-24
IPC分类号： H01L21/301
CPC分类号： G01C19/5607 , H01L21/3043
摘要： An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.
摘要翻译： 通过以下方法制造电子电路。 元件形成在基板的前表面上，然后在基板的前表面中的每个元件周围形成凹部。 然后，将基板的一部分从基板的背面去除，直至到达凹部的底部。 在该方法中，通过从背面去除基板的一部分，元件被分开，因此有效地制造元件。
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公开(公告)号：US06865945B2
公开(公告)日：2005-03-15
申请号：US10485073
申请日：2003-06-05
IPC分类号： G01C19/56 , G01C19/5621 , G01C19/5628 , H01L41/22 , H01L41/319 , G01P9/04 , H01L41/08
CPC分类号： G01C19/5663 , G01C19/5628
摘要： An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect to the angular velocity applied, is provided. The angular velocity sensor comprises a vibrator, and a tuning-fork as the vibrator is formed of a silicone substrate with crystal orientation (100) as its main face, and a side face nearly perpendicular to the driving direction (X direction) of the arm of the tuning-fork corresponds to a crystal orientation where the elastic modulus is less dependent on azimuth angle.
摘要翻译： 提供了一种角速度传感器，其能够减小振动器的驱动共振频率的变化并提高检测信号相对于施加的角速度的灵敏度的可靠性。 角速度传感器包括振动器，并且作为振动器的音叉由具有晶体取向（100）作为其主面的硅衬底和与臂的驱动方向（X方向）几乎垂直的侧面形成 音叉对应于其中弹性模量较小依赖于方位角的晶体取向。
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5.发明授权公开(公告)号：US06719914B2
公开(公告)日：2004-04-13
申请号：US10132717
申请日：2002-04-26
IPC分类号： C03C1500
CPC分类号： H01L41/313
摘要： The present invention relates to a method of manufacturing a piezoelectric device of high sensitivity using direct bonded quartz plate. To achieve this object, the invented method comprises the steps of covalently bonding a plurality of quartz plates, dry etching the bonded quartz plates with plasma from one side of its surfaces down to a bonded plane, and dry etching with plasma thereafter from the other side of the surfaces.
摘要翻译： 本发明涉及使用直接接合的石英板制造高灵敏度的压电器件的方法。 为了实现该目的，本发明的方法包括以下步骤：共价键合多个石英板，将等离子体从其表面的一侧干燥蚀刻到接合平面，然后从另一侧进行等离子体干蚀刻 的表面。
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公开(公告)号：US20090044624A1
公开(公告)日：2009-02-19
申请号：US12067539
申请日：2006-11-01
CPC分类号： G01C19/5607 , H03H9/0547 , H03H9/21 , Y10T29/42
摘要： The present invention provides an angular velocity sensor having a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element.To realize this, the angular velocity sensor of the present invention provides mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.
摘要翻译： 本发明提供了一种具有稳定特性的角速度传感器，其中即使当通过与包括振动元件的包装中的氧气的反应产生二氧化碳气体时，振动元件的驱动效率变化也小。 为了实现这一点，本发明的角速度传感器在包装中提供惰性气体和氧气的混合气体，使得包装中的混合气体具有高于大气压的压力。
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公开(公告)号：US07946173B2
公开(公告)日：2011-05-24
申请号：US12067539
申请日：2006-11-01
CPC分类号： G01C19/5607 , H03H9/0547 , H03H9/21 , Y10T29/42
摘要： An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To realize this, the angular velocity sensor has a mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.
摘要翻译： 角速度传感器具有稳定的特性，其中即使当通过与其中包含振动元件的包装中的氧气的反应产生二氧化碳气体时，振动元件的驱动效率变化也小。 为了实现这一点，角速度传感器在包装中具有惰性气体和氧气的混合气体，使得包装中的混合气体具有高于大气压力的压力。
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公开(公告)号：US20100117493A1
公开(公告)日：2010-05-13
申请号：US12596867
申请日：2008-04-24
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H01L41/319 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1646 , G01C19/56 , G01C19/5607 , G01C25/00 , H01L41/0477 , H01L41/0815 , H01L41/29 , H01L41/316 , Y10T29/42
摘要： Upper adhesion layer 35 formed between piezoelectricity layer 32 and upper electrode layer 34 so as to abut on piezoelectricity layer 32 and upper electrode layer 34 is included. Upper adhesion layer 35 includes first tungsten layer 47 made of tungsten in which an α phase and a β phase coexist and second tungsten layer 48 made of α-phase tungsten. First tungsten layer 47 is configured so as to abut on piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.
摘要翻译： 包括在压电层32和上电极层34之间形成的与上压电层32和上电极层34邻接的上粘合层35。 上粘合层35包括由钨制成的第一钨层47，其中α相和/ 由α相钨制成的相共存和第二钨层48。 第一钨层47被配置为与压电层32邻接。可以获得能够提高压电层和电极层两者的粘附性并降低基点点电压波动的压电装置 的高温运行，以提高可靠性。
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公开(公告)号：US08044557B2
公开(公告)日：2011-10-25
申请号：US12596867
申请日：2008-04-24
IPC分类号： H01L41/08
CPC分类号： H01L41/319 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1646 , G01C19/56 , G01C19/5607 , G01C25/00 , H01L41/0477 , H01L41/0815 , H01L41/29 , H01L41/316 , Y10T29/42
摘要： An upper adhesion layer 35 formed between a piezoelectricity layer 32 and an upper electrode layer 34 so as to abut on the piezoelectricity layer 32 and the upper electrode layer 34 is included. The upper adhesion layer 35 includes a first tungsten layer 47 made of tungsten in which an α phase and a β phase coexist and a second tungsten layer 48 made of α-phase tungsten. The first tungsten layer 47 is configured so as to abut on the piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.
摘要翻译： 包括形成在压电层32和上电极层34之间以抵靠压电层32和上电极层34的上粘合层35。 上部粘合层35包括由钨制成的第一钨层47，其中α相和/ 相共存和由α相钨制成的第二钨层48。 第一钨层47被构造成邻接在压电层32上。可以获得能够提高压电层和电极层的粘合性的压电装置，并且降低基本点电压波动 高温运行的时间，以提高可靠性。
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10.发明授权Amplifier for outputting motor controlling signal in motor controlling circuit 失效用于在电机控制电路中输出电机控制信号的放大器
公开(公告)号：US5014020A
公开(公告)日：1991-05-07
申请号：US448953
申请日：1989-12-12
申请人： Michihiko Hayashi , Kenzi Ohtani
发明人： Michihiko Hayashi , Kenzi Ohtani
CPC分类号： H03F1/0261
摘要： A motor controlling circuit used for controlling the drive of a motor, and particularly to improvements of the control characteristics of the amplifier. A current setting transistor for setting an amount of current flowing from a differential amplifier to a predetermined value is disposed on the downstream side of the differential amplifier. The amount of current flowing across this current setting transistor is varied in response to the level of an input signal to the amplifier, so that the current outputting capability of the differential amplifier is proportional to the level of the input signal. Accordingly, when the level of the input signal is small, the gain of the amplifier is made small, and a gain for an amount of ripple at that time is also made small. Hence, it is possible to control an adverse effect of the ripple carried on the input signal when the level of the input signal is small. In addition, it is possible to eliminate an output current when the level of the input signal is zero, thereby controlling the generation of an error current due to an offset.
摘要翻译： 用于控制电动机的驱动的电动机控制电路，特别是改善放大器的控制特性。 用于将从差分放大器流动的电流量设定为预定值的电流设置晶体管设置在差分放大器的下游侧。 流过该电流设定晶体管的电流量响应于放大器的输入信号的电平而变化，使得差分放大器的电流输出能力与输入信号的电平成比例。 因此，当输入信号的电平小时，放大器的增益变小，并且此时的纹波量的增益也变小。 因此，当输入信号的电平较小时，可以控制输入信号纹波的不利影响。 此外，当输入信号的电平为零时，可以消除输出电流，从而控制由偏移引起的误差电流的产生。
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