Metal Precursor Solutions For Chemical Vapor Deposition
    12.
    发明申请
    Metal Precursor Solutions For Chemical Vapor Deposition 审中-公开
    用于化学气相沉积的金属前体溶液

    公开(公告)号:US20080254218A1

    公开(公告)日:2008-10-16

    申请号:US12058200

    申请日:2008-03-28

    IPC分类号: C23C18/44

    CPC分类号: C23C16/18 C23C16/16

    摘要: Metal source containing precursor liquid solutions for chemical vapor deposition processes, including atomic layer deposition, for fabricating conformal metal-containing films on substrates are described. More specifically, the metal source precursor liquid solutions are comprised of (i) at least one metal complex selected from β-diketonates, β-ketoiminates, β-diiminates, alkyl metal, metal carbonyl, alkyl metal carbonyl, aryl metal, aryl metal carbonyl, cyclopentadienyl metal, cyclopentadienyl metal isonitrile, cyclopentadienyl metal nitrile, cyclopentadienyl metal carbonyl, metal alkoxide, metal ether alkoxide, and metal amides wherein the ligand can be monodentate, bidentate and multidentate coordinating to the metal atom and the metal is selected from group 2 to 14 elements, and (ii) a solvent selected from organic amides including linear amides and cyclic amides for such metal source containing precursors.

    摘要翻译: 描述了用于在衬底上制造保形的含金属膜的用于化学气相沉积工艺的包含原子层沉积的前体液体溶液的金属源。 更具体地说,金属源前体液体溶液包括(i)至少一种选自β-二酮酸酯,β-酮亚胺酸酯,β-二亚胺,烷基金属,金属羰基,烷基金属羰基,芳基金属,芳基金属羰基 ,环戊二烯基金属,环戊二烯基金属异腈,环戊二烯基金属腈,环戊二烯基金属羰基,金属醇盐,金属醚醇盐和金属酰胺,其中配体可以是单齿,双齿和多齿配位的金属原子,金属选自组2 14元素,和(ii)选自有机酰胺的溶剂,包括用于这种含金属源的前体的线性酰胺和环状酰胺。

    Polyfluorinated boron cluster anions for lithium electrolytes
    14.
    发明申请
    Polyfluorinated boron cluster anions for lithium electrolytes 审中-公开
    用于锂电解质的多氟硼簇阴离子

    公开(公告)号:US20060204843A1

    公开(公告)日:2006-09-14

    申请号:US11372907

    申请日:2006-03-10

    IPC分类号: H01M10/40

    摘要: The present invention relates a battery comprising: a lithium salt of the formula: Li2B12FxZ12-x where x averages at least 4 but not more than 12 and Z is H, Cl, or Br, and a solvent having a higher dielectric constant than a solvent consisting of a 3:7 ratio by weight of ethylene carbonate (EC) and diethyl carbonate (DEC).

    摘要翻译: 本发明涉及一种电池,包括:下式的锂盐:<?in-line-formula description =“In-line formula”end =“lead”?> Li 2 B& x-in-line-formula description =“In-line Formulas”end =“tail”?>其中x的平均值 至少4个但不超过12个,Z是H,Cl或Br,并且介电常数比由碳酸亚乙酯(EC)和碳酸二乙酯(DEC)的3:7重量比构成的溶剂更高的溶剂, 。