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公开(公告)号：US09354374B2
公开(公告)日：2016-05-31
申请号：US14470498
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst , Mark Alan Davis
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.
Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。
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公开(公告)号：US08947772B2
公开(公告)日：2015-02-03
申请号：US14198335
申请日：2014-03-05
Applicant: Moxtek, Inc.
Inventor： Eric Gardner , Bin Wang , Mark Davis , John D. Dredge, Jr.
IPC: G02B5/30
CPC classification number: G02B5/3075 , G02B5/3058 , G02B5/3091
Abstract: An inorganic, dielectric grid polarizer device includes a stack of film layers disposed over a substrate. Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer with an array of parallel ribs having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.
Abstract translation: 无机介电栅极偏振器装置包括设置在基板上方的一层薄膜层。 每个膜层由无机和电介质的材料形成。 相邻的膜层各自具有不同的折射率。 至少一个膜层是不连续的，以形成具有周期小于400nm的平行肋排列的双折射层。 与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。
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公开(公告)号：US10649121B2
公开(公告)日：2020-05-12
申请号：US16054147
申请日：2018-08-03
Applicant: Moxtek, Inc.
Inventor： Hua Li , Bin Wang , Brian Bowers
Abstract: A wire grid polarizer (WGP) can have low transmission of a primarily reflected/absorbed polarization (e.g. low Ts). The WGP can comprise an array of wires on a substrate and a stack of thin films between the substrate and the array of wires. The stack of thin films can include a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires. An index of refraction of the first layer can be greater than an index of refraction of the substrate, an index of refraction of the second layer can be greater than the index of refraction of the first layer, and an index of refraction of the third layer can be less than the index of refraction of the first layer.
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公开(公告)号：US10139537B2
公开(公告)日：2018-11-27
申请号：US15715407
申请日：2017-09-26
Applicant: Moxtek, Inc.
Inventor： R. Stewart Nielson , Shaun Ogden , Matt Free , Bin Wang , Hua Li , Brian Bowers
Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.
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公开(公告)号：US10139536B2
公开(公告)日：2018-11-27
申请号：US15715378
申请日：2017-09-26
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Hua Li , Brian Bowers
Abstract: A wire grid polarizer (WGP) 10 can include wires 15 sandwiched between a first pair of thin-film layers 21 (with a first transparent layer 11 and a second transparent layer 12) and a second pair of thin-film layers 22 (with a third transparent layer 13 and a fourth transparent layer 14). An index of refraction of each outer transparent layer 11 and 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 and 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same and material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP. The wires 15 can be embedded for protection.
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Patent Agency Ranking
公开(公告)号：US10114161B2
公开(公告)日：2018-10-30
申请号：US15248846
申请日：2016-08-26
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Mark Davis
Abstract: A wire grid polarizer comprising on array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmissive rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.
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公开(公告)号：US20170059758A1
公开(公告)日：2017-03-02
申请号：US15195602
申请日：2016-06-28
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Hua Li , Brian Bowers
IPC: G02B5/30
CPC classification number: G02B5/3058 , G02B5/00 , G02B5/1857 , G02B6/136 , G02B17/00 , G02B26/00
Abstract: The wire grid polarizer (WGP) comprises an array of parallel, elongated nanostructures located over a surface of a transparent substrate and a plurality of spaces, including a space between adjacent nanostructures. Each of the nanostructures can include (1) a plurality of parallel, elongated wires located on the substrate, including an inner-pair located between an outer-pair; (2) lateral-gaps between each wire of the outer-pair and an adjacent wire of the inner-pair; (3) and a center-gap between the two wires of the inner-pair.
Abstract translation: 线栅偏振器（WGP）包括位于透明基板的表面上方的平行的细长纳米结构阵列和包括相邻纳米结构之间的空间的多个空间。 每个纳米结构可以包括（1）位于衬底上的多个平行细长的线，包括位于外对之间的内对; （2）外对线的每根线与内对的相邻线之间的横向间隙; （3）和内对的两条线之间的中心间隙。
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公开(公告)号：US20150116825A1
公开(公告)日：2015-04-30
申请号：US14470566
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: A wire grid polarizer comprising an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires (or top ribs), each oriented laterally with respect to one another. There can be a first gap disposed between the pair of wires (or top ribs). Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap. Also included are methods of making wire grid polarizers.
Abstract translation: 一种线栅偏振器，包括设置在衬底的表面上的平行的，细长的纳米结构的阵列。 每个纳米结构可以包括一对平行的细长导线（或顶部肋），每个线条相对于彼此横向定向。 可以在一对电线（或顶部肋）之间设置第一间隙。 每个纳米结构可以通过设置在相邻纳米结构之间的第二间隙和相邻的导线对之间与相邻的纳米结构分离。 第一间隙的第一间隙宽度可以不同于第二间隙的第二间隙宽度。 还包括制造线栅偏振器的方法。
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公开(公告)号：US20150116824A1
公开(公告)日：2015-04-30
申请号：US14470498
申请日：2014-08-27
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Ted Wangensteen , Rumyana Petrova , Mike Black , Steven Marks , Dean Probst
CPC classification number: G02B5/3058 , C23F17/00 , G02B1/08 , G02B1/12
Abstract: Wire grid polarizers, and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a first rib disposed over a surface of a substrate and a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and/or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.
Abstract translation: 线栅偏振器，以及制造线栅偏振器的方法，包括设置在衬底表面上的平行的细长纳米结构的阵列。 每个纳米结构可以包括设置在基板的表面上的第一肋和一对平行的细长的线，每个横向相对于彼此横向定向并且设置在第一肋上。 线栅偏振器可以耐用，具有一个极化的光，高对比度和/或小间距的高透射率。 线栅偏振器还可以具有相反的光偏振的高吸收或高反射。
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公开(公告)号：US20150077851A1
公开(公告)日：2015-03-19
申请号：US14314814
申请日：2014-06-25
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Mark Davis
IPC: G02B5/30
CPC classification number: G02B5/3058 , G02B5/22 , G02B5/3075
Abstract: A wire grid polarizer comprising an array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmissive rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.
Abstract translation: 一种线栅偏振器，包括设置在衬底上的平行的，细长的第一肋组的阵列。 每个第一肋组可以包括中心第一透射肋和一对第一导线，其包括沿着第一透射肋的每一侧布置的第一线。 第一介电材料可以基本上填充每个肋组和相邻肋组之间的第一间隙。 平行的，细长的第二导线的阵列可以布置在肋组和第一介电材料之上。 第一线或第二线可以是吸收性的，并且第一线或第二线中的另一条可以是反射的。
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