公开(公告)号：US11714221B2

公开(公告)日：2023-08-01

申请号：US17220370

申请日：2021-04-01

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Matthew C. George ,  Shaun Ogden ,  Brian Bowers

IPC: G02B5/30 ,  G02F1/1335 ,  G02B1/14 ,  G02B1/18 ,  C23C14/12 ,  C23C14/34 ,  C23C14/08 ,  C23C16/30 ,  C23C14/58 ,  C23C28/04 ,  C23C16/455 ,  C23C14/00 ,  C03B19/14

CPC classification number: G02B5/3058 ,  C23C14/0036 ,  C23C14/081 ,  C23C14/12 ,  C23C14/34 ,  C23C14/345 ,  C23C14/5873 ,  C23C16/30 ,  C23C16/45525 ,  C23C28/04 ,  G02B1/14 ,  G02B1/18 ,  G02F1/133548 ,  C03B19/1438 ,  C03C2218/10 ,  C03C2218/111 ,  G02B5/3025

Abstract: A method for making a wire grid polarizer (WGP) can provide WGPs with high temperature resistance, robust wires, oxidation resistance, and corrosion protection. In one embodiment, the method can comprise: (a) providing an array of wires on a bottom protection layer; (b) applying a top protection layer on the wires, spanning channels between wires; then (c) applying an upper barrier-layer on the top protection layer and into the channels through permeable junctions in the top protection layer. In a variation of this embodiment, the method can further comprise applying a lower barrier-layer before applying the top protection layer. In another variation, the bottom protection layer and the top protection layer can include aluminum oxide. In another embodiment, the method can comprise applying on the WGP an amino phosphonate then a hydrophobic chemical.

公开(公告)号：US11609369B2

公开(公告)日：2023-03-21

申请号：US17568842

申请日：2022-01-05

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson

IPC: G02B5/30

Abstract: It would be advantageous to improve polarizer high temperature resistance, corrosion resistance, oxidation resistance, optical properties, and etchability. Composite polarizer materials can be used to achieve this. A polarizer can comprise polarization structures configured for polarization of light. The polarization structures can include a reflective rib, the reflective rib being a composite of two different elements. The polarization structures can include an absorptive rib, the absorptive rib being a composite of two different elements. The polarizer can include a transparent layer, the transparent layer being a composite of two different elements.

公开(公告)号：US20220357495A1

公开(公告)日：2022-11-10

申请号：US17869974

申请日：2022-07-21

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Bob West

IPC: G02B5/30

Abstract: A wire grid polarizer (WGP) can include an array of support-ribs on a substrate. Sides of the support-ribs can be inclined to one side. A wire can be applied on an upper-side and distal end of each support-rib, each wire being separate from wires on adjacent support-ribs. The WGP can be made with reduced or no etching.

公开(公告)号：US11249234B2

公开(公告)日：2022-02-15

申请号：US16929457

申请日：2020-07-15

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson

IPC: G02B5/30

Abstract: It would be advantageous to improve polarizer high temperature resistance, corrosion resistance, oxidation resistance, optical properties, and etchability. Composite polarizer materials can be used to achieve this. A polarizer can comprise polarization structures configured for polarization of light. The polarization structures can include a reflective rib, the reflective rib being a composite of two different elements. The polarization structures can include an absorptive rib, the absorptive rib being a composite of two different elements. The polarizer can include a transparent layer, the transparent layer being a composite of two different elements.

公开(公告)号：US10656309B2

公开(公告)日：2020-05-19

申请号：US16556768

申请日：2019-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/04 ,  G02B1/11 ,  G02B1/115 ,  G02B1/14 ,  G02B1/18 ,  G02B5/30 ,  C09D1/00 ,  C09D5/08 ,  G03B21/20 ,  H04N9/31 ,  G02F1/1335

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US20190391299A1

公开(公告)日：2019-12-26

申请号：US16556768

申请日：2019-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/18 ,  C09D1/00 ,  G02B1/14 ,  C09D5/08 ,  G02B1/04 ,  H04N9/31 ,  G02B1/115 ,  G02B5/30 ,  G02B1/11 ,  G03B21/20

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US10444410B2

公开(公告)日：2019-10-15

申请号：US15691315

申请日：2017-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/11 ,  G02B1/18 ,  G02B5/30 ,  G03B21/20 ,  C09D1/00 ,  C09D5/08 ,  G02B1/04 ,  H04N9/31 ,  G02B1/14 ,  G02B1/115 ,  G02F1/1335

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US10175401B2

公开(公告)日：2019-01-08

申请号：US15265210

申请日：2016-09-14

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams

IPC: G02B5/30 ,  G02B27/28 ,  G03B21/20

Abstract: A WGP 10 can include an array of parallel, elongated rods 14 located over a surface of a transparent substrate 11 with gaps 15 between adjacent rods 14. Each of the rods 14 can include a reflective wire 13 sandwiched between ribs 12. One of the ribs 12 can be a transparent rib and one can be an absorptive rib. The WGP 10 can have high efficiency and high contrast for light entering on the transparent rib side and low Rs for light entering on the absorptive rib side.

公开(公告)号：US20180052270A1

公开(公告)日：2018-02-22

申请号：US15709127

申请日：2017-09-19

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Mathew Free ,  Bradley R. Williams ,  Fred Lane ,  Ted Wangensteen

IPC: G02B5/30 ,  G02B7/00

Abstract: A wire grid polarizer (WGP) can include a heat-dissipation layer. The heat-dissipation layer can enable the WGP to be able to endure high temperatures. The heat-dissipation layer can be located (a) over an array of wires and farther from a transparent substrate than the array of wires; or (b) between the array of wires and the transparent substrate. The heat-dissipation layer can be a continuous layer. The heat-dissipation layer can have a high electrical resistivity and a high coefficient of thermal conductivity.

公开(公告)号：US20230046399A1

公开(公告)日：2023-02-16

申请号：US17974318

申请日：2022-10-26

Applicant: Moxtek, Inc.

Inventor： Daniel Bacon-Brown ,  Michael Black ,  R. Stewart Nielson ,  Bradley R. Williams ,  Benjamin Downard ,  Jeffrey H. Rice ,  JIm Pierce

IPC: G02B5/30

Abstract: A reflective wire grid polarizer (WGP) can include an array of wires 12 on a face of a substrate 11, with channels 15 between adjacent wires 12. The wires 12 can have certain characteristics for WGP performance, such as index of refraction, alternating high/low index continuous thin films, thickness of layer(s), duty cycle, reflective rib shape, a curved side of transparent ribs 21 or 32, aspect ratio, or combinations thereof.