公开(公告)号：US11002899B2

公开(公告)日：2021-05-11

申请号：US16519651

申请日：2019-07-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Matthew C. George ,  Shaun Ogden ,  Brian Bowers

IPC: G02B5/30 ,  G02B1/18 ,  G02B1/14 ,  C23C14/12 ,  C23C14/34 ,  C23C14/08 ,  C23C16/30 ,  C23C14/58 ,  C23C28/04 ,  C23C16/455 ,  C23C14/00 ,  C03B19/14

Abstract: A method for making a wire grid polarizer (WGP) can provide WGPs with high temperature resistance, robust wires, oxidation resistance, and corrosion protection. In one embodiment, the method can comprise: (a) providing an array of wires on a bottom protection layer; (b) applying a top protection layer on the wires, spanning channels between wires; then (c) applying an upper barrier-layer on the top protection layer and into the channels through permeable junctions in the top protection layer. In a variation of this embodiment, the method can further comprise applying a lower barrier-layer before applying the top protection layer. In another variation, the bottom protection layer and the top protection layer can include aluminum oxide. In another embodiment, the method can comprise applying on the WGP an amino phosphonate then a hydrophobic chemical.

公开(公告)号：US10302831B2

公开(公告)日：2019-05-28

申请号：US16163194

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Shaun Ogden ,  R. Stewart Nielson ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B5/04 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) 10 can include a reflective layer 15 sandwiched on each side by a pair of transparent layers (11-12 and 13-14). An index of refraction of each outer transparent layer 11 or 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 or 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same, material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP.

公开(公告)号：US20190049644A1

公开(公告)日：2019-02-14

申请号：US16163111

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Matt Free ,  Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.

公开(公告)号：US20180224590A1

公开(公告)日：2018-08-09

申请号：US15948770

申请日：2018-04-09

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  G02B5/00 ,  G02B5/1857 ,  G02B6/136 ,  G02B17/00 ,  G02B26/00

Abstract: The wire grid polarizer (WGP) comprises an array of parallel, elongated nanostructures located over a surface of a transparent substrate and a plurality of spaces, including a space between adjacent nanostructures. Each of the nanostructures can include (1) a plurality of parallel, elongated wires located on the substrate, including an inner-pair located between an outer-pair; (2) lateral-gaps between each wire of the outer-pair and an adjacent wire of the inner-pair; (3) and a center-gap between the two wires of the inner-pair.

公开(公告)号：US10310155B2

公开(公告)日：2019-06-04

申请号：US16163111

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Matt Free ,  Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B5/04 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.

公开(公告)号：US10302832B2

公开(公告)日：2019-05-28

申请号：US16163284

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B5/04 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) 10 can include wires 15 sandwiched between a first pair of thin-film layers 21 (with a first transparent layer 11 and a second transparent layer 12) and a second pair of thin-film layers 22 (with a third transparent layer 13 and a fourth transparent layer 14). An index of refraction of each outer transparent layer 11 and 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 and 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same and material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP. The wires 15 can be embedded for protection.

公开(公告)号：US20190049645A1

公开(公告)日：2019-02-14

申请号：US16163194

申请日：2018-10-17

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Shaun Ogden ,  R. Stewart Nielson ,  Hua Li ,  Brian Bowers

IPC: G02B5/30

Abstract: A wire grid polarizer (WGP) 10 can include a reflective layer 15 sandwiched on each side by a pair of transparent layers (11-12 and 13-14). An index of refraction of each outer transparent layer 11 or 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 or 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same, material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP.

公开(公告)号：US20180143366A1

公开(公告)日：2018-05-24

申请号：US15715435

申请日：2017-09-26

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Shaun Ogden ,  R. Stewart Nielson ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28

CPC classification number: G02B5/3058 ,  G02B1/14 ,  G02B27/283

Abstract: A wire grid polarizer (WGP) 10 can include a reflective layer 15 sandwiched on each side by a pair of transparent layers (11-12 and 13-14). An index of refraction of each outer transparent layer 11 or 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 or 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same, material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP.

公开(公告)号：US20170322425A1

公开(公告)日：2017-11-09

申请号：US15460913

申请日：2017-03-16

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B27/28 ,  G03B21/20 ,  G02B5/04

CPC classification number: G02B27/283 ,  G02B5/04 ,  G03B21/2073

Abstract: A cube, polarizing beam-splitter can include an irregular-shaped prism to allow reduced incidence angle on the polarizer, thus resulting in improved optical performance.

公开(公告)号：US11714221B2

公开(公告)日：2023-08-01

申请号：US17220370

申请日：2021-04-01

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Matthew C. George ,  Shaun Ogden ,  Brian Bowers

IPC: G02B5/30 ,  G02F1/1335 ,  G02B1/14 ,  G02B1/18 ,  C23C14/12 ,  C23C14/34 ,  C23C14/08 ,  C23C16/30 ,  C23C14/58 ,  C23C28/04 ,  C23C16/455 ,  C23C14/00 ,  C03B19/14

CPC classification number: G02B5/3058 ,  C23C14/0036 ,  C23C14/081 ,  C23C14/12 ,  C23C14/34 ,  C23C14/345 ,  C23C14/5873 ,  C23C16/30 ,  C23C16/45525 ,  C23C28/04 ,  G02B1/14 ,  G02B1/18 ,  G02F1/133548 ,  C03B19/1438 ,  C03C2218/10 ,  C03C2218/111 ,  G02B5/3025

Abstract: A method for making a wire grid polarizer (WGP) can provide WGPs with high temperature resistance, robust wires, oxidation resistance, and corrosion protection. In one embodiment, the method can comprise: (a) providing an array of wires on a bottom protection layer; (b) applying a top protection layer on the wires, spanning channels between wires; then (c) applying an upper barrier-layer on the top protection layer and into the channels through permeable junctions in the top protection layer. In a variation of this embodiment, the method can further comprise applying a lower barrier-layer before applying the top protection layer. In another variation, the bottom protection layer and the top protection layer can include aluminum oxide. In another embodiment, the method can comprise applying on the WGP an amino phosphonate then a hydrophobic chemical.