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78 条记录 (耗时 0.038 秒)

    Control of wafer warpage during backend processing
    11.
    发明授权
    Control of wafer warpage during backend processing 有权
    后端处理期间晶圆翘曲的控制

    公开(公告)号：US07247556B2

    公开(公告)日：2007-07-24

    申请号：US11068237

    申请日：2005-02-28

    申请人： Arun K. Nanda ,  Nace Rossi

    发明人： Arun K. Nanda ,  Nace Rossi

    IPC分类号： H01L21/4763

    CPC分类号： H01L21/76801 ,  H01L21/76832 ,  H01L21/76834 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method of fabricating an integrated circuit (IC), during which wafer warpage is controlled by appropriately controlling intrinsic stresses in one or more service layers of the layer stack of the IC's multilevel interconnect structure. In one embodiment, each interconnect level of the multilevel interconnect structure has a dielectric layer, a conducting layer formed over the dielectric layer, and a service anti-reflective coating (ARC) layer formed over the conducting layer. Each ARC layer is formed from silicon oxynitride such that at least two ARC layers corresponding to different interconnect levels have different intrinsic stresses. The amount of intrinsic stress in each ARC layer is controlled, e.g., through the control of temperature and/or gas composition during the layer deposition.

    摘要翻译： 一种制造集成电路（IC）的方法，其中通过适当地控制IC多层互连结构的层堆叠的一个或多个服务层中的固有应力来控制晶片翘曲。 在一个实施例中，多层互连结构的每个互连级别具有电介质层，形成在电介质层上的导电层，以及形成在导电层上的功能抗反射涂层（ARC）层。 每个ARC层由氮氧化硅形成，使得对应于不同互连级别的至少两个ARC层具有不同的固有应力。 每个ARC层中的固有应力的量被控制，例如通过控制层沉积期间的温度和/或气体组成。

    Generic interactive challenges in a distributed system
    12.
    发明授权
    Generic interactive challenges in a distributed system 有权
    分布式系统中的通用交互式挑战

    公开(公告)号：US07945950B2

    公开(公告)日：2011-05-17

    申请号：US11925734

    申请日：2007-10-26

    申请人： Arun K. Nanda ,  Christopher G. Kaler ,  Tariq Sharif

    发明人： Arun K. Nanda ,  Christopher G. Kaler ,  Tariq Sharif

    IPC分类号： G06F7/04

    CPC分类号： H04L63/08 ,  G06F21/31 ,  G06F2221/2103

    摘要： A challenge mechanism in which a challenge is issued from one message processor to another. In generating the challenge, the message processor may select any one or more of a number of available interactive challenge types, where each type of challenge type might use different user-originated information. Upon receiving the challenge, the challengee message processor may identify the challenge type based on information provided in the challenge, and perform different actions depending on the challenge type. The challengee message processor then generates an appropriate challenge response, and issues that challenge response to the challenger message processor. The challenger message processor may then validate the challenge response.

    摘要翻译： 挑战机制，其中挑战是从一个消息处理器发出到另一个。 在产生挑战时，消息处理器可以选择多个可用的交互式挑战类型中的任何一个或多个，其中每种类型的挑战类型可以使用不同的用户发起的信息。 在接收到挑战时，挑战者消息处理器可以基于挑战中提供的信息识别挑战类型，并根据挑战类型执行不同的动作。 挑战者消息处理器然后生成适当的挑战响应，并且向挑战者消息处理器发出挑战响应。 挑战者消息处理器然后可以验证挑战响应。

    Method and system for consistent recognition of ongoing digital relationships
    13.
    发明授权
    Method and system for consistent recognition of ongoing digital relationships 有权
    持续确认数字关系的方法和系统

    公开(公告)号：US07739500B2

    公开(公告)日：2010-06-15

    申请号：US11074972

    申请日：2005-03-07

    申请人： Kim Cameron ,  Arun K. Nanda ,  Andy Harjanto ,  Stuart L. S. Kwan

    发明人： Kim Cameron ,  Arun K. Nanda ,  Andy Harjanto ,  Stuart L. S. Kwan

    IPC分类号： H04L9/00

    CPC分类号： H04L63/0823 ,  H04L9/3263 ,  H04L2209/56

    摘要： Exemplary embodiments disclosed herein may include a method and system for creating an attendance marker and establishing consistent recognition of an ongoing digital relationship, including receiving an identity key about a server, creating an attendance marker, associating the attendance marker with the server. Other embodiments relate to systems and methods for recognizing a server, website, and/or other system for a client, such as a computer system for a user. Such authentication involves receiving an identity key about a web server or other system, creating an attendance marker, associating the attendance marker with the server, requesting an attendance marker associated with a server, and recognizing the server based at least in part on the attendance marker.

    摘要翻译： 本文公开的示例性实施例可以包括用于创建考勤标记并建立持续数字关系的一致性识别的方法和系统，包括接收关于服务器的身份密钥，创建考勤标记，将考勤标记与服务器相关联。 其他实施例涉及用于识别用于客户端的服务器，网站和/或其他系统的系统和方法，诸如用于用户的计算机系统。 这种认证涉及接收关于web服务器或其他系统的身份密钥，创建考勤标记，将考勤标记与服务器相关联，请求与服务器相关联的考勤标记，以及至少部分地基于考勤标记识别服务器 。

    DIGITALLY SIGNING DOCUMENTS USING IDENTITY CONTEXT INFORMATION
    14.
    发明申请
    DIGITALLY SIGNING DOCUMENTS USING IDENTITY CONTEXT INFORMATION 有权
    使用身份识别信息的数字签名文件

    公开(公告)号：US20090319795A1

    公开(公告)日：2009-12-24

    申请号：US12143392

    申请日：2008-06-20

    申请人： Tariq Sharif ,  Arun K. Nanda ,  Craig H. Wittenberg ,  Lucas R. Melton ,  Richard Randall ,  Kim Cameron ,  Hervey O. Wilson

    发明人： Tariq Sharif ,  Arun K. Nanda ,  Craig H. Wittenberg ,  Lucas R. Melton ,  Richard Randall ,  Kim Cameron ,  Hervey O. Wilson

    IPC分类号： H04L9/00

    CPC分类号： G06F21/64 ,  G06F2221/2117 ,  H04L63/0823 ,  H04L63/123

    摘要： Creating a token for use by an entity when digitally signing documents. In a computing environment, a digital identity representation for an entity is accessed. The digital identity representation includes information identifying identity attributes about the entity and capabilities of an identity provider that provides tokens for use by the entity. Context information is accessed. The context information includes information about one or more of which, how or where the attributes for the entity identified in the digital identity representation will be used. A security token is created from the information in the digital identity representation and the context information. The security token makes assertions by the identity provider. The assertions are based on the information in the digital identity representation. The token further includes information related to at least a portion of the context information.

    摘要翻译： 创建一个令牌供实体在数字签署文档时使用。 在计算环境中，访问实体的数字身份表示。 数字身份表示包括识别关于实体的身份属性的信息以及提供令牌以供实体使用的身份提供者的能力。 访问上下文信息。 上下文信息包括关于在数字身份表示中识别的实体的属性的一个或多个，如何或何处被使用的信息。 根据数字身份表示和上下文信息中的信息创建安全令牌。 安全令牌由身份提供者进行断言。 断言是基于数字身份表示中的信息。 令牌还包括与上下文信息的至少一部分相关的信息。

    REFERENCE TOKENS
    16.
    发明申请
    REFERENCE TOKENS 有权
    参考标尺

    公开(公告)号：US20080082638A1

    公开(公告)日：2008-04-03

    申请号：US11537019

    申请日：2006-09-29

    申请人： Christopher G. Kaler ,  Arun K. Nanda

    发明人： Christopher G. Kaler ,  Arun K. Nanda

    IPC分类号： G06F15/177 ,  G06F15/173 ,  G06F15/16

    CPC分类号： H04L63/0807

    摘要： Providing reference tokens. A method includes receiving a request for a token. In response to the request for a token and in place of a token, one or more rich pointers are sent referencing one or more tokens. The rich pointers point to locations where one or more actual tokens can be retrieved. When only a single pointer is sent, the pointer is a reference other than an HTTP URL.

    摘要翻译： 提供引用令牌。 一种方法包括接收对令牌的请求。 响应于令牌的请求并代替令牌，发送一个或多个富指针，引用一个或多个令牌。 丰富的指针指向可以检索一个或多个实际令牌的位置。 当只发送一个指针时，该指针是HTTP URL以外的引用。

    System and method for enforcing quotas on object creation in a replicated directory service database
    17.
    发明授权
    System and method for enforcing quotas on object creation in a replicated directory service database 有权

    公开(公告)号：US07290053B2

    公开(公告)日：2007-10-30

    申请号：US11083502

    申请日：2005-03-18

    申请人： Arun K. Nanda ,  Donald J. Hacherl

    发明人： Arun K. Nanda ,  Donald J. Hacherl

    IPC分类号： G06F15/173 ,  G06F12/00

    CPC分类号： H04L61/1523 ,  H04L29/12141 ,  H04L61/1558 ,  Y10S707/99953 ,  Y10S707/99957

    摘要： A system and method for managing the creation of objects in a distributed directory service system assigns quotas to entities (such as users, computers, groups) to limit the number of objects each entity is allowed to create and own. For purposes of enforcing the quotas, tombstones generated for deleted objects are taken into account in the calculation of a weighted total number of objects owned by an entity, with each tombstone counted as a configurable fraction of a regular object. When an entity requests a directory operation that will increase the number of objects owned by that entity, the number of system objects owned by that entity is added to the number of tombstones multiplied by the fractional tombstone factor to generate the weighted total, which is compared to the quota of that entity to determine when the requested operation should be performed.

    Method for recycling wafers used for quality assurance testing of integrated circuit fabrication equipment
    19.
    发明授权
    Method for recycling wafers used for quality assurance testing of integrated circuit fabrication equipment 失效
    用于回收用于集成电路制造设备的质量保证测试的晶圆的方法

    公开(公告)号：US6140211A

    公开(公告)日：2000-10-31

    申请号：US122276

    申请日：1998-07-24

    申请人： Arun K. Nanda ,  Jose O. Rodriguez

    发明人： Arun K. Nanda ,  Jose O. Rodriguez

    IPC分类号： H01L21/304 ,  H01L21/301

    CPC分类号： H01L21/02032

    摘要： A method for recycling a used silicon wafer on which ICs have been formed by IC fabrication equipment comprised of first grinding the wafer using a coarse grinding apparatus and then grinding the wafer suing a fine grinding apparatus. The coarse grinding apparatus and the fine grinding apparatus are identical to one another except for the nature of the respective grinding they perform. Deionized water is used during both grinding processes to reduce friction and to control dust. The used wafer is first mounted on a chuck of the coarse grinding apparatus that rotates at a first predetermined speed. A diamond wheel mounted on a grinding wheel holder of the coarse grinding apparatus rotates at a second predetermined speed that is faster than the first speed. The rotating wheel and the rotating wafer are brought into contact with one another and the wafer is ground until a predetermined amount of semiconductor material is removed from the face of the wafer. The wafer is then placed in the fine grinding apparatus and subjected to an identical grinding process. The loss of wafer thickness from both the coarse and fine grinding processes is no more than 50 microns. The resulting wafer is suitable for reuse in IC fabrication processes and has performance characteristics comparable with those of virgin wafers. The recycling process of the present invention typically takes only about 30-40 seconds.

    摘要翻译： 一种用于回收利用IC制造设备已经形成有IC的用过的硅晶片的方法，该方法包括：首先使用粗磨设备研磨晶片，然后研磨抛光精磨机。 粗磨装置和细磨装置除了各自研磨的性质外，是相同的。 在两个研磨过程中都使用去离子水来减少摩擦和控制灰尘。 所使用的晶片首先安装在以第一预定速度旋转的粗磨设备的卡盘上。 安装在粗磨机的砂轮架上的金刚石砂轮以比第一速度快的第二预定速度旋转。 旋转轮和旋转晶片彼此接触并且研磨晶片直到从晶片的表面去除预定量的半导体材料。 然后将晶片放置在细研磨装置中并进行相同的研磨处理。 粗磨和精磨过程中晶片厚度的损失不超过50微米。 所得到的晶片适用于IC制造工艺中的再利用，并具有与原始晶片相当的性能特征。 本发明的回收方法通常只需要约30-40秒。