Uneven pattern sensing device
    11.
    发明授权
    Uneven pattern sensing device 有权
    不均匀图案感测装置

    公开(公告)号:US06828805B2

    公开(公告)日:2004-12-07

    申请号:US10087998

    申请日:2002-03-05

    IPC分类号: G01R2726

    CPC分类号: H01L27/12

    摘要: What are formed on an insulating substrate are gate electrodes and data electrodes provided in a grid pattern, a TFT provided in each grid and connected to the gate electrode and the data electrode, an interlayer insulating film formed on the TFT and including a contact hole penetrating the film itself, and a sense electrode provided on the interlayer insulating film and passing through the contact hole. On the interlayer insulating film, an upper layer insulating film is formed so as to cover the sense electrode. A surface of the interlayer insulating film in which surface the sense electrode is formed is flat. On this account, it is possible to provide an uneven pattern sensing device capable of smoothing out a surface thereof without any increase of the manufacturing process and limitation of a choice of materials for a protective film.

    摘要翻译: 在绝缘基板上形成的是以栅格图案设置的栅电极和数据电极,设置在每个栅格中并连接到栅电极和数据电极的TFT,在TFT上形成的层间绝缘膜,并且包括穿透 膜本身和设置在层间绝缘膜上并通过接触孔的感测电极。 在层间绝缘膜上形成上层绝缘膜以覆盖感测电极。 形成感测电极的表面的层间绝缘膜的表面是平坦的。 因此,可以提供能够平滑其表面的不均匀图案感测装置,而不会增加制造工艺和限制保护膜材料的选择。

    Two-dimensional image detecting device and manufacturing method thereof
    12.
    发明授权
    Two-dimensional image detecting device and manufacturing method thereof 有权
    二维图像检测装置及其制造方法

    公开(公告)号:US06798030B1

    公开(公告)日:2004-09-28

    申请号:US09459641

    申请日:1999-12-13

    IPC分类号: H01L3100

    摘要: In a two-dimensional image detecting device, an active-matrix substrate and an opposing substrate are bonded to each other via conductive connecting members and space keeping members, that are disposed respectively for pixels, such that pixel electrodes and electrical charge collecting electrodes oppose each other. The pixel electrodes are formed on the active-matrix substrate, and the electrical charge collecting electrodes are formed on the opposing substrate. Further, when a resin material of the space keeping members is soft, reinforcing members, which have electrical insulation and are hardly deformed in a thermocompression bonding, are dispersed into the resin material, so that the space keeping ability is fully exhibited. According to this arrangement, it is possible to improve the responsivity so as to respond to a moving image. Additionally, an even space can be achieved between the substrates, and it is possible to prevent a connecting defect and a defect caused by a leak between the substrates.

    摘要翻译: 在二维图像检测装置中,有源矩阵基板和相对基板通过分别设置在像素上的导电连接部件和空间保持部件彼此接合,使得像素电极和电荷收集电极相对于每个 其他。 像素电极形成在有源矩阵基板上,电荷收集电极形成在相对的基板上。 此外,当空间保持构件的树脂材料柔软时,在热压接中具有电绝缘并且几乎不变形的增强构件被分散到树脂材料中,从而充分发挥空间保持能力。 根据该结构,可以提高响应度以响应运动图像。 此外,可以在基板之间实现均匀的空间,并且可以防止连接缺陷和由基板之间的泄漏引起的缺陷。

    Two-dimensional image detector and fabrication method of the same
    13.
    发明授权
    Two-dimensional image detector and fabrication method of the same 失效
    二维图像检测器及其制作方法相同

    公开(公告)号:US06603106B2

    公开(公告)日:2003-08-05

    申请号:US09766591

    申请日:2001-01-23

    IPC分类号: H01L2700

    摘要: The invention provides a two-dimensional image detector having superior uniformity in thickness and composition of a photoconductive layer with respect to the entire substrate, and a method of productively (efficiently) and inexpensively manufacturing such a two-dimensional image detector. The two-dimensional image detector includes at least an active matrix substrate 1 having a plurality of pixel electrodes 10, and a photoconductive layer 2 stacked on the pixel electrodes 10, wherein the photoconductive layer 2 is transferred to the active matrix substrate 1 after being formed in a predetermined thickness on a transfer substrate. That is, a fabrication method of the two-dimensional image detector is the method in which the photoconductive layer 2 is formed in advance in a predetermined thickness on the transfer substrate and then transferred on the active matrix substrate 1. The photoconductive layer 2 includes a mixture of particulate photoconductors and a binder. The binder preferably has a softening point which is not more than a heat resistant temperature of the active matrix substrate 1.

    摘要翻译: 本发明提供了一种二维图像检测器,其具有相对于整个基板的光电导层的厚度和组成的均匀性优异,以及高效(有效地)并且廉价地制造这种二维图像检测器的方法。 二维图像检测器至少包括具有多个像素电极10的有源矩阵基板1和堆叠在像素电极10上的光电导层2,其中光导电层2在形成之后转移到有源矩阵基板1上 在转印基板上的预定厚度。 也就是说,二维图像检测器的制造方法是其中在转印衬底上预先形成预定厚度的光导电层2然后转移到有源矩阵衬底1上的方法。光电导层2包括 颗粒感光体和粘合剂的混合物。 粘合剂优选具有不大于有源矩阵基板1的耐热温度的软化点。

    Two-dimensional image detector with electrodes on counter substrate
    14.
    发明授权
    Two-dimensional image detector with electrodes on counter substrate 失效
    二维图像检测器,电极对置基板

    公开(公告)号:US06340812B1

    公开(公告)日:2002-01-22

    申请号:US09397147

    申请日:1999-09-16

    IPC分类号: H01J2700

    CPC分类号: H01L27/14665 H01L31/00

    摘要: A method for manufacturing a two-dimensional image detector in which electrically connected via a conductive material such as an anisotropic conductive adhesive are (i) an active matrix substrate having a pixel-arrayed layer including pixel electrodes and switching elements arranged in a lattice form and (ii) a counter substrate having a semiconductor layer with photoconductivity and an electrode section composed of connecting electrodes, a carrier blocking layer, etc., formed so as to face substantially an entirety of a surface of the pixel-arrayed layer, includes the step of (a) forming a plurality of protuberance electrodes on a connection surface of the counter substrate by blasting. By the foregoing method, a plurality of protuberance electrodes with a uniform height can be easily formed on one and same substrate. By connecting such a counter substrate having a plurality of protuberance electrodes with a uniform height with the active matrix substrate by means of an anisotropic conductive adhesive, a two-dimensional image detector hardly prone to connection defects can be provided even in the case where electric connection has to be obtained densely in a large surface area.

    摘要翻译: 通过诸如各向异性导电粘合剂的导电材料电连接的二维图像检测器的制造方法是(i)具有像素阵列层的有源矩阵基板,该像素阵列层包括以格子形式布置的像素电极和开关元件, (ii)具有光电导率的半导体层的对置基板和形成为面对大致整个像素排列层表面的连接电极,载流子阻挡层等的电极部分,包括步骤 (a)通过喷砂在对置基板的连接表面上形成多个突起电极。 通过上述方法,可以容易地在同一基板上形成具有均匀高度的多个突起电极。 通过借助于各向异性导电粘合剂将具有均匀高度的多个突起电极的对置基板与有源矩阵基板连接起来,即使在电连接的情况下也可以提供几乎不易发生连接缺陷的二维图像检测器 必须在大面积上密集获得。

    Two-dimensional image detector
    15.
    发明授权
    Two-dimensional image detector 有权
    二维图像检测器

    公开(公告)号:US06242729B1

    公开(公告)日:2001-06-05

    申请号:US09274316

    申请日:1999-03-23

    IPC分类号: H01J2700

    CPC分类号: H01L27/14676 H01L27/14665

    摘要: A two-dimensional image detector is provided with an active-matrix substrate, which has lattice-shaped wiring, a plurality of thin-film transistors installed at the respective lattice points of the electrode wiring and a plurality of pixel electrodes, an opposing substrate, which has a semiconductor layer having a photoconductive property, and conductive members for connecting the pixel electrodes and the semiconductor electrode. In the gap between the active-matrix substrate and the opposing substrate, areas having no conductive members are filled with an inactive gas.

    摘要翻译: 二维图像检测器设置有具有格子状布线的有源矩阵基板,安装在电极布线的各格点处的多个薄膜晶体管和多个像素电极,相对的基板, 其具有具有光电导性的半导体层和用于连接像素电极和半导体电极的导电构件。 在有源矩阵基板和相对基板之间的间隙中,没有导电部件的区域填充有惰性气体。

    Active matrix substrate having transparent connecting terminals
    16.
    发明授权
    Active matrix substrate having transparent connecting terminals 有权
    有源矩阵基板具有透明连接端子

    公开(公告)号:US06781109B2

    公开(公告)日:2004-08-24

    申请号:US10265408

    申请日:2002-10-07

    IPC分类号: H01L3100

    摘要: An active-matrix substrate is provided with electrode wires disposed in a lattice form, a plurality of switching elements disposed respectively at intersections of the electrode wires, and connecting terminals for connecting the electrode wires to the outside, the electrode wires include metal electrodes, and at least parts of the connecting terminals have a property of transmitting light. A two-dimensional image detector includes the active-matrix substrate and the amorphous semiconductor layer, which is formed on the active-matrix substrate and has electromagnetic wave conductivity. The connecting terminals are connected with the outside via an anisotropic conductive adhesive having photo-reactivity. A display device includes the active-matrix substrate and an opposing substrate which is disposed so as to oppose the active-matrix substrate via an electro-optical medium, and the connecting terminals are connected to the outside via an anisotropic conductive adhesive having photo-reactivity.

    摘要翻译: 有源矩阵基板设置有格栅形状的电极线,分别设置在电极线的交点处的多个开关元件和用于将电极线连接到外部的连接端子,电极线包括金属电极,以及 连接端子的至少一部分具有透光的性质。 二维图像检测器包括有源矩阵基板和非晶半导体层,其形成在有源矩阵基板上并具有电磁波导电性。 连接端子通过具有光反应性的各向异性导电粘合剂与外部连接。 显示装置包括有源矩阵基板和相对基板,其经由电光介质与有源矩阵基板相对设置,并且连接端子通过具有光反应性的各向异性导电粘合剂连接到外部 。

    Manufacturing method for two-dimensional image detectors and two-dimensional image detectors
    18.
    发明授权
    Manufacturing method for two-dimensional image detectors and two-dimensional image detectors 有权
    二维图像检测器和二维图像检测器的制造方法

    公开(公告)号:US06638782B2

    公开(公告)日:2003-10-28

    申请号:US10329502

    申请日:2002-12-27

    IPC分类号: H01L2166

    摘要: A TFT array is formed on a glass substrate (step P1) A surface protection layer is formed on the glass substrate so as to cover the TFT a-ray (step P2). The glass substrate is divided to form active matrix substrates with the surface protection layer being provided (step P3). The divided active matrix substrate is chamfered along its edges (step P4). The surface protection layer is removed from the active matrix substrate (step P5). An X-ray conductive layer is formed on the TFT array where the surface protection layer has been removed (step P6). By these steps, pollutants produced during the division and chamfering of the glass substrate are prevented from polluting the TFT array and the X-ray conductive layer, and the active element array and the semiconductor layer is prevented from deteriorating in terms of performance in manufacturing process for a two-dimensional image detector.

    摘要翻译: 在玻璃基板上形成TFT阵列(步骤P1)在玻璃基板上形成表面保护层以覆盖TFT a射线(步骤P2)。 玻璃基板被分割以形成具有表面保护层的有源矩阵基板(步骤P3)。 分割的有源矩阵基板沿其边缘倒角(步骤P4)。 从有源矩阵基板去除表面保护层(步骤P5)。 在去除表面保护层的TFT阵列上形成X射线导电层(步骤P6)。 通过这些步骤,防止在玻璃基板的分割和倒角期间产生的污染物污染TFT阵列和X射线导电层,并且防止有源元件阵列和半导体层在制造过程中的性能方面劣化 用于二维图像检测器。

    Two-dimensional image detector, active-matrix substrate, and display device
    19.
    发明授权
    Two-dimensional image detector, active-matrix substrate, and display device 有权
    二维图像检测器,有源矩阵基板和显示装置

    公开(公告)号:US06518557B1

    公开(公告)日:2003-02-11

    申请号:US09477338

    申请日:2000-01-04

    IPC分类号: H01L2700

    摘要: An active-matrix substrate is provided with electrode wires disposed in a lattice form, a plurality of switching elements disposed respectively at intersections of the electrode wires, and connecting terminals for connecting the electrode wires to the outside, the electrode wires include metal electrodes, and at least parts of the connecting terminals have a property of transmitting light. A two-dimensional image detector includes the active-matrix substrate and the amorphous semiconductor layer, which is formed on the active-matrix substrate and has electromagnetic wave conductivity. The connecting terminals are connected with the outside via an anisotropic conductive adhesive having photo-reactivity. A display device includes the active-matrix substrate and an opposing substrate which is disposed so as to oppose the active-matrix substrate via an electro-optical medium, and the connecting terminals are connected to the outside via an anisotropic conductive adhesive having photo-reactivity.

    摘要翻译: 有源矩阵基板设置有格栅形状的电极线,分别设置在电极线的交点处的多个开关元件和用于将电极线连接到外部的连接端子,电极线包括金属电极,以及 连接端子的至少一部分具有透光的性质。 二维图像检测器包括有源矩阵基板和非晶半导体层,其形成在有源矩阵基板上并具有电磁波导电性。 连接端子通过具有光反应性的各向异性导电粘合剂与外部连接。 显示装置包括有源矩阵基板和相对基板,其经由电光介质与有源矩阵基板相对设置,并且连接端子通过具有光反应性的各向异性导电粘合剂连接到外部 。

    Two-dimensional image detecting device and manufacturing method thereof
    20.
    发明授权
    Two-dimensional image detecting device and manufacturing method thereof 有权
    二维图像检测装置及其制造方法

    公开(公告)号:US06392217B1

    公开(公告)日:2002-05-21

    申请号:US09437470

    申请日:1999-11-10

    IPC分类号: H01L2700

    摘要: A two-dimensional image detecting device is provided with an active-matrix substrate including electrode wires, switching elements, and pixel electrodes; and an opposing substrate including electrode sections and a semiconductive layer. The substrates are disposed such that pixel electrodes and a semiconductive layer oppose each other, and are electrically connected with each other via a conductive material. Projecting electrodes are formed in accordance with the pixel electrodes on a connecting surface of at least one of the active-matrix substrate and the opposing substrate. An exterior wall is formed by a sealing material at an edge of the connecting surface so as to shut off a space between the substrates. With this arrangement, spaces among the projecting electrodes are sealed from the outside; thus, when air in the outside is allowed to be pressurized, it is possible to apply the same pressure as an external pressure due to a pressure difference between the outside and the space between the bonding surfaces of the substrates. Consequently, the active-matrix substrate and the opposing substrate can be connected to each other with high reliability.

    摘要翻译: 二维图像检测装置设置有包括电极线,开关元件和像素电极的有源矩阵基板; 以及包括电极部分和半导体层的相对基板。 基板被设置成使得像素电极和半导体层彼此相对,并且通过导电材料彼此电连接。 投影电极根据有源矩阵基板和相对基板中的至少一个的连接表面上的像素电极形成。 在连接表面的边缘处由密封材料形成外壁,以便切断基板之间的空间。 通过这种布置,突出电极之间的空间与外部密封; 因此,当外部的空气被允许加压时,由于外部和基板的接合表面之间的空间之间的压力差,可以施加与外部压力相同的压力。 因此,有源矩阵基板和相对基板可以高可靠性地彼此连接。