公开(公告)号：US20220270874A1

公开(公告)日：2022-08-25

申请号：US17692977

申请日：2022-03-11

申请人： Psiquantum, Corp.

发明人： Yong Liang ,  Vimal Kumar Kamineni

IPC分类号： H01L21/02 ,  H01L21/28

摘要： A method for removing a native oxide film from a semiconductor substrate includes repetitively depositing layers of germanium on the native oxide and heating the substrate causing the layer of germanium to form germanium oxide, desorbing a portion of the native oxide film. The process is repeated until the oxide film is removed. A subsequent layer of strontium titanate can be deposited on the semiconductor substrate, over either residual germanium or a deposited germanium layer. The germanium can be converted to silicon germanium oxide by exposing the strontium titanate to oxygen.

公开(公告)号：US11302528B2

公开(公告)日：2022-04-12

申请号：US16791948

申请日：2020-02-14

申请人： PsiQuantum Corp.

发明人： Yong Liang ,  Vimal Kumar Kamineni

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L21/28

摘要： A method for removing a native oxide film from a semiconductor substrate includes repetitively depositing layers of germanium on the native oxide and heating the substrate causing the layer of germanium to form germanium oxide, desorbing a portion of the native oxide film. The process is repeated until the oxide film is removed. A subsequent layer of strontium titanate can be deposited on the semiconductor substrate, over either residual germanium or a deposited germanium layer. The germanium can be converted to silicon germanium oxide by exposing the strontium titanate to oxygen.

公开(公告)号：US20220107518A1

公开(公告)日：2022-04-07

申请号：US17552240

申请日：2021-12-15

申请人： PSIQUANTUM, CORP.

发明人： Yong Liang ,  Mark G. Thompson ,  Chia-Ming Chang ,  Vimal Kumar Kamineni

IPC分类号： G02F1/035 ,  G02F1/225 ,  G02F1/21

摘要： An electro-optic device includes a substrate and a waveguide on the substrate. The waveguide includes a layer stack including a plurality of electro-optic material layers interleaved with a plurality of interlayers and a waveguide core adjacent to the layer stack. The waveguide may include a pair of electrodes in electrical contact with the plurality of electro-optic material layers. The plurality of interlayers maintains a first lattice structure at room temperature and a cryogenic temperature. The plurality of electro-optic material layers maintains a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.