公开(公告)号：US07688451B2

公开(公告)日：2010-03-30

申请号：US11652979

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B11/303 ,  G01B9/02003

摘要： A heterodyne interferometer having two interferometer arms and one optical modulator for changing the frequency of a radiation conducted via one interferometer arm and having a control device for setting the frequency change of the radiation and a detector device for analyzing the interfered output radiation. The amplitude of an input beam conducted into the heterodyne interferometer is modulated using a frequency which is different from the frequency change of the radiation in the optical modulator prior to being split between the interferometer arms. A heterodyne frequency corresponding to the difference of the frequency change of the radiation and the frequency of the amplitude modulation of the radiation may be achieved.

摘要翻译： 一种具有两个干涉仪臂和一个光学调制器的外差干涉仪，用于改变通过一个干涉仪臂传播的辐射的频率，并具有用于设置辐射频率变化的控制装置和用于分析受干扰的输出辐射的检测器装置。 使用在干涉仪臂之间分裂之前，使用与光调制器中的辐射的频率变化不同的频率来调制传导到外差干涉仪中的输入光束的幅度。 可以实现与辐射的频率变化的差异和辐射的幅度调制的频率对应的外差频率。

公开(公告)号：US20070247632A1

公开(公告)日：2007-10-25

申请号：US11652979

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B9/02

CPC分类号： G01B11/303 ,  G01B9/02003

摘要： A heterodyne interferometer having two interferometer arms and one optical modulator for changing the frequency of a radiation conducted via one interferometer arm and having a control device for setting the frequency change of the radiation and a detector device for analyzing the interfered output radiation. The amplitude of an input beam conducted into the heterodyne interferometer is modulated using a frequency which is different from the frequency change of the radiation in the optical modulator prior to being split between the interferometer arms. A heterodyne frequency corresponding to the difference of the frequency change of the radiation and the frequency of the amplitude modulation of the radiation may be achieved.

摘要翻译： 一种具有两个干涉仪臂和一个光学调制器的外差干涉仪，用于改变通过一个干涉仪臂传播的辐射的频率，并具有用于设置辐射频率变化的控制装置和用于分析受干扰的输出辐射的检测器装置。 使用在干涉仪臂之间分裂之前，使用与光调制器中的辐射的频率变化不同的频率来调制传导到外差干涉仪中的输入光束的幅度。 可以实现与辐射的频率变化的差异和辐射的幅度调制的频率对应的外差频率。

公开(公告)号：US07889354B2

公开(公告)日：2011-02-15

申请号：US12067501

申请日：2006-09-15

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G01B11/02

CPC分类号： G01B9/02049 ,  G01B9/02065 ,  G01B9/0209

摘要： A device for an interferometric measuring device having a first interferometer and a second interferometer, short coherent radiation being supplied to the first interferometer via a radiation source which is split into to beam components by a first beam splitter; and the optical path length in a beam component being longer than in the other beam component to the effect that the optical path difference is greater than the coherence length of the radiation; before emerging from the first interferometer, the two beam components being recombined and supplied to the second interferometer, which splits the radiation into two additional beam components; the optical path lengths of the two beam components being different to the effect that the optical path difference registered in the first interferometer is balanced again; the optical path length for the respective beam component in the first and the second interferometer being able to be set by at least one movable optical component, and the movable optical components are coupled to each other mechanically. A method for balancing an optical path difference in such an interferometric measuring device, the optical path differences between the beam components being changed in the two interferometers by mechanically coupled movable optical components at the same time and by the same absolute amount. By doing this, path differences in the beam components of the interferometers are able to be varied in one working step, the conditions for the formation of interference being complied with.

摘要翻译： 一种用于具有第一干涉仪和第二干涉仪的干涉测量装置的装置，短的相干辐射经由辐射源提供给第一干涉仪，该辐射源通过第一分束器分成束分量; 并且光束分量中的光路长度比另一个光束分量中的光程长度大，使得光程差大于辐射的相干长度; 在从第一干涉仪出射之前，将两个光束分量重新组合并提供给第二干涉仪，其将辐射分成两个额外的光束分量; 两个光束分量的光路长度不同于第一干涉仪中记录的光路差异再次平衡的影响; 第一和第二干涉仪中的各个光束分量的光路长度能够由至少一个可移动光学部件设置，并且可移动的光学部件彼此机械耦合。 一种用于平衡这种干涉测量装置中的光程差的方法，通过机械耦合的可移动光学部件同时和相同的绝对量在两个干涉仪之间改变光束分量之间的光程差。 通过这样做，可以在一个工作步骤中改变干涉仪的光束分量中的路径差异，从而达到形成干扰的条件。

公开(公告)号：US20070268584A1

公开(公告)日：2007-11-22

申请号：US11652942

申请日：2007-01-11

申请人： Stefan Franz ,  Matthias Fleischer

发明人： Stefan Franz ,  Matthias Fleischer

IPC分类号： G02B27/00

CPC分类号： G01B11/2441 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/35

摘要： The present invention relates to an interferometric measuring device having a short-coherent radiation source, a modulation interferometer and a downstream reference interferometer connected thereto. The mechanical coupling between the reference interferometer and the modulation interferometer is provided with a backlash. For equalizing an optical path difference in the interferometric measuring device, an optical path difference established in the modulation interferometer is reset in the reference interferometer. The optical path differences between the partial beams in the modulation interferometer and between the partial beams in the reference interferometer may be changed via optical components mechanically coupled with the aid of a backlash, the movable optical component of the reference interferometer following a movement of the movable optical component of the modulation interferometer after passing a backlash distance in the backlash.

摘要翻译： 本发明涉及具有短相干辐射源，调制干涉仪和连接到其上的下行参考干涉仪的干涉测量装置。 参考干涉仪与调制干涉仪之间的机械耦合提供了间隙。 为了均衡干涉测量装置中的光程差，在参考干涉仪中复位在调制干涉仪中建立的光程差。 调制干涉仪中的部分光束和参考干涉仪中的部分光束之间的光程差可以通过借助于间隙机械耦合的光学部件来改变，参考干涉仪的可移动光学部件跟随可移动的移动 通过间隙中的间隙距离后的调制干涉仪的光学部件。

公开(公告)号：US20110116100A1

公开(公告)日：2011-05-19

申请号：US12736657

申请日：2009-04-01

申请人： Matthias Fleischer

发明人： Matthias Fleischer

IPC分类号： G01B11/02 ,  G01N21/01

CPC分类号： G01B11/272 ,  G01B9/02007 ,  G01B9/02072 ,  G01B9/0209

摘要： The invention relates to an arrangement for aligning a measured object (2) with a detector (5), said arrangement comprising illumination means (10) producing an illumination beam path (15) and used to illuminate the object (2) to be measured, and adjusting means (8) used to adjust the position of the object (2) to be measured in relation to the detector (5). According to the invention, the illumination means (10) comprise at least two individually controllable partial illumination means (12, 13).

摘要翻译： 本发明涉及一种用于将测量对象（2）与检测器（5）对准的装置，所述装置包括产生照明光束路径（15）的照明装置（10）并用于照亮待测物体（2） 以及用于相对于检测器（5）调节被测量物体（2）的位置的调节装置（8）。 根据本发明，照明装置（10）包括至少两个可单独控制的部分照明装置（12,13）。

公开(公告)号：US08625103B2

公开(公告)日：2014-01-07

申请号：US12736656

申请日：2009-04-01

申请人： Matthias Fleischer ,  Thomas Seiffert

发明人： Matthias Fleischer ,  Thomas Seiffert

IPC分类号： G01B11/02

CPC分类号： G01B9/02028 ,  G01B9/02021 ,  G01B9/02069 ,  G01B9/0209

摘要： An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an adjusting arrangement for adjusting a path difference between the measuring beams and the reference beams, and a having a detector for recording images of the superposition of the reference beams and the measuring beams reflected by the measured object. According to the present system, a synchronization arrangement is used to control the adjusting arrangement so that the path difference between the measuring beams and the reference beams is adjusted in synchronization with the images recorded by the detector. The present system also relates to a method for adjusting a path difference.

摘要翻译： 一种用于测量被测物体的干涉测量系统，具有用于产生测量光束路径的装置，测量指向被测物体的光束，具有用于产生参考光束路径的布置，参考光束被引导至参考元件，具有调节 用于调整测量光束和参考光束之间的路径差的装置，以及具有用于记录参考光束的叠加和被测量物体反射的测量光束的叠加图像的检测器。 根据本系统，使用同步装置来控制调节装置，使得测量光束和参考光束之间的路径差异与由检测器记录的图像同步地被调节。 本系统还涉及用于调整路径差的方法。

公开(公告)号：US6109467A

公开(公告)日：2000-08-29

申请号：US924291

申请日：1997-09-05

申请人： Harald Schliemann ,  Hans Nickel ,  Michael Marz ,  Savino Petruzzelli ,  Matthias Fleischer ,  Siegfried Wilhelm

发明人： Harald Schliemann ,  Hans Nickel ,  Michael Marz ,  Savino Petruzzelli ,  Matthias Fleischer ,  Siegfried Wilhelm

IPC分类号： B60K15/05 ,  B60K15/04 ,  F02M37/00 ,  B65D41/04 ,  B65D51/16

CPC分类号： B60K15/0406

摘要： A closure arrangement of a container has fill socket with an inner thread and a closure cap with a cylindrical base body having an outer thread matching the inner thread of the fill socket of the container. The cylindrical base body has an annular flange adjacent to the outer thread. An annular seal, connected to one side of the annular flange facing the outer thread, is provided for sealingly resting on the rim of the fill socket when the closure cap is threaded into the fill socket. The outer thread has a resilient tongue extending in the circumferential direction of the cylindrical body and has a radial projection cooperating with the abutment of the matching inner thread. The radial projection, when the closure cap is threaded into the fill socket, catches in a catch position behind the abutment before a fully closed position of the closure cap in the fill socket is reached.

摘要翻译： 容器的封闭装置具有带有内螺纹的填充插座和具有圆柱形基体的封闭盖，该圆柱形基体具有与容器的填充插座的内螺纹相匹配的外螺纹。 圆柱形基体具有与外螺纹相邻的环形凸缘。 设置环形密封件，其连接到面向外螺纹的环形凸缘的一侧，用于密封地搁置在填充套筒的边缘上，当封闭盖拧入填充插座时。 外螺纹具有在圆柱体的圆周方向上延伸的弹性舌片，并且具有与匹配的内螺纹的邻接部配合的径向突出部。 当封闭帽在填充插座中的完全关闭位置到达填充插座的完全关闭位置时，径向突出部分在闭合盖拧入填充插座中时捕获到支座后面的卡扣位置。

公开(公告)号：US20110128551A1

公开(公告)日：2011-06-02

申请号：US12736656

申请日：2009-04-01

申请人： Matthias Fleischer ,  Thomas Seiffert

发明人： Matthias Fleischer ,  Thomas Seiffert

IPC分类号： G01B11/02 ,  G01B9/02

CPC分类号： G01B9/02028 ,  G01B9/02021 ,  G01B9/02069 ,  G01B9/0209

摘要： An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an adjusting arrangement for adjusting a path difference between the measuring beams and the reference beams, and a having a detector for recording images of the superposition of the reference beams and the measuring beams reflected by the measured object. According to the present system, a synchronization arrangement is used to control the adjusting arrangement so that the path difference between the measuring beams and the reference beams is adjusted in synchronization with the images recorded by the detector. The present system also relates to a method for adjusting a path difference.

摘要翻译： 一种用于测量被测物体的干涉测量系统，具有用于产生测量光束路径的装置，测量指向被测物体的光束，具有用于产生参考光束路径的布置，参考光束被引导至参考元件，具有调节 用于调整测量光束和参考光束之间的路径差的装置，以及具有用于记录参考光束的叠加和被测量物体反射的测量光束的叠加图像的检测器。 根据本系统，使用同步装置来控制调节装置，使得测量光束和参考光束之间的路径差异与由检测器记录的图像同步地被调节。 本系统还涉及用于调整路径差的方法。